Atmospheric-pressure plasma jet

• US 5,961,772 A
• Filed: 01/23/1997
• Issued: 10/05/1999
• Est. Priority Date: 01/23/1997
• Status: Expired due to Term

• Current Assignee: Los Alamos National Security LLC (Government of the United States of America)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Selwyn, Gary S.
• Primary Examiner(s): Powell, William
• Assistant Examiner(s): Goudreau, George A.
• Application Number:
  US08/787,621
• Time in Patent Office: 985 Days
• Field of Search: 156/345, 118/723 ER, 118/723 IR, 315/111.21
• US Class Current: 156/345.39
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32366 Localised processing
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/466 using capacitive coupling means, e.g. electrodes

Abstract

Atmospheric-pressure plasma jet. A γ-mode, resonant-cavity plasma discharge that can be operated at atmospheric pressure and near room temperature using 13.56 MHz rf power is described. Unlike plasma torches, the discharge produces a gas-phase effluent no hotter than 250° C. at an applied power of about 300 W, and shows distinct non-thermal characteristics. In the simplest design, two concentric cylindrical electrodes are employed to generate a plasma in the annular region therebetween. A "jet" of long-lived metastable and reactive species that are capable of rapidly cleaning or etching metals and other materials is generated which extends up to 8 in. beyond the open end of the electrodes. Films and coatings may also be removed by these species. Arcing is prevented in the apparatus by using gas mixtures containing He, which limits ionization, by using high flow velocities, and by properly shaping the rf-powered electrode. Because of the atmospheric pressure operation, no ions survive for a sufficiently long distance beyond the active plasma discharge to bombard a workpiece, unlike low-pressure plasma sources and conventional plasma processing methods.

Claims

1. An apparatus for generating an atmospheric pressure plasma discharge which comprises in combination:

a. an electrically conducting, grounded cylindrical chamber which is not tapered having a closed end, an open end, and a longitudinal axis;

b. a cylindrical electrode located within said cylindrical chamber having a longitudinal axis and disposed such that the longitudinal axis thereof is collinear with the longitudinal axis of said cylindrical chamber, defining thereby an annular region;

c. means for flowing gases through the annular region; and

d. means for supplying rf energy to said cylindrical electrode such that a continuous plasma discharge occurs between said cylindrical electrode and said grounded chamber with no visible arcs being formed, the gaseous products of the plasma discharge exiting through the open end of said cylindrical chamber.

2. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, further comprising a cylindrical insulating cap located at the end of said cylindrical electrode at the end thereof closest to the open end of said cylindrical chamber, and inside said cylindrical chamber, for preventing arcing between said cylindrical electrode and said cylindrical chamber.

3. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 2, wherein said insulating cap is an alumina cap.

4. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein said cylindrical electrode has longitudinal slots therein, each slot having a chosen width and a chosen depth.

5. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 4, wherein each slot has the same width and the same depth and wherein the ratio of the chosen width to the chosen depth of the slots is approximately one-third.

6. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein said cylindrical electrode includes a plurality of smooth contours, each contour having a peak and a valley, whereby the plasma discharge is maintained between said hollow, grounded cylindrical chamber and said cylindrical electrode in the region of the peak of a contour and extinguished in the valley thereof.

7. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein a cap having a plurality of holes therethrough is fitted on the open end of said hollow, grounded cylindrical chamber such that a uniform distribution of the gaseous products of the plasma discharge exiting through the open end of said cylindrical chamber is obtained.

8. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein the flowing gas includes a CF₄ /O₂ /He mixture.

9. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein the flowing gas includes a O₂ /He mixture.

10. The apparatus for generating an atmospheric pressure plasma discharge as described in claim 1, wherein the flowing gas includes a O₂ /H₂ O/He mixture.

11. An apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge which comprises in combination:

a. an electrically conducting chamber which is not tapered having a closed end and an open end;

b. a central electrode located within said chamber defining thereby an annular region;

c. means for flowing gases through the annular region; and

d. means for supplying rf energy to either of said central electrode or said electrically conducting chamber with no visible arcs being formed such that a continuous plasma discharge occurs between said electrode and said chamber, the gaseous products of the plasma discharge, including reactive species, exiting through the open end of said chamber.

12. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein said electrically conducting chamber has a longitudinal axis and said central electrode has a longitudinal axis, and whereby said central electrode is disposed such that the longitudinal axis thereof is collinear with the longitudinal axis of said chamber.

13. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, further comprising an insulating cap located at the end of said electrode at the end thereof closest to the open end of said chamber, and inside said chamber, for preventing arcing between said electrode and said chamber.

14. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 13, wherein said insulating cap is an alumina cap.

15. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 12, wherein said electrode has longitudinal slots therein, each slot having a chosen width and a chosen depth.

16. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 15, wherein each slot has the same width and the same depth and wherein the ratio of the chosen width to the chosen depth of the slots is approximately one-third.

17. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein said electrode includes a plurality of smooth contours, each contour having a peak and a valley, whereby the plasma discharge is maintained between said chamber and said electrode in the region of the peak of a contour and extinguished in the valley thereof.

18. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein a cap having a plurality of holes therethrough is fitted on the open end of said chamber such that a uniform distribution of the gaseous products of the plasma discharge exiting through the open end of said chamber is obtained.

19. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein the flowing gas includes a CF₄ /O₂ /He mixture.

20. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein the flowing gas includes a O₂ /He mixture.

21. The apparatus for generating a gaseous jet containing concentrations of reactive species from an atmospheric pressure plasma discharge as described in claim 11, wherein the flowing gas includes a O₂ /H₂ O/He mixture.