Method and apparatus for verifying the presence or absence of a component

• US 5,962,862 A
• Filed: 08/12/1997
• Issued: 10/05/1999
• Est. Priority Date: 08/12/1997
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Gibbons, Kevin, Schrock, Edward A., Evers, Sven
• Primary Examiner(s): Westin, Edward P.
• Assistant Examiner(s): Luu, Thanh X.
• Application Number:
  US08/909,570
• Time in Patent Office: 784 Days
• Field of Search: 250/559.4, 356/237, 356/237.1, 356/237.4, 356/237.6
• US Class Current: 250/559.4
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection

Abstract

Apparatuses and methods are disclosed for verifying the presence or absence of a die in a location, dice in a cut wafer or other components in a pattern. The apparatuses includes a wafer support, a radiation source, a radiation detector and a controller. The radiation source is positioned to direct radiation toward the wafer support and a radiation detector is positioned to detect radiation from the direction of said wafer support. Preferably, a visible light source, such as an arc lamp, is used to illuminate a wafer from the substrate side of the wafer and a charge coupled device (CCD) camera is positioned to detect light from the light source passing through locations in the wafer where the dice have been removed. The charge coupled device camera is connected to the controller, which is preferably a computer connected to a display monitor. The computer calculates the location of the removed dice based on the intensity of the detected light and produces a wafer verification map based on the calculated locations. The wafer verification map is compared to a planned or selected die pick pattern map of dice that were to be picked to identify any mispicked dice. In alternative embodiments, the apparatus can be included semi-integrally or integrally with a die attach machine to provide in-line verification of the die pick process. In a fully integral embodiment of the method, the picked die can be verified as correct prior to being placed onto a substrate.

Claims

1. A method of verifying the absence of dice in a cut wafer comprising:

producing a wafer map to identify planned die pick locations in the wafer;

directing radiation toward the wafer;

detecting radiation from the direction of the wafer;

calculating the locations from which the dice have been removed based on the radiation detected by the detector; and

,

comparing the calculated location of the dice in the wafer with planned die pick locations to identify differences between the calculated locations and the planned die pick locations.

2. The method of claim 1, further comprising displaying the comparison of the planned and calculated locations.

3. The method of claim 2, wherein said displaying further comprises displaying the comparison as a wafer map and identifying the differences between the planned and calculated dice locations.

4. The method of claim 3, wherein said calculating, comparing and displaying are performed using a computer connected to a display monitor.

5. The method of claim 4, wherein:

said directing further comprises directing visible light toward the wafer; and

,

said detecting further comprises detecting light passing through locations in the wafer from which the dice have been removed.

6. The method of claim 1, wherein said detecting further comprises detecting radiation passing through locations in the wafer from which the dice have been removed.

7. The method of claim 1, wherein said detecting further comprises detecting radiation reflected from the wafer.

8. The method of claim 1, further comprising aligning the wafer to provide a common reference for comparing the calculated locations of the dice to the planned die pick locations.

9. The method of claim 1, further comprising:

producing a receiver signal from the detected radiation; and

,

displaying the receiver signal as a wafer verification map.

10. The method of claim 9, further comprising:

determining a standard signal to indicate whether a die is absent from the location; and

,

comparing the receiver signal to the standard signal.

11. At apparatus for verifying the absence of a die in a cut wafer comprising:

a wafer support;

a visible light source positioned to direct visible light through said wafer support;

a charge coupled device camera positioned to detect light from said light source passing through said wafer support and to generate receiver signals in response to the detected light; and

,

a controller attached to said camera to convert and display said receiver signals as a wafer verification map, wherein said controller accesses and compares a planned die pick pattern map with said wafer verification map, stores said comparison, and displays said comparison, said planned die pick pattern map and said wafer verification map.

12. The apparatus in claim 11, wherein said controller comprises a computer and a display screen.

13. The apparatus in claim 11, wherein:

said wafer support is ring shaped; and

,

said light source is positioned to direct light through said ring shape of said support.

14. An apparatus for picking dice from a cut wafer, comprising:

a wafer support;

a radiation source positioned to direct radiation toward said wafer support;

a radiation detector directed toward said wafer support to detect radiation from said radiation source;

a pick head positioned to access said wafer support and perform pick operations; and

,

a controller connected to and controlling said radiation detector, said radiation source and said pick head, said controller including a computer to access and compare a planned die pick pattern map with a wafer verification map generated by said computer from said detected radiation and control the movement of said pick head in accordance with said planned die pick pattern and said comparison.

15. A method of placing dice from a wafer onto substrates, comprising:

producing a wafer map to identify locations of the dice in the wafer;

testing the dice to determine whether the dice perform according to predetermined specifications;

selecting a die to be placed on a substrate;

identifying the location of the selected die on the wafer map;

picking the selected die from the wafer;

directing radiation toward the wafer;

detecting radiation from the direction of the wafer;

calculating the location of the picked die based on the radiation detected to determine whether the picked die is the selected die; and

,

placing the picked die on the substrate, when the picked die is the selected die.

16. The method of claim 15, further comprising discarding the die, when the die did not perform to the predetermined specifications.

17. The method of claim 15, further comprising:

assigning the calculated location of the die to the substrate; and

,

placing the die on the substrate, when the die performed to the predetermined specifications.

18. A method of verifying whether a selected die was picked from a wafer, comprising:

producing a wafer map to identify locations of the dice in the wafer;

picking a selected die from an identified location on the wafer;

directing radiation toward the wafer;

detecting radiation from the direction of the wafer;

calculating the location of the picked die based on the radiation detected; and

,

comparing the location of the picked die to the selected die to verify whether the picked die is the selected die.

19. An apparatus for picking dice from a cut wafer, comprising:

a die attach machine having a wafer support, a pick head positioned to access said wafer support and perform pick operations, and a controller connected to and controlling pick operations performed by said pick head;

a radiation source positioned to direct radiation toward said wafer support; and

,

a radiation detector attached to said controller and directed toward said wafer support to detect radiation from said radiation source, wherein said controller comprises a computer to access and compare a planned die pick pattern map with a wafer verification map generated by said computer from said detected radiation and control the movement of said pick head in accordance with said planned die pick pattern and said comparison.

20. An apparatus for picking dice from a cut wafer, comprising:

a die attach machine having an off-load station including a heater; and

,

a radiation detector directed toward said heater to detect radiation from said heater, wherein said radiation detector connected to a controller to access and compare a planned die pick pattern map with a wafer verification map to verify the dice picked from the wafer.

21. The apparatus of claim 20, wherein said radiation detector comprises an infrared radiation detector.