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Plasma deposited substrate structure

  • US 5,962,138 A
  • Filed: 11/24/1997
  • Issued: 10/05/1999
  • Est. Priority Date: 12/19/1995
  • Status: Expired due to Fees
First Claim
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1. A substrate structure, comprising:

  • a substrate having a surface thereon; and

    a plurality of radio frequency discharge plasma film layers said film layers being sequentially deposited on said substrate surface, said plasma film layers including a first layer and a second layer at least partially covalently bonded to said first layer;

    said second layer having a substantially ordered geometric structure, said structure including a plurality of substantially uniformly dispersed interstitial spaces;

    said first layer including a plurality of a first functional group;

    said second layer including a plurality of a second functional group.

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