Q-controlled microresonators and tunable electric filters using such resonators

• US 5,955,932 A
• Filed: 06/06/1995
• Issued: 09/21/1999
• Est. Priority Date: 12/11/1992
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Howe, Roger T., Nguyen, Clark Tu-Cuong
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): GAMBINO, DARUIS
• Application Number:
  US08/473,342
• Time in Patent Office: 1,568 Days
• Field of Search: 333/186, 333/188, 333/189, 333/191, 333/192, 333/197, 361/277, 361/278, 361/280, 361/281, 361/287, 331/116 R, 331/116 M, 331/154
• US Class Current: 333/186
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B
• CPC Class Codes: H01G 5/14 due to longitudinal movement of electrodes
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/0023 Balance-unbalance or balance-balance networks
• CPC Class Codes: H03H 9/02377 Symmetric folded-flexure
• CPC Class Codes: H03H 9/02393 Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
• CPC Class Codes: H03H 9/02425 by electrostatically pulling the beam
• CPC Class Codes: H03H 9/467 Post-fabrication trimming of parameters, e.g. center frequency

Abstract

A Q-controlled microresonator and devices including such resonators.

Claims

1. A method for passband correction of a filter having a controlled quality factor, comprising:

providing at least one Q-controlled electromechanical resonator as at least one biquad of said filter; and

adjusting a quality factor of said at least one Q-controlled electromechanical resonator to correct a passband of said filter, using negative feedback such that said controlled quality factor is independent of a value of said quality factor of said resonator.