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Micromachined rate and acceleration sensor

  • US 5,962,784 A
  • Filed: 10/14/1997
  • Issued: 10/05/1999
  • Est. Priority Date: 05/27/1997
  • Status: Expired due to Term
First Claim
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1. A monolithic substrate for acceleration and angular rate sensing, the substrate comprising:

  • a support frame;

    a first accelerometer formed in the substrate, the first accelerometer having a proof mass including first and second opposite edges, and third and fourth opposite edges, a flexure connecting the first edge of the proof mass to the support frame, the flexure defining a hinge axis for the proof mass, a first force-sensing member coupled between the proof mass and the support frame at a location intermediate the hinge axis and the second edge with respect to a direction extending from the first edge to the second edge and intermediate the third and fourth edges with respect to a direction extending from the third edge to the fourth edge; and

    a second accelerometer formed in the substrate, the second accelerometer having a second proof mass including fifth and sixth opposite edges, and seventh and eighth opposite edges, a flexure connecting the fifth edge to the support frame, the flexure of the second accelerometer defining a hinge axis for the second proof mass, a second force-sensing member coupled between the second proof mass and the support frame at a location intermediate the hinge axis of the second accelerometer and the sixth edge with respect to a direction extending from the fifth edge to the sixth edge and intermediate the seventh and eighth edges with respect to a direction extending from the seventh edge to the eighth edge.

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