Probe, manufacturing method therefor and scanning probe microscope

• US 5,960,147 A
• Filed: 03/21/1997
• Issued: 09/28/1999
• Est. Priority Date: 04/09/1996
• Status: Expired due to Fees

• Current Assignee: SII NanoTechnology Inc. (Hitachi, Ltd.)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Chiba, Norio, Yamamoto, Noritaka, Muramatsu, Hiroshi, Nakajima, Kunio
• Primary Examiner(s): Healy, Brian
• Application Number:
  US08/821,533
• Time in Patent Office: 921 Days
• Field of Search: 385/15, 385/12, 385/27, 385/28, 385/31, 385/32, 385/33, 385/38, 385/39, 385/43, 385/49, 385/123, 385/128, 385/127, 385/133, 385/147, 385/901, 385/902, 385/146, 359/368, 250/306, 250/311
• US Class Current: 385/123
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 385/902 Nonbundle fiberscope devices
• CPC Class Codes: Y10S 977/862 Near-field probe
• CPC Class Codes: Y10S 977/878 Shape/taper

Abstract

A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7.

Claims

1. A probe for a surface scanning microscope, the probe comprising:

a sharp tip portion for detecting an atomic force;

an elastic functioning portion disposed in the vicinity of the sharp tip portion; and

a circular cylindrical base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the circular cylindrical base portion.

3. A probe as set forth in claim 1;

wherein the elastic functioning portion has a constricted portion having a thinner outer configuration than other parts of the elastic functioning portion.

4. A probe as set forth in claim 1;

wherein a level difference in a boundary between the circular cylindrical base portion and the elastic functioning portion is tapered.

5. A probe as set forth in claim 3;

wherein the constricted portion of the elastic functioning portion has a generally flat-shaped cross-section.

6. A probe as set forth in claim 1;

wherein the probe comprises an optical fiber.

7. A probe as set forth in claim 1;

wherein the elastic functioning portion has a generally hook-shaped tip portion.

8. A probe as set forth in claim 1;

wherein the elastic functioning portion has a generally straight line-shaped tip portion.

9. A probe as set forth in claim 1;

further comprising a piezoelectric member integrally connected with the elastic functioning portion for electrically detecting a distortion that has occurred in the elastic functioning portion.

10. A probe as set forth in claim 9;

wherein the piezoelectric member comprises a quartz oscillator.

2. A probe for a surface scanning microscope and comprised of an optical waveguide comprising:

a sharp tip portion for detecting an atomic force, the sharp tip portion having at an end thereof an aperture for permitting the transmission therethrough of light and having a metal film disposed on the end of the sharp tip portion except for the aperture;

an elastic functioning portion disposed in the vicinity of the sharp tip portion; and

a base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion.

11. A method for manufacturing a probe, comprising the steps of:

decreasing the outside diameter of a part of a generally cylindrical-shaped probe to produce a part having a low spring constant; and

sharpening an end of the part of the probe having the decreased outside diameter to form a sharp tip portion.

14. A method for manufacturing a probe as set forth in claim 11;

further comprising the step of forming the tip portion of the probe into a hook shape.

15. A method for manufacturing a probe as set forth in claim 11;

further comprising the step of depositing a metal film on the tip portion of the probe except for an aperture portion thereof.

16. A method for manufacturing a probe as set forth in claim 11;

wherein the step of decreasing the outside diameter of a part of the probe and the step of sharpening an end of the part of the probe comprise wet chemical etching steps using the same etching solution, the wet chemical etching steps further comprising a step of immersing the probe in an etching solution to thereby decrease the outside diameter of the part thereof, thereafter drawing the probe to a required length thereof and further continuing the etching steps to thereby form the sharp tip portion of the probe.

17. A method for manufacturing a probe as set forth in claim 11;

wherein the step of sharpening the end of the part of the probe having the decreased outside diameter comprises applying a pulling force to the probe while heating the probe by heating means and pulling it to breakage.

19. A method for manufacturing a probe as set forth in claim 11;

further comprising the step of forming a constricted portion on the probe.

20. A method for manufacturing a probe as set forth in claim 19;

wherein the step of decreasing the outside diameter of the probe, the step of forming the sharp tip portion of the probe and the step of forming the constricted portion of the probe are carried out using an etching tub consisting of a first solution layer composed mainly of hydrofluoric acid and a second solution layer which has a lower specific gravity than the first solution layer and which does not react, and is not mixed, with the first solution layer.

12. A method for manufacturing a probe, comprising the steps of:

decreasing the outside diameter of a part of a generally cylindrical-shaped probe to produce a part having a low spring constant;

sharpening an end of the part of the probe having the decreased outside diameter; and

forming a constricted portion in a part of an elastic functioning portion of the probe by chemical etching.

18. A method for manufacturing a probe as set forth in claim 12;

wherein the step of forming a constricted portion in a part of the elastic functioning portion comprises forming a protective film on a tip portion of the probe and on a part, or the whole, of the elastic functioning portion to thereby form a constricted portion by wet chemical etching.

21. A method for manufacturing a probe as set forth in claim 12;

wherein the step of forming the constricted portion includes the step of using an etching tub consisting of a first solution layer that consists mainly of hydrofluoric acid, a second solution layer having a lower specific gravity than the first solution layer and which does not react, and is not mixed, with the first solution layer, and a third solution layer having a greater specific gravity than the first solution layer and which does not react, and is not mixed, with any one of the first and second solution layers.

22. A method for manufacturing a probe as set forth in claim 21;

wherein the first solution layer contains a surface active agent.

23. A method for manufacturing a probe as set forth in claim 21;

wherein the first, second and third solution layers are disposed in a capillary.

57. A method for manufacturing a probe as set forth in claim 21;

wherein the first, second and third solution layers are disposed in a capillary.

13. A method for manufacturing a probe, comprising the steps of:

shaving off a part of a side surface of a generally cylindrical-shaped probe;

decreasing the outside diameter of the portion of the probe which includes the shaved off part to produce a part having a low spring constant; and

sharpening a tip portion of the probe.

24. A scanning probe microscope for measuring a topography of a sample by using an atomic force acting between the sample and a probe, the scanning probe microscope comprising:

a probe having a sharp tip portion for detecting an atomic force, an elastic functioning portion disposed in the vicinity of the sharp tip portion, and a base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion;

vibrating means for horizontally or vertically vibrating one of the tip portion of the probe and a surface of a sample relative to the other;

detecting means for detecting a displacement of the probe; and

control means for maintaining an interval between the tip portion of the probe and the surface of the sample at a fixed value according to a detection signal output from the detecting means.

28. A scanning probe microscope as claimed in claim 24;

further comprising means for detecting a torsion of the probe.

30. A scanning probe microscope as set forth in claim 24;

further comprising a liquid cell for retaining the probe and the sample in a liquid.

25. A scanning probe microscope for measuring a topography of a sample by using an atomic force acting between the sample and a probe and for measuring optical information of the sample by using a light irradiated to or detected from the sample, the scanning probe microscope comprising:

a probe having a sharp tip portion for detecting an atomic force, an elastic functioning portion disposed in the vicinity of the sharp tip portion, and a base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion;

vibrating means for horizontally or vertically vibrating one of the tip portion of the probe and a surface of a sample relative to the other;

detecting means for detecting a displacement of the probe;

control means for maintaining an interval between the tip portion of the probe and the surface of the sample at a fixed value according to a detection signal output from the detecting means; and

measuring means for measuring optical information of the sample using light irradiated to or detected from the sample.

29. A scanning probe microscope as claimed in claim 25;

further comprising detecting means for detecting a torsion of the probe.

31. A scanning probe microscope as set forth in claim 29;

wherein the probe is generally cylindrical-shaped.

32. A scanning probe microscope as set forth in claim 25;

wherein the probe is generally cylindrical-shaped.

26. A scanning probe microscope for measuring a topography of a sample by contacting a probe with a surface of a sample, the scanning probe microscope comprising:

a probe having a sharp tip portion for detecting an atomic force, an elastic functioning portion disposed in the vicinity of the sharp tip portion, and a base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion;

vibrating means for horizontally or vertically vibrating one of the tip portion of the probe and a surface of a sample relative to the other;

detecting means for detecting a displacement of the probe; and

control means for maintaining an interval between the tip portion of the probe and the surface of the sample at a fixed value according to a detection signal output from the detecting means.

33. A scanning probe microscope as set forth in claim 26;

wherein the probe is generally cylindrical-shaped.

27. A scanning probe microscope for measuring a topography of a sample by contacting a probe with a surface of a sample and for measuring an optical information of the sample by using a light irradiated to or detected from the sample, comprising:

a probe having a sharp tip portion for detecting an atomic force, an elastic functioning portion disposed in the vicinity of the sharp tip portion, and a base portion for supporting the elastic functioning portion and formed integrally with the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion;

vibrating means for horizontally or vertically vibrating one of the tip portion of the probe and a surface of a sample relative to the other;

detecting means for detecting a displacement of the probe;

control means for maintaining an interval between the tip portion of the probe and the surface of the sample at a fixed value according to a detection signal output from the detecting means; and

measuring means for measuring optical information of the sample using light irradiated to or detected from the sample.

34. A scanning probe microscope as set forth in claim 27;

wherein the probe is generally cylindrical-shaped.

35. A probe for a surface scanning microscope, the probe comprising:

an optical fiber having a sharp tip portion for detecting an atomic force, an elastic functioning portion disposed in the vicinity of the sharp tip portion, and a base portion formed integrally with the elastic functioning portion for supporting the elastic functioning portion, an outer configuration of the elastic functioning portion being thinner than an outer configuration of the base portion.

36. A probe for a surface scanning microscope, the probe comprising:

an optical waveguide having a base portion, a core portion for propagating light therethrough, a sharp tip portion, and an intermediate portion having a low spring constant disposed between the base portion and the sharp tip portion.

37. A probe as claimed in claim 36;

wherein the optical waveguide has a progressively decreasing outer diameter from the base portion to the sharp tip portion.

38. A probe as claimed in claim 36;

wherein the sharp tip portion is generally hook-shaped.

39. A probe as claimed in claim 36;

wherein the base portion is generally circular cylindrical-shaped.

40. A probe as claimed in claim 36;

wherein the optical waveguide has a constricted portion disposed between the base portion and the intermediate portion.

41. A probe as claimed in claim 40;

wherein the optical waveguide has a tapered portion disposed between the constricted portion and the base portion.

42. A probe as claimed in claim 36;

wherein the optical waveguide has a tapered portion disposed between the base portion and the intermediate portion.

43. A scanning probe microscope comprising:

a probe having a base portion, a sharp tip portion, and an intermediate portion having a low spring constant disposed between the base portion and the sharp tip portion;

vibrating means for vibrating the sharp tip portion of the probe and a surface of a sample relative to one another;

detecting means for detecting a displacement of the probe; and

control means for maintaining a distance between the sharp tip portion of the probe and the surface of the sample constant according to a detection signal output from the detecting means.

44. A scanning probe microscope as claimed in claim 43;

wherein the probe has a progressively decreasing outer diameter from the base portion to the sharp tip portion.

45. A scanning probe microscope as claimed in claim 43;

wherein the sharp tip portion of the probe is generally hook-shaped.

46. A scanning probe microscope as claimed in claim 43;

wherein the base portion of the probe is generally circular cylindrical-shaped.

47. A scanning probe microscope as claimed in claim 43;

wherein the probe has a constricted portion disposed between the base portion and the intermediate portion.

48. A scanning probe microscope as claimed in claim 47;

wherein the probe has a tapered portion disposed between the constricted portion and the base portion.

49. A scanning probe microscope as claimed in claim 43;

wherein the probe has a tapered portion disposed between the base portion and the intermediate portion.

50. A method for manufacturing a probe, comprising the steps of:

immersing a probe in an etching solution to decrease the outside diameter of a part of the probe by etching to produce a part having a low spring constant;

drawing the probe to a required length thereof; and

continuing the etching step in the etching solution to sharpen an end of the part of the probe having the decreased outside diameter to form a sharp tip portion.

51. A method for manufacturing a probe as set forth in claim 50;

further comprising the step of forming a constricted portion on the probe.

52. A method as claimed in claim 50;

wherein the step of decreasing the outside diameter of the probe, the step of forming the sharp tip portion of the probe and the step of forming the constricted portion of the probe are carried out using an etching tub comprised of a first solution layer composed mainly of hydrofluoric acid and a second solution layer which has a lower specific gravity than the first solution layer and which does not react, and is not mixed, with the first solution layer.

53. A method for manufacturing a probe, comprising the steps of:

decreasing the outside diameter of a part of an optical waveguide to produce a part having a low spring constant; and

sharpening an end of the part of the optical waveguide having the decreased outside diameter by applying a pulling force to the optical waveguide while heating the optical waveguide and pulling it to breakage.

54. A method for manufacturing a probe, comprising the steps of:

decreasing the outer diameter of a part of a probe to produce a part having a low spring constant;

sharpening an end of the part of the probe having the decreased outer diameter to form a sharp tip portion;

forming a protective film on the sharp tip portion of the probe and on a portion, or the whole, of the part of the probe having the decreased outer diameter; and

forming a constricted portion by wet chemical etching on a portion of the part of the probe having the decreased outer diameter which is not provided with the protective film.

55. A method for manufacturing a probe, comprising the steps of:

decreasing the outside diameter of a part of a probe to produce a part having a low spring constant;

sharpening an end of the part of the probe having the decreased outer diameter to form a sharp tip portion; and

forming a constricted portion on the part of the probe having the decreased outer diameter by chemical etching using an etching tub comprised of a first solution layer that consists mainly of hydrofluoric acid, a second solution layer having a lower specific gravity than the first solution layer and which does not react, and is not mixed, with the first solution layer, and a third solution layer having a greater specific gravity than the first solution layer and which does not react, and is not mixed, with any one of the first and second solution layers.

56. A method for manufacturing a probe as set forth in claim 55;

wherein the first solution layer contains a surface active agent.