Magnetic position measuring device using a plurality of sensors and a scale

• US 5,955,882 A
• Filed: 05/17/1996
• Issued: 09/21/1999
• Est. Priority Date: 11/17/1993
• Status: Expired due to Fees

• Current Assignee: AMO GmbH
• Original Assignee: AMO GmbH
• Inventors: Eisschiel, Heinz, Vasiloiu, Victor
• Primary Examiner(s): Patidar, Jay M.
• Application Number:
  US08/648,062
• Time in Patent Office: 1,222 Days
• Field of Search: 324/207.21, 324/207.2, 324/207.23, 324/207.24, 324/207.25, 324/173, 324/174, 324/252, 324/262, 324/225, 324/261, 338/32 R, 338/32 H, 341/15, 360/113
• US Class Current: 324/207.21
• CPC Class Codes: G01D 5/142 using Hall-effect devices measuring magnetic variables using Hall-effect or other galvanomagnetic devices G01R33/06

Abstract

A magnetic position measuring device includes a sensor and a scale. At least one of the sensor and scale is movable in relation to the other. The sensor includes four sensor elements positioned along a longitudinal axis parallel to the direction of the movement. The scale is made of alternating and repeating first and second sections. The first sections have a first reluctance and the second sections have a second reluctance. The first sections each have a length "l" and the second sections each have a length "s". The Sensor includes a field plate and four sensor elements positioned on the field plate along the longitudinal axis. The four sensor elements include first and second outer sensor elements and first and second inner sensor elements.

Claims

1. A magnetic positioning measuring device comprising a sensor and a scale, at least one of said sensor and said scale being movable in relation to the other of said sensor and said scale, said sensor comprising four sensor elements positioned along a longitudinal axis parallel to a direction of said movement, said scale comprising alternating and repeating first and second sections, said first sections having a first reluctance and said second sections having a second reluctance, said first sections each having a length "l" along said longitudinal axis and said second sections each having a length "s" along said longitudinal axis;

said sensor comprising a field plate and said four sensor elements positioned on said field plate along said longitudinal axis, said four sensor elements comprising first and second outer sensor elements and first and second inner sensor elements, said first outer sensor element being closer to said first inner sensor element than said second outer sensor element, and said second outer sensor element being closer to said second inner sensor element than said first sensor element;

each of said four sensor elements comprising a first edge facing a first direction along said longitudinal axis and a second edge facing a second direction opposite said first direction along said longitudinal axis, positions of said four sensors along said longitudinal axis being defined as follows;

d₁ =d₃ =(2k+1)p/2, and

d₂ =kp-p/4 wherein k is one of a positive integer and zero, p=s+l is the pitch of said scale, d₁ is a distance between said first edge of said first outer sensor element and said first edge of said first inner sensor element, d₃ is a distance between said first edge of said second outer sensor element and said first edge of said second inner sensor element, and d₂ is a distance between respective said first edges of said first and second inner sensor elements.

2. The magnetic position measuring device according to claim 1, wherein each of said four sensor elements is connected in a Wheatstone bridge having first, second, third and fourth points of connection, said first outer sensor element being connected across said first and fourth points of connection, said second outer sensor element being connected across said second and third points of connection, said first inner sensor element being connected across said fourth and third points of connection, and said second inner sensor element being connected across said first and second points of connection;

a supply voltage applied across said first and third points of connection of said bridge;

a voltage dividing circuit connected across said first and third points of connection of said bridge, said bridge outputting a first output measuring signal S₁ between said second point of connection and an intermediate connection point within said voltage dividing circuit, and outputting a second output measuring signal S₂ between said fourth point of connection of said bridge and said intermediate connection point within said voltage dividing circuit.

3. The device according to claim 1, wherein said first sections of said scale comprise engraved grooves and said second sections of said scale comprise bridges.

4. The device according to claim 1, wherein said first sections of said scale comprise perforations and said second sections of said scale comprise bridges.

5. The device according to claim 1, wherein said scale has a thickness of about 0.2 mm, a pitch of about 1 mm, and a protective film covering.

6. The device according to claim 1, wherein a distance between said scale and said four sensor elements is substantially 0.6 mm.

7. The device according to claim 1, comprising plural scale portions having different respective pitch values, said plural scale portions comprising one of (1) plural independent scales disposed in parallel with each other and (2) plural tracks disposed on a common scale in parallel with each other, said device further comprising a sensor for each of said plural scale portions.

8. The device according to claim 7, wherein one of said plural scale portions comprises a reference mark for use in determining an absolute position of said scale in relation to said sensor.

9. The device according to claim 1, wherein said scale comprises equally spaced rectangular grooves.

10. The device according to claim 1, wherein said scale is mounted to a blank tape comprising soft steel.

11. The device according to claim 10, wherein said scale is attached to said blank tape with an adhesive.

12. The device according to claim 10, wherein said tape has thickness and width dimensions substantially equal to thickness and width dimensions of said scale.