Pirani+capacitive sensor
First Claim
1. A pressure sensor having a support plate (5) which is preceded at a distance by a membrane (6) connected gas-tight to it, the support plate (5) and the membrane (6) being provided with electrically conducting layers so that they form a capacitive sensor, wherein, in addition to the membrane (6), said pressure sensor has a heat conduction measuring arrangement with at least one heating element which is supported on the support plate (5).
2 Assignments
0 Petitions
Accused Products
Abstract
In order to cover a large measuring range extending from about 10-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) which, together with the support plate (5), forms a capacitive measuring element for the determination of pressures between about 0.1 mbar and 10 bar, and two measuring wires (11, 12) which are arranged adjacent to the membrane (6) and constitute a Pirani measuring element with substantial compensation of the effect of the wall temperature, for the determination of pressures between about 10-6 mbar and 1 mbar. The membrane (6) is shielded from the radiation of the measuring wires (11, 12) by a protective ring (16).
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Citations
11 Claims
- 1. A pressure sensor having a support plate (5) which is preceded at a distance by a membrane (6) connected gas-tight to it, the support plate (5) and the membrane (6) being provided with electrically conducting layers so that they form a capacitive sensor, wherein, in addition to the membrane (6), said pressure sensor has a heat conduction measuring arrangement with at least one heating element which is supported on the support plate (5).
Specification