Integrated electromagnetic device and method
First Claim
1. An electromagnetic device, comprising:
- a substrate;
a conduction path overlaying the substrate and having first and second electrodes for developing an inductance of the electromagnetic device;
a first magnetic shield disposed between the substrate and the conduction path wherein an opening is formed in the first magnetic shield and wherein the opening is suitable for running perpendicular to any applied current flow to reduce any eddy current within the first magnetic shield; and
a second magnetic shield overlaying the conduction path and coupled to the first magnetic shield to enclose the conduction path wherein the first and second magnetic shields are suitable to increase magnetic fields generated by current flow along the conduction path.
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Abstract
An integrated electromagnetic device (112) provides increased inductance in a smaller area on a semiconductor substrate (130). A conduction path (140) is disposed on the substrate for developing the inductance. A first magnetic shield (142) is disposed between the substrate and the conduction path to concentrate the magnetic flux induced by current flowing along the conduction path, which increases the inductance. Inductance is further increased by shielding the magnetic flux from the substrate with the first magnetic shield, which reduces substrate eddy currents that oppose the applied current. A second magnetic shield (144) overlaying the conduction path is coupled to the first magnetic shield, further concentrating the magnetic flux and increasing the inductance.
86 Citations
12 Claims
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1. An electromagnetic device, comprising:
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a substrate; a conduction path overlaying the substrate and having first and second electrodes for developing an inductance of the electromagnetic device; a first magnetic shield disposed between the substrate and the conduction path wherein an opening is formed in the first magnetic shield and wherein the opening is suitable for running perpendicular to any applied current flow to reduce any eddy current within the first magnetic shield; and a second magnetic shield overlaying the conduction path and coupled to the first magnetic shield to enclose the conduction path wherein the first and second magnetic shields are suitable to increase magnetic fields generated by current flow along the conduction path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12)
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11. An electromagnetic device, comprising:
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a semiconductor substrate; a conduction path overlaying the semiconductor substrate and having first and second electrodes for receiving an applied current to develop an inductance of the electromagnetic device; and a magnetic shield disposed between the semiconductor substrate and the conduction path and patterned with an opening that runs perpendicular to the applied current to reduce an eddy current in the semiconductor substrate.
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Specification