Micromechanical rotation speed sensor
First Claim
1. In a micromechanical rate-of-rotation sensor of the type that is based on the coriolis principle and includes two plate-like oscillators driven electrostatically to oscillate out-of-phase, the improvement comprising, in combination:
- a) said two oscillators being arranged one above the other in two plane-like layers; and
b) said oscillators are arranged to be driven to oscillate perpendicular to their plate-like planes.
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Accused Products
Abstract
A micromechanical rate-of-rotation sensor based on the coriolis principle includes two plate-like oscillators electrostatically driven to oscillate out-of-phase. The oscillators are arranged one above another in alignment to oscillate via plate-like support structures separated from one another by a very small drive capacitor gap. By suitable selection of the natural frequency of the support structure parts, due to a significantly-larger distance between the oscillators, it is possible to achieve larger amplitudes of oscillation and, hence, a high oscillation quality, unlimited by the drive capacitor gap (which is narrow for reasons of good stimulation at small excitation voltages). The two oscillator structures in each case preferably comprise two electrically mutually insulated bonded parts suspended via springs within a frame and configured so that essentially only rotational oscillator movements are possible with linear movements of the oscillators in the ±z spatial direction largely suppressed.
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Citations
20 Claims
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1. In a micromechanical rate-of-rotation sensor of the type that is based on the coriolis principle and includes two plate-like oscillators driven electrostatically to oscillate out-of-phase, the improvement comprising, in combination:
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a) said two oscillators being arranged one above the other in two plane-like layers; and b) said oscillators are arranged to be driven to oscillate perpendicular to their plate-like planes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification