Plasma processing method and apparatus

• US 5,961,850 A
• Filed: 03/14/1996
• Issued: 10/05/1999
• Est. Priority Date: 03/20/1995
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kudo, katsuyoshi, Satou, Yoshiaki, Kanekiyo, Tadamitsu
• Primary Examiner(s): DANG, THI D
• Application Number:
  US08/615,949
• Time in Patent Office: 1,300 Days
• Field of Search: 156/345, 118/723 E, 118/723 R, 118/723 MW, 118/723 ME, 118/723 MR, 118/723 MA, 118/723 I, 118/724, 438/729, 438/730, 438/732, 438/727, 438/728, 438/710, 216/67, 216/68, 216/69, 216/70, 216/71, 427/569, 427/571, 427/575
• US Class Current: 216/67
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 37/32504 Means for preventing sputtering of the vessel
• CPC Class Codes: H01J 37/32522 Temperature

Abstract

A plasma processing apparatus and method controls the temperature of those portions in the processing chamber to which reaction products or gaseous reaction products generated during plasma processing adhere, thereby minimizing the generation of foreign matter and ensuring high yields. A plasma processing gas is supplied to the plasma generation chamber 10 whose pressure is maintained at a predetermined value. Provided in the plasma generation chamber are a specimen mount 11 on which to mount an object to be processed and an evacuation mechanism 16 that evacuates the plasma generation chamber. The inner sidewall portion of the plasma generation chamber is provided with a temperature controller 34, which heats the inner side wall portion of the processing chamber above the specimen to a temperature at which reaction products sublimate, and a further temperature controller 35 is provided to cool the lower part of the specimen mount, the inner bottom portion of the processing chamber and the chamber exhaust pipe to a temperature at which the reaction products solidify.

Claims

1. In a plasma processing method which uses a plasma processing apparatus that includes a plasma generation chamber to which a processing gas is supplied to process a specimen and whose pressure is maintained at a predetermined pressure, a specimen mount on which to mount a specimen to be processed in the plasma generation chamber, and an evacuation means to evacuate the plasma generation chamber;

the plasma processing method comprising the steps of;

individually controlling the temperature of those portions in the plasma generation chamber where plasma is generated to a first temperature and the temperature of other portions of the apparatus to a second temperature which is less than the first temperature to minimize variations with time in the characteristics of plasma-processing a specimen.

2. A plasma processing method according to claim 1, wherein the step of individually controlling the temperature of those portions in the plasma generation chamber where plasma is generated to a first temperature includes controlling to a temperature range of greater than 100°

C. to 400°

C. at which reaction products sublimate and individually controlling the temperature of other portions of the apparatus to a second temperature includes controlling to a temperature of less than 100°

C. to -200°

C. at which reaction products solidify.

3. A plasma processing method according to claim 1, wherein the step of individually controlling to the first temperature includes applying heat to a sidewall of the plasma generation chamber to raise the temperature thereof and individually controlling to the second temperature includes applying cooling to other portions of the apparatus including portions of the plasma generation chamber below a surface of the specimen mount, an inner bottom portion of the plasma generation chamber and a gas exhaust pipe of the plasma generation chamber to lower the temperature thereof without applying heat thereto.

4. In a plasma processing method which uses a plasma processing apparatus that includes a plasma generation chamber to which a processing gas is supplied to process a specimen and whose pressure is maintained at a predetermined pressure, a specimen mount on which to mount a specimen to be processed in the plasma generation chamber, and an evacuation means to evacuate the plasma generation chamber;

the plasma processing method comprising the step of;

increasing the temperature of the sidewall of those portions in the plasma generation chamber where plasma is generated to at least a first temperature and cooling the inner wall of other portions of the apparatus to at least a second temperature which is less than the first temperature to minimize variations with time in the characteristics of plasma-processing a specimen.

5. A plasma processing method according to claim 4, wherein the step of increasing the temperature of the sidewall of those portions in the plasma generation chamber where plasma is generated to a first temperature includes heating to a temperature range of greater than 100°

C. to 400°

C. at which reaction products sublimate and cooling the inner wall of other portions of the apparatus to a second temperature includes cooling to a temperature of less than 100°

C. to -200°

C. at which reaction products solidify.

6. A plasma processing method according to claim 4, wherein the step of increasing to the first temperature includes applying heat to a sidewall of the plasma generation chamber and the step of cooling to the second temperature includes applying cooling to other portions of the apparatus including portions of the plasma generation chamber below a surface of the specimen mount, an inner bottom portion of the plasma generation chamber and a gas exhaust pipe of the plasma generation chamber without applying heat thereto.

7. A plasma processing apparatus comprising:

a plasma generation chamber to which a processing gas is supplied to process a specimen and whose pressure is maintained at a predetermined pressure;

a specimen mount on which to mount an object to be processed in the plasma generation chamber;

an evacuation means to evacuate the plasma generation chamber; and

a temperature control means for independently controlling the temperature of those portions in the plasma generation chamber where plasma is generated to at least a first temperature and the temperature of other portions of the apparatus to at least a second temperature which is less than the first temperature.

8. A plasma processing apparatus according to claim 7, wherein the temperature control means controls the temperature of those portions where plasma is generated and the temperature of other portions of the apparatus by linking them to one of the temperatures.

9. A plasma processing apparatus according to claim 7, wherein the temperature control means increases the temperature of the sidewall of the plasma generation chamber where plasma is generated and cools an inner wall of the chamber other than the sidewall.

10. A plasma processing apparatus according to claim 7, wherein the temperature control means includes means for removing matter from the sidewall portion other than the sidewalk of those portions where plasma is generated.

11. A plasma processing apparatus according to claim 7, wherein the temperature control means for independently controlling the temperature of those portions in the plasma generation chamber where plasma is generated to a first temperature controls to a temperature range of greater than 100°

C. to 400°

C. at which reaction products sublimate and for independently controlling the temperature of other portions of the apparatus to a second temperature controls to a temperature of less than 100°

C. to -200°

C. at which reaction products solidify.

12. A plasma processing apparatus according to claim 7, wherein the temperature control means for independently controlling to the first temperature includes means for applying heat to a sidewall of the plasma generation chamber and the temperature control means for independently controlling to the second temperature includes means for applying cooling to other portions of the apparatus including portions of the plasma generation chamber below a surface of the specimen mount, an inner bottom portion of the plasma generation chamber and a gas exhaust pipe of the plasma generation chamber without applying heat thereto.

13. A plasma processing apparatus comprising:

a plasma generation chamber to which a processing gas is supplied to process a specimen and whose pressure is maintained at a predetermined pressure during processing;

a specimen mount having a surface on which to mount an object to be processed in the plasma generation chamber;

evacuation means to evacuate the plasma generation chamber, including a gas exhaust pipe;

a first temperature controller which controls the inner sidewall portion of the plasma generation chamber above said surface of the specimen mount to a first temperature at which reaction products sublimate; and

a second temperature controller which controls at least one of a part of the specimen mount below the surface on which to mount an object, an inner bottom portion of the plasma generation chamber below said surface of the specimen mount and said gas exhaust pipe to a second temperature at which reaction products solidify;

wherein the second temperature is less than the first temperature.

14. A plasma processing method according to claim 13, wherein the first temperature controller controls a temperature range of greater than 100°

C. to 400°

C. at which reaction products sublimate, and the second temperature controller controls to a temperature of less than 100°

C. to -200°

C. at which reaction products solidify.

15. A plasma processing method according to claim 13, wherein the first temperature controller includes means for applying heat to the inner sidewall portion of the plasma generation chamber and the second temperature controller includes means for applying cooling to other portions of the apparatus including portions of the plasma generation chamber below a surface of the specimen mount, an inner bottom portion of the plasma generation chamber and a gas exhaust pipe of the plasma generation chamber without applying heat thereto.