Spatial light modulator
First Claim
Patent Images
1. A method of forming one or more light modulators comprising the steps of:
- a) forming a fixed electrode on a substrate;
b) forming an insulator layer over the fixed electrode;
c) forming a removable layer over a portion of the insulator layer;
d) forming a moveable electrode over the removable layer and exposed insulator region by forming a film with a stress, as formed, which varies across the thickness thereof from compressive at a side next to the removable layer to tensile; and
e) removing the removable layer to leave the moveable electrode affixed at one end and enabling the moveable electrode to coil in a direction away from the fixed electrode as a result of the stress formed in the film.
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Abstract
A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.
343 Citations
21 Claims
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1. A method of forming one or more light modulators comprising the steps of:
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a) forming a fixed electrode on a substrate; b) forming an insulator layer over the fixed electrode; c) forming a removable layer over a portion of the insulator layer; d) forming a moveable electrode over the removable layer and exposed insulator region by forming a film with a stress, as formed, which varies across the thickness thereof from compressive at a side next to the removable layer to tensile; and e) removing the removable layer to leave the moveable electrode affixed at one end and enabling the moveable electrode to coil in a direction away from the fixed electrode as a result of the stress formed in the film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming one or more light modulators comprising the steps of:
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a) forming a fixed electrode on a substrate; b) forming an insulator layer over the fixed electrode; c) forming a first removable layer over a portion of the insulator layer; d) forming a second removable layer over said first removable layer which is patterned with corrugations and leaving a portion of the first insulator layer exposed at one end thereof; e) removing the patterned second removable layer and portions of the first removable layer while transferring the corrugations into said first removable layer and having an exposed region of the insulator layer at one end thereof; f) forming a corrugated electrode over the corrugated first removable layer and exposed insulator region; and g) removing the remaining first removable layer to leave the corrugated electrode affixed at one end to the insulator portion and enabling the corrugated electrode to coil in a direction away from the fixed electrode.
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14. A method of forming one or more light modulators comprising the steps of:
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a) forming a fixed electrode on a substrate; b) forming a first insulator layer over the fixed electrode; c) forming a release layer over the insulator; d) forming a moveable electrode over the release layer which moveable electrode is stressed, as formed, to have a stress which varies from compressive to tensile; and e) releasing the release layer to cause said electrode to coil away from the fixed electrode as a result of said stress. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A method of forming one or more light modulators comprising the steps of:
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a) forming a fixed electrode on a substrate; b) forming a first insulator layer over the fixed electrode; c) forming a corrugated release layer over the insulator; d) forming a corrugated prestressed electrode over the release layer which is stiffened by the corrugations; and e) releasing the release layer to allow the corrugated electrode to coil away from the fixed electrode due to the prestress.
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Specification