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Spatial light modulator

  • US 5,959,763 A
  • Filed: 02/26/1998
  • Issued: 09/28/1999
  • Est. Priority Date: 03/06/1991
  • Status: Expired due to Fees
First Claim
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1. A method of forming one or more light modulators comprising the steps of:

  • a) forming a fixed electrode on a substrate;

    b) forming an insulator layer over the fixed electrode;

    c) forming a removable layer over a portion of the insulator layer;

    d) forming a moveable electrode over the removable layer and exposed insulator region by forming a film with a stress, as formed, which varies across the thickness thereof from compressive at a side next to the removable layer to tensile; and

    e) removing the removable layer to leave the moveable electrode affixed at one end and enabling the moveable electrode to coil in a direction away from the fixed electrode as a result of the stress formed in the film.

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