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Micromechanical rotation speed sensor

  • US 5,959,206 A
  • Filed: 11/18/1997
  • Issued: 09/28/1999
  • Est. Priority Date: 05/31/1995
  • Status: Expired due to Fees
First Claim
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1. In a micromechanical rate-of-rotation sensor of the type that is based on the coriolis principle and includes two plate-like oscillators driven electrostatically to oscillate out-of-phase, the improvement comprising, in combination:

  • a) said two oscillators being arranged one above the other in two plane-like layers; and

    b) said oscillators are arranged to be driven to oscillate perpendicular to their plate-like planes.

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