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Silicone polymer composition, method of forming a pattern and method of forming an insulating film

  • US 5,962,581 A
  • Filed: 04/26/1996
  • Issued: 10/05/1999
  • Est. Priority Date: 04/28/1995
  • Status: Expired due to Fees
First Claim
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1. A silicon polymer composition comprising a polysilane having a repeating unit represented by the following general formula (4) and at least one kind of powders selected from SiO2 fine powder and SiN powder ##STR56## wherein R4 is a substituted or non-substituted aryl group, or a substituted or non-substituted alkyl group.

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