Sensors for use in high vibrational applications and methods for fabricating same
First Claim
1. A semiconductor sensor device comprising:
- a semiconductor diaphragm member having a top surface coated with an oxide layer;
P+ sensor elements fusion bonded to said oxide layer at a relatively central area of said diaphragm;
P+ finger elements fusion bonded to said oxide layer extending from said sensors to an outer contact location of said diaphragm for each finger;
an external rim of P+ material fusion bonded to said oxide layer and surrounding said sensors and fingers;
a glass cover member electrostatically bonded to said fingers and rim to hermetically seal said sensors and fingers of said diaphragm member, said glass cover having a depression above said sensors and having a plurality of apertures, each aperture associated with a separate finger at said contact location wherein each contact location can be accessed via said associated aperture in said glass cover member.
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Accused Products
Abstract
A hermetically sealed sensor device having a glass member defining a mounting surface and base surface, the glass member including one or more pin apertures extending through the glass member from the mounting surface to the base surface. A metallic pin is disposed in each of the pin apertures, each pin having a portion extending above the mounting surface. The sensor device also includes a semiconductor sensor chip including a semiconductor device and a cover hermetically bonded and sealed to a surface of the semiconductor device, the cover protecting the semiconductor device from the external environment. The is chip hermetically bonded and sealed to the mounting surface of glass member. The semiconductor device has one or more contacts disposed on the surface thereof, for making electrical contact thereto, the cover having one or more contact apertures extending therethrough which exposes a portion of the contacts. The portion of each pin extending above the mounting surface is received within the contact apertures and a conductive glass frit mixture disposed in the contact apertures, hermetically seals the contact apertures and provides electrical continuity between the pins and the contacts.
197 Citations
20 Claims
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1. A semiconductor sensor device comprising:
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a semiconductor diaphragm member having a top surface coated with an oxide layer; P+ sensor elements fusion bonded to said oxide layer at a relatively central area of said diaphragm; P+ finger elements fusion bonded to said oxide layer extending from said sensors to an outer contact location of said diaphragm for each finger; an external rim of P+ material fusion bonded to said oxide layer and surrounding said sensors and fingers; a glass cover member electrostatically bonded to said fingers and rim to hermetically seal said sensors and fingers of said diaphragm member, said glass cover having a depression above said sensors and having a plurality of apertures, each aperture associated with a separate finger at said contact location wherein each contact location can be accessed via said associated aperture in said glass cover member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 13, 14, 15, 16, 17, 18, 19)
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11. A method in which a semiconductor sensor device is made by which coating a semiconductor diaphragm with an oxide layer;
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fusion bonding P+ sensor elements to said oxide layer at a relatively central area of said diaphragm; fusion bonding P+ finger elements to said oxide layer extending from said sensors to an outer contact location outside of the active portion of said diaphragm for each finger; fusion bonding an external rim of P+ material to said oxide layer and surrounding said sensors and said fingers; electrostatically bonding a glass cover to said fingers and said rim to hermetically seal said sensors and said fingers of said diaphragm member, said glass member made with a depression above said sensors and having a plurality of apertures associated with each finger but the apertures made smaller than the width of such fingers and being with the length of said fingers wherever each aperture associated with a separate finger at said contact location can be accessed via said associated aperture in said glass member. - View Dependent Claims (12, 20)
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Specification