Wafer conveyor system

• US 5,955,857 A
• Filed: 08/14/1996
• Issued: 09/21/1999
• Est. Priority Date: 08/14/1995
• Status: Expired due to Term

• Current Assignee: Hyundai Electronics Industries Co. Ltd. (SK Hynix Inc.)
• Original Assignee: Hyundai Electronics Industries Co. Ltd. (SK Hynix Inc.)
• Inventors: Lee, Ki-Ho, Kim, Yong-Pyo, Ryoo, Hae-San, Kwon, Chang-Heon
• Primary Examiner(s): Ip, Paul
• Application Number:
  US08/698,268
• Time in Patent Office: 1,133 Days
• Field of Search: 318/560-696, 318/138, 318/139, 901/1, 901/3, 414/786, 414/273, 414/331, 414/940, 414/222, 414/939, 414/935, 414/217, 414/280, 414/282, 364/478.06, 364/478.03, 364/468.28, 364/424.02, 364/424.03, 395/650, 180/168, 180/169
• US Class Current: 318/568.11
• CPC Class Codes: G05B 19/4189 characterised by the transport system
• CPC Class Codes: G05B 2219/31002 Computer controlled agv conveys workpieces between buffer and cell
• CPC Class Codes: G05B 2219/31004 Move vehicle to battery charge or maintenance area
• CPC Class Codes: G05B 2219/31005 Detect obstacles on path of vehicle
• CPC Class Codes: G05B 2219/45054 Handling, conveyor
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A wafer conveyor system and controlling method therefor sends/receives a semiconductor wafer to/from a designated place includes a stocker for storing and delivering a package box with a plurality of wafers therein, a transferring path for connecting one stocker with another stocker, a carrier traveling along the transferring path for transporting the package box between the stockers, an automatic charging device placed to any one position of the transferring path for charging a battery loaded onto the carrier traveling along the transferring path when the battery is discharged, and a central control unit for controlling the driving of the stocker, transferring path, carrier and automatic charging device.

Claims

1. A wafer conveyor system comprising:

a stocker for storing and delivering a package box with a plurality of wafers therein;

a transferring path for connecting one stocker with another stocker;

a carrier traveling along said transferring path for transporting said package box between said stockers;

an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged; and

a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and

wherein said stocker comprises;

a storing section having a plurality of storage zones for storing the package boxes;

a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section; and

a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and

wherein said pivot arm unit comprises;

a fixing arm fixed to a moving holder of said pivot arm lifter;

a first robot arm installed to said fixing arm;

a first driving section for driving said first robot arm to be rotatable;

a second robot arm installed to the other end of said first robot arm;

a second driving section for driving said second robot arm; and

a pickup arm installed to the other end of said second robot arm,

whereby said first robot arm and second robot arm are independently driven by separate driving motors rotated in a speed ratio of 1;

2 to allow a pickup arm driving shaft to conduct the linear motion toward the center of a first robot arm driving shaft, and a rotational ratio of a second robot arm driving shaft and said pickup arm driving shaft rotated with said second robot arm driving shaft is maintained by 2;

1 to allow said pickup arm to conduct the linear motion.

2. A wafer conveyor system as claimed in claim 1, wherein a joint portion of said second robot arm comprises an insert fixed to said first robot arm to encircle the outer circumference of said second driving shaft of said second robot arm coupled to said first robot arm, and rotation supporting bearings respectively installed to the upper and lower portions of said insert,

whereby said arm is sustained against the moment of inertia and torsion caused by the deadweight of said arm and delivering weight to be smoothly rotated.

3. A wafer conveyor system as claimed in claim 2, wherein a timing pulley is fixed to said insert, and said timing pulley and pickup arm driving shaft are connected by a timing belt for rotating said pickup arm driving shaft along with the rotation of said second robot arm.

4. A wafer conveyor system as claimed in claim 3, further comprising a first housing for supporting said second driving shaft and a second housing for supporting said pickup arm driving shaft,

wherein first and second housings are joined by upper and lower fixing plates to form a frame of said second robot arm.

5. A wafer conveyor system as claimed in claim 3, further comprising a roller fixedly installed to said upper fixing plate for maintaining a proper tension of said timing belt.

6. A wafer conveyor system as claimed in claim 2, further comprising a motor position-controlling encoder for connecting said second driving shaft coupled to said second robot arm and a motor shaft of said second driving section by means of a flexible coupling, and position control means for controlling the rotational position and home position of said second robot arm.

7. A wafer conveyor system as claimed in claim 6, wherein said position control means comprises:

a plurality of sensor plates installed to a shaft portion between said second driving shaft and flexible coupling; and

a sensing section having two limit sensors and one home sensor for respectively sensing the positions of said sensor plates.

8. A wafer conveyor system as claimed in claim 7, wherein said pickup arm comprises:

a hanger base joined to said driving shaft of said second robot arm;

a hanger arm installed to be moved at both sides of said hanger base in the opposite direction for fixing said package box;

a motor for affording a driving force to said hanger arm;

power converting means for converting a motive power of said motor into the side-to-side linear motion; and

power transmitting means for transmitting the motive power converted by said power converting means to said hanger arm.

9. A wafer conveyor system as claimed in claim 8, comprising a package box holder capable being exchangeably used in accordance with the kind of said package boxes by being coupled to be separable from the inner side of said hanger arm.

10. A wafer conveyor system as claimed in claim 8, wherein said power converting means comprises a pinion coupled to said motor shaft;

and racks coupled to the upper and lower portions of said pinion.

11. A wafer conveyor system as claimed in claim 8, wherein said power transmitting means comprises a power transmitting shaft coupled to said rack by means of said flexible coupling, and a guide shaft connected to said power transmitting shaft and hanger arm while having a triangular structure of three-to-one set capable of distributing and supporting a variable weight load imposed upon said hanger arm.

12. A wafer conveyor system as claimed in claim 11, wherein said guide shaft is connected to said power transmitting shaft by a guide shaft fix mount for integrally fixing three guide shafts and a clamp for fixing said power transmitting shaft to be coupled to a shaft fixing holder.

13. A wafer conveyor system as claimed in claim 11, wherein a guide bushing for absorbing the load exerting upon said guide shaft is mounted to said guide shaft.

14. A wafer conveyor system as claimed in claim 8, further comprising a position sensor for controlling the open/close positions of said hanger arm.

15. A wafer conveyor system as claimed in claim 8, further comprising a proximity sensor for sensing the existence of said package box installed to a motor cover.

16. A wafer conveyor system comprising:

a stocker for storing and delivering a package box with a plurality of wafers therein;

a transferring path for connecting one stocker with another stocker;

a carrier traveling along said transferring path for transporting said package box between said stockers;

an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged; and

a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and

wherein said stocker comprises;

a storing section having a plurality of storage zones for storing the package boxes;

a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section; and

a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and

wherein a joint portion of said first robot arm is constructed such that a driving shaft connecting portion of said first robot arm extends to be fitted with a bearing housing, a first driving shaft for rotating said first robot arm is fitted into an inner diameter of said bearing housing, and a bearing for supporting said first robot arm is installed to an outer circumference of said bearing housing while bearings for supporting said first driving shaft are installed to upper and lower ends of said inner diameter.

17. A wafer conveyor system as claimed in claim 16, wherein said bearing housing is fixed to said fixing arm for distributing an exerting reaction force by said fixing arm, and a distance between said bearings respectively installed to said upper and lower ends of said inner diameter of said bearing housing is maximally provided to decrease said reaction force imposed upon said bearings.

18. A wafer conveyor system as claimed in claim 16, wherein said first driving shaft coupled to said first robot arm and a motor shaft of said driving section are joined by a flexible coupling for absorbing the inertia exerting upon said first robot arm during the stop and moving operations, said wafer conveyor system further comprising position control means for controlling the rotating and stop positions and the initial position of said first robot arm.

19. A wafer conveyor system as claimed in claim 18, wherein said position control means comprises:

a plurality of sensor plates installed to a shaft portion between said first driving shaft and flexible coupling; and

a sensing section having two limit sensors and one home sensor for respectively sensing the positions of said sensor plates.

20. A wafer conveyor system as claimed in claim 16, wherein said carrier comprises:

a driving section having driving means onto the front of a table loaded with said package box thereon;

a charging section equipped with said battery for supplying the electric said power to said driving means at the rear portion thereof; and

control means for controlling the driving of said driving means.

21. A wafer conveyor system comprising:

a stocker for storing and delivering a package box with a plurality of wafers therein;

a transferring path for connecting one stocker with another stocker;

a carrier traveling along said transferring path for transporting said package box between said stockers;

an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged; and

a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and

wherein said stocker comprises;

a storing section having a plurality of storage zones for storing the package boxes;

a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section; and

a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and

wherein said pivot arm lifter comprises;

a main body frame erectly installed to be linearly movable along a pivot arm trans apparatus;

a vertical feed member installed to be movable up and down to said main body frame by fixing said pivot arm unit;

a motor for providing a motive power to said vertical feed member;

power transmitting means for transmitting said motive power of said motor to said vertical feed member;

a guide block installed to the interior of said main body frame for supporting and guiding the rotational moment of inertia of said pivot arm unit fixed to said vertical feed member and supporting the moment of inertia applied during the rotation of said pivot arm unit;

a balance weight installed to be moved in the opposite direction to the advancing direction of said vertical feed member for decreasing the load exerting upon said motor when said vertical feed member ascends; and

power decelerating means for decelerating the motive power of said motor to the proper speed of said vertical feed member.

22. A wafer conveyor system as claimed in claim 21, wherein said guide block is connected to an insert plate of said vertical feed member.

23. A wafer conveyor system as claimed in claim 21, wherein said balance weight is connected to the opposite side of said vertical feed member of said main body frame by a wire, and comprises guide means for guiding the up and down movement of said balance weight.

24. A wafer conveyor system as claimed in claim 23, wherein the weight of said balance weight corresponds to the sum of the weight of said vertical feed member and a transferred variable weighing object to said pivot arm.

25. A wafer conveyor system as claimed in claim 23, wherein said guiding means comprises a bright shaft erectly installed to both insides of said main body frame, and a guide rollers installed to both upper and lower portions of said balance weight to conduct a rolling motion with said bright shaft.

26. A wafer conveyor system as claimed in claim 21, wherein said power decelerating means comprises a driving gear coupled to said motor shaft, a driven gear engaged with said driving gear;

a rack joined to a driven gear shaft and a pinion engaged with said rack to be rotated,

whereby the motor speed is secondarily decelerated by a gear ratio of said driving gear and driven gear and that of said rack and pinion.

27. A wafer conveyor system as claimed in claim 26, wherein said driving gear and driven gear have the gear ratio of 1:

2 and the gear ratio of said rack and pinion is 1;

40 to make the proper speed of said vertical feed member be at least 80% of the motor rotating force.

28. A wafer conveyor system as claimed in claim 21, wherein said power transmitting means comprises an electric shaft piercing through said pinion of said power decelerating means and a timing belt for connecting said vertical feed member and a pulley spline-coupled to said electric shaft for being rotated.

29. A wafer conveyor system as claimed in claim 28, wherein said vertical feed member connected by said timing belt is installed with a tension adjusting hole for regulating the tension of said timing belt.

30. A wafer conveyor system as claimed in claim 21, further comprising position control means for controlling the up and down position of said vertical feed member, and position determining means for determining the position of said pivot arm attached to said vertical feed member.

32. A wafer conveyor system as claimed in claim 30, wherein said position determining means is an encoder installed to said motor.

31. A wafer conveyor system as claimed in claim 31, wherein said position control means comprises limit sensors for forcibly stopping said pivot arm in case of an abnormal driving, and a home sensor for determining an initial position.

33. A wafer conveyor system comprising:

a stocker for storing and delivering a package box with a plurality of wafers therein;

a transferring path for connecting one stocker with another stocker;

a carrier traveling along said transferring path for transporting said package box between said stockers;

an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged; and

a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and

wherein said transferring path comprises a main rail installed by connecting said stockers furnished to respective process lines, and a branch apparatus for transporting said carrier traveling along said main rail toward said stocker, and

wherein said branch apparatus comprises;

a first rail perpendicularly separated from said main rail to be moved;

a second rail installed to be opposite to said first rail by maintaining a predetermined distance from said first rail;

plates for supporting said first rail and second rail;

guiders for guiding the movement of said plates;

driving means for supplying a motive power to said plates; and

a base for supporting said driving means and guiders.

34. A wafer conveyor system as claimed in claim 33, wherein a bracket for maintaining the perpendicular state of said first rail and second rail.

35. A wafer conveyor system as claimed in claim 34, wherein said bracket comprises a support end and a fixing end for supporting said first rail and second rail projecting from both sides of a bottom plane thereof, and a shaft hole in the central portion thereof for fixing a fixture supporting said first rail and second rail together with said supporting end.

36. A wafer conveyor system as claimed in claim 33, wherein said driving means comprises a motor being a driving source;

means for transmitting said motive power of said motor;

a lead screw rotated by said motive power from said power transmitting means; and

a nut member mounted to said plate for reciprocating along said lead screw.

37. A wafer conveyor system as claimed in claim 36, wherein said power transmitting means is comprised of a timing belt for connecting a pulley coupled to said motor and said pulley joined to said lead screw.

38. A wafer conveyor system as claimed in claim 33, wherein a stopper for returning said second rail to its original position is installed to said base.

39. A wafer conveyor system as claimed in claim 33, wherein said branch apparatus further comprises a rail stopper for accurately aligning said first and second rails with said main rail.

40. A wafer conveyor system as claimed in claim 39, wherein said rail stopper comprises a rectangular-shaped main body, a first support end extending from the upper portion of one side of said main body for supporting said first rail, and a second support end extending from the central portion of the other side of said main body for supporting said second rail.

41. A wafer conveyor system comprising:

a stocker for storing and delivering a package box with a plurality of wafers therein;

a transferring path for connecting one stocker with another stocker;

a carrier traveling along said transferring path for transporting said package box between said stockers;

an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged; and

a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and

wherein said carrier comprises;

a driving section having driving means onto the front of a table loaded with said package box thereon;

a charging section equipped with said battery for supplying electric power to said driving means at a rear portion thereof; and

control means for controlling the driving of said driving means, and

wherein said driving section comprises a main roller rotated by receiving said motive power from said driving means; and

said charging section is installed with an auxiliary roller rotated in association with said main roller.

42. A wafer conveyor system as claimed in claim 41, further comprising a balance keeping roller erectly installed to both sides of said main roller and auxiliary roller for keeping the balance between said driving section and charging section while rotating along said main rail, and a guide roller installed to the front of said main roller and auxiliary roller for inducing said driving section and charging section into the curvature direction when being rotated along the curved rail.

43. A wafer conveyor system as claimed in claim 41, wherein said control means comprises:

communicating means for exchanging information about said package box put on said table and information about the moving position of said driving section with said central control unit;

a charge inspecting device for sensing the charging amount of said battery internally included in said charging section;

a position sensor for controlling the moving operation of said driving section; and

a front sensor for sensing a frontal obstruct.

44. A wafer conveyor system as claimed in claim 43, wherein said communicating means comprises:

a board for storing information;

an infrared ray emitting device for converting said information of said board into infrared rays to transmit the result to an external terminal;

an infrared ray emitting device holder for supporting aid infrared ray emitting device; and

an infrared ray emitting device pusher for connecting said infrared ray emitting device holder to said central control unit.