Method and apparatus for purging the back side of a substrate during chemical vapor processing

• US 5,960,555 A
• Filed: 05/16/1997
• Issued: 10/05/1999
• Est. Priority Date: 07/24/1996
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Tietz, James V., Haas, Brian, Deaton, Paul, Bierman, Benjamin, Ballance, David S., Williams, Meredith J.
• Primary Examiner(s): CAPOSSELA, RONALD C
• Application Number:
  US08/858,091
• Time in Patent Office: 872 Days
• Field of Search: 34/58, 118/724, 118/725
• US Class Current: 34/58
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45521 the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery

Abstract

An apparatus for purging the backside of a substrate in a process chamber includes a purge gas injector. The injector includes a substantially annular-shaped opening providing a slit that is structured and arranged to direct a flow of purge gas about radially outward therefrom in a direction approximately parallel to a plane defined by the substrate, wherein the substrate is supported in the process chamber above the purge gas injector. When the substrate is rotated at a sufficient speed, the purge gas flowing from the injector is impelled to flow spirally outward along the backside of the substrate.

Claims

1. A purge gas injector for a processing system that includes a process chamber, the purge gas injector comprising:

an injector body having a central axis and including an internal conduit and an exit orifice in fluid communication with the internal conduit, said exit orifice distributed around the circumference of the body and oriented to flow the purge gas supplied through the central conduit outward from the body in a range of substantially radial directions relative to the central axis.

2. The purge gas injector of claim 1, wherein said injector body further comprises;

a top plate; and

a support structure holding said top plate spaced above said bottom element so as to form said orifice.

3. The purge gas injector of claim 2, wherein said injector body is made of quartz.

4. The purge gas injector of claim 2, wherein said bottom element has a cylindrically-shaped upper part of a first diameter and a cylindrically-shaped lower part of a second diameter that is smaller than first diameter and wherein said top plate has a diameter equal to the first diameter.

5. The purge gas injector of claim 1 wherein the exit orifice is formed by a slit substantially circumscribing the injector body in a plane that is perpendicular to the central axis.

6. A processing system comprising:

a process chamber;

a support assembly within said process chamber which supports a substrate during processing; and

a purge gas injector positioned below a backside of said substrate when the substrate is supported by said support assembly, said purge gas injector including an injector body having a central axis and including an internal conduit and an exit orifice in fluid communication with internal conduit, said exit orifice distributed around the circumference of the body and oriented to flow a purge gas supplied through the central conduit outward from the body into the process chamber in a range of substantially radial directions relative to the central axis.

7. The processing system of claim 6, wherein said injector body further includes:

a bottom element in which the central conduit is formed

a top plate; and

a support structure holding said top plate spaced above said bottom element so as to form said orifice.

8. The processing system of claim 7, wherein the lower end of the channel has a first diameter, and the upper end of the channel has a second diameter being larger than the first diameter.

9. The processing system of claim 7, wherein said injector body is made of quartz.

10. The processing system of claim 6, wherein said support assembly includes a quartz cylinder and an edge ring for supporting the substrate, said cylinder supporting said edge ring, wherein the processing system further comprises a reflector plate positioned in the process chamber and below the substrate when the substrate is supported by said support assembly, wherein a thermal cavity is formed by said reflector plate, said quartz cylinder, said edge ring and the backside of the substrate, and wherein said reflector plate includes an opening through which said purge gas injector protrudes into said thermal cavity so that the exit orifice is above to surface of the reflector plate.

11. The processing system of claim 10, wherein the processing system further comprises a quartz shield positioned between said reflector plate and a processing plane in which the substrate is held during processing, said quartz shield shielding the reflector plate and including an aperture through which said purge gas injector extends into a space between said shield and said processing plane.

12. The processing system of claim 10, wherein said quartz cylinder and said reflector plate provide a gap therebetween for the outflow of said purge gas from said thermal cavity.

13. The processing system of claim 10, further comprising:

a heat source positioned above the substrate, when the substrate is supported by said support assembly, said heat source being suitable for thermal processing of the substrate.

14. The processing system of claim 6, wherein the injector is positioned off of a central axis of the substrate when the substrate is supported by said support assembly.

15. The processing system of claim 14, wherein the injector is positioned closer to the central axis than to a peripheral edge of the substrate, when the substrate is supported by said support assembly.

16. The processing system of claim 6, wherein said process chamber further includes a rotation mechanism to rotate said support assembly and the substrate about a central axis of the substrate while the purge gas is flowing from said purge gas injector, wherein said rotation mechanism rotates said support assembly at a rate sufficient to impel said flow of purge gas to flow spirally outward along the backside of the substrate.

17. The processing system of claim 16, wherein said rotation mechanism is capable of rotating said edge ring at a rate of at least about 30 RPM.

18. A method for processing a substrate, comprising:

supporting a substrate within a process chamber such that a backside of the substrate is substantially exposed; and

from a location that is adjacent the backside of the substrate, injecting a purge gas into the process chamber over a range of substantially radial outward directions relative to an axis that is substantially perpendicular to the backside of the substrate.

19. The method of claim 18, further comprising rotating the substrate while injecting the purge gas.

20. The method of claim 19, further comprising heating the substrate while rotating the substrate and injecting the purge gas.

21. The method of claim 19, further comprising flowing a process gas on a front side of the substrate while injecting the purge gas.

22. The method of claim 19 wherein the range of outward directions spans 360°

.

23. The method of claim 19 wherein the step of supporting involves supporting the substrate above a plate so that the substantially exposed backside of the substrate is parallel to and directed towards the plate.

24. The method of claim 19 wherein the step of injecting involves injecting the purge gas substantially into a plane proximate to a top surface of the plate.