Rasterizer for pattern generator

• US 5,959,606 A
• Filed: 10/24/1994
• Issued: 09/28/1999
• Est. Priority Date: 10/04/1985
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: ETEC Systems Incorporated (Applied Materials Incorporated)
• Inventors: Teitzel, Robin L., Jolley, Matthew J., Green, Morris H., Wipfli, John L., Goodman, Allan L.
• Primary Examiner(s): WU, XIAO MIN
• Application Number:
  US08/327,581
• Time in Patent Office: 1,800 Days
• Field of Search: 345/112, 345/133, 345/134, 345/135, 345/136, 345/118, 345/127, 345/131, 345/147, 345/149, 345/150, 345/151, 345/152, 345/440, 345/441, 345/442, 345/443
• US Class Current: 345/690
• CPC Class Codes: G03F 1/00 Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
• CPC Class Codes: G09G 5/393 Arrangements for updating the contents of the bit-mapped memory

Abstract

A rasterizer, particularly suited for generating patterns for semiconductor masks and the like is described. An 8×8 array uses RAS, CAS and WE signals in addition to the memory address for accessing the array. A state machine is used to convert the pattern data (e.g., type of object orientation, etc.) into accessing data with the WE generator being driven through a ROM.

Claims

1. A method for generating a geometric pattern on a substrate, said method comprising the steps of:

supplying first data representing a trapezoid to be generated on said substrate, said first data comprising location, size and orientation information for said trapezoid;

converting said first data to second pattern data, wherein said second pattern data defines only triangles and a rectangle to represent said trapezoid;

generating pixel information from said second data; and

generating said geometric pattern on said substrate based on said pixel information.

2. The method as recited by claim 1, further comprising the step of storing said second data in a first memory means.

3. The method as recited by claim 2, further comprising the step of storing said pixel information in a second memory means.

4. The method as recited by claim 3, wherein said second data comprises height, width and position information.

5. The method as recited by claim 4, wherein said position information comprises orientation and origin information.

6. The method as recited by claim 5, wherein said origin information comprises x-coordinate information and y-coordinate information.

7. The method as recited by claim 6, wherein said height information comprises a x-column count and said y-information comprises a y-column count.

8. The method as recited by claim 7, wherein said step of generating said pixel information comprises the steps of:

initializing a first counter means with said x-coordinate information;

initializing a second counter means with said y-coordinate information;

performing steps (a) though (d), comprising;

(a) writing information to said second memory at a location defined by the intersection of the value of said first counter means and the value of said second counter means;

(b) incrementing said second counter in the direction of patterns orientation;

(c) repeating steps (a) through (b) y-column count times;

(d) incrementing said first counter means in the direction of said patterns orientation;

(e) repeating steps (a) through (d) x-column count times.

9. The method as recited by claim 1, wherein all of the triangles are right angle isosceles triangles.

10. In an apparatus for generating geometric patterns on a substrate, said apparatus including a data input means for receiving first data defining a geometric patter, said data input means coupled to provide said first data to a conversion mean for converting said first data to second pattern data, said conversion means coupled to provide said second pattern data to a rasterization means for converting said second pattern data to pixel data, and said rasterization means coupled to provide said pixel data to a writing means for writing said pixel data to a medium, a method comprising the steps of:

said data input means receiving said first data, said first data comprising location, size and orientation information for defining a trapezoid;

said conversion means receiving said first data from said data input means and converting said first data to said second pattern data where said second pattern data defines only triangles and a rectangle to represent said trapezoid;

said rasterization means receiving said second pattern data from said conversion means and converting said second pattern data to pixel data representative of said at least one geometric object;

said writing means receiving said pixel data from said rasterization means and writing said pixel data onto said media.

11. The method of claim 10 wherein said second data further includes a second triangle, said first triangle and said second triangle representing portions of said trapezoid.

12. The apparatus as recited by claim 10, wherein all of the triangles are right angle isosceles triangles.

13. An apparatus for generating geometric patterns on a substrate, said apparatus including:

a storage device for storing first data, said first data defining a trapezoid;

a processor, being coupled to said storage device, for converting said first data into a second pattern data, wherein said second data uses only triangles and a rectangle to represent said trapezoid;

a rasterizer, being coupled to said processor, for rasterizing said second pattern data to generate pixel data corresponding to said triangles and a rectangle;

an optical system, being coupled to said rasterizer, having a beam output, said beam output corresponding to said pixel data; and

a substrate holder being optically coupled to said beam output.

14. The apparatus as recited by claim 13, wherein all of the triangles are right angle isosceles triangles.