Acceleration sensor

• US 5,962,787 A
• Filed: 10/18/1996
• Issued: 10/05/1999
• Est. Priority Date: 10/24/1995
• Status: Expired due to Fees

• Current Assignee: Wacoh Company
• Original Assignee: Wacoh Company
• Inventors: Nakatugawa, Jundo, Okada, Kazuhiro
• Primary Examiner(s): CHILCOT, RICHARD E
• Application Number:
  US08/733,471
• Time in Patent Office: 1,082 Days
• Field of Search: 73/862.68, 73/514.24, 73/12.01, 73/862.626, 73/862.043, 73/514.18, 73/514.32, 367/181, 340/690, 340/689, 340/669, 361/283.4
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

A fixed substrate and a displacement substrate are disposed in parallel. The fixed substrate is secured to the inside of a cylindrical casing, and the displacement substrate is elastically supported at the periphery thereof by supporting means. A columnar weight body is secured to the lower surface of the displacement substrate, and a cylindrical inside electrode is formed on the periphery of the weight body. A cylindrical outside electrode is fixed by fixing means at the periphery of the inside electrode. A first capacitance element is constituted by a displacement electrode formed on the upper surface of the displacement substrate and a fixed electrode formed on the lower surface of the fixed substrate. By a change in the capacitance thereof, an acceleration based on longitudinal vibration is detected. In addition, a second capacitance element is constituted by the inside electrode and the outside electrode. By a change in the capacitance thereof, an acceleration based on transverse vibration is detected.

Claims

1. An acceleration sensor comprising:

a sensor casing;

a displacement substrate accommodated within the sensor casing;

supporting means for elastically supporting a periphery of the displacement substrate with respect to the sensor casing;

a weight body secured to a lower surface of the displacement substrate, having a mass sufficient to allow the supporting means to induce elastic deformation by action of an acceleration to be detected;

an inside electrode formed on a peripheral side surface of the weight body in such a manner to surround a center axis passing through a center of gravity of the weight body and perpendicular to a reference principal surface of the displacement substrate;

an outside electrode having a cylindrical shape which permits the inside electrode to be accommodated therewithin, the outside electrode being fixed to the sensor casing positioned in a manner to surround the inside electrode while maintaining a predetermined spacing between the outside electrode and the inside electrode; and

a detection circuit for outputting an electric signal indicating a magnitude of an acceleration applied in a direction in parallel to the reference principal surface on the basis of a change of an electrostatic capacitance of a capacitance element constituted by the inside electrode and the out side electrode;

wherein with respect to a width in the center axis direction of the inside electrode and a width in the center axis direction of the outside electrode, the width of one of said electrodes is greater than the width of the other electrode by an amount at least equal to a range of maximum displacement along the center axis of the weight body, and wherein said inside and outside electrodes are positioned so that effective facing areas of the inside electrode and the outside electrode are constant even if the weight body is caused to undergo displacement along the center axis.

2. An acceleration sensor as set forth in claim 1 which further comprises:

a displacement electrode formed on an upper surface of the displacement substrate; and

a fixed electrode fixed to the sensor casing in such a manner to oppose the displacement electrode above the displacement substrate;

wherein the detection circuit further outputs an electric signal indicating a magnitude of an acceleration applied in a direction perpendicular to the reference principal surface on the basis of a change of an electrostatic capacitance of a capacitance element constituted by the displacement electrode and the fixed electrode.

3. An acceleration sensor as set forth in claim 2:

wherein the displacement substrate is constituted by conductive material, and a portion of the displacement substrate is used as the displacement electrode.

4. An acceleration sensor as set forth in claim 1:

wherein a columnar weight body is used to constitute the inside electrode by a first cylindrical electrode formed on a side surface of the columnar weight body, and the outside electrode is constituted by a second cylindrical electrode whose diameter is larger than that of the first cylindrical electrode.

5. An acceleration sensor as set forth in claim 1, wherein a first spacing between the inside electrode and the outside electrode in a first direction perpendicular to the center axis is less than a second spacing between the inside electrode and the outside electrode in a second direction perpendicular to both the center axis and said first direction so that a first detection sensitivity in the first direction becomes greater than a second detection sensitivity in the second direction.

6. An acceleration sensor as set forth in claim 5:

wherein one of the inside electrode and the outside electrode is constituted by a cylindrical electrode which is circular in cross section, and the other is constituted by an elliptic cylindrical electrode which is elliptic in cross section.

7. An acceleration sensor as set forth in claim 1:

wherein the weight body is constituted by conductive material, and a portion of the weight body is used as the inside electrode.

8. An acceleration sensor as set forth in claim 1:

wherein the sensor casing is constituted by conductive material, and a portion of the sensor casing is used as the outside eltectrode.

9. An acceleration sensor as set forth in claim 1:

wherein plural slits are formed on a flexible substrate to thereby constitute a diaphragm serving as both the displacement substrate and the supporting means.