Bipolar transistor having a particular contact structure

• US 5,962,913 A
• Filed: 04/24/1996
• Issued: 10/05/1999
• Est. Priority Date: 01/19/1996
• Status: Expired due to Term

• Current Assignee: Renesas Electronics Corporation
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Honda, Hiroki
• Primary Examiner(s): FAHMY, WAEL M
• Application Number:
  US08/639,066
• Time in Patent Office: 1,259 Days
• Field of Search: 257/587, 257/592, 257/588, 257/580, 257/378, 257/370
• US Class Current: 257/587
• CPC Class Codes: H01L 21/8249 Bipolar and MOS technology
• CPC Class Codes: H01L 27/0623 in combination with bipolar transistors
• CPC Class Codes: H01L 29/41708 Emitter or collector electrodes for bipolar transistors
• CPC Class Codes: H01L 29/42304 Base electrodes for bipolar transistors
• CPC Class Codes: H01L 29/7322 having emitter-base and base-collector junctions leaving at the same surface of the body, e.g. planar transistor

Abstract

A base region and an emitter region are formed at a surface of an n-well region (collector region). A contact hole reaching a portion of the surface of the collector region is formed, a contact hole reaching a portion of the surface of the emitter region is formed, and a contact hole reaching a portion of the surface of the base region is formed. A collector electrode, an emitter electrode and a base electrode are formed in the contact holes, respectively. Assuming that L represents a longitudinal length of the contact hole accommodating the emitter electrode and S represents a width thereof perpendicular to the longitudinal direction, a value of L/S is 10 or more. Thereby, a collector resistance of a bipolar transistor can be reduced, and a manufacturing cost can be reduced.

Claims

1. A bipolar transistor comprising:

a semiconductor substrate of a first conductivity type having a main surface;

a collector region of a second conductivity type formed at the main surface of said semiconductor substrate;

a base region of the first conductivity type formed at a surface of said collector region;

an emitter region of the second conductivity type formed at a surface of said base region;

an insulating layer formed on the main surface of said semiconductor substrate, and having first, second and third openings reaching portions of the surface of said collector region, a surface of the emitter region and the surface of said base region, respectively; and

a collector electrode formed in said first opening and a base electrode and a emitter electrode electrically connected to said base region through said third opening, said emitter region through said second opening, respectively wherein

a concentration of impurity of the second conductivity type contained in said collector region located immediately under said base region is 5×

10¹⁸ cm^-3 or less, and

L representing a length in a longitudinal direction of the portion of the surface of said emitter region in said second opening and S representing a width of the portion of the surface of the emitter region in said second opening in a direction perpendicular to said longitudinal direction satisfy a relationship that a value of L/S is about 9.3 or more, wherein the collector region does not comprise a high concentration buried diffusion layer of the second conductivity type.

2. The bipolar transistor according to claim 1, wherein said first, second and third openings are disposed such that said emitter electrode is located between said collector electrode and said base electrode.

3. The bipolar transistor according to claim 1, comprising a single collector electrode, a single emitter electrode and a single base electrode.

4. The bipolar transistor according to claim 1, wherein said second opening is formed of a plurality of distinct openings, each of said distinct openings reaches a portion of the same integral emitter region and is arranged along said longitudinal direction, a sum of lengths of said distinct openings in said longitudinal direction corresponds to said length L, and said emitter region is connected commonly to said emitter electrode through each of said distinct openings.

5. The bipolar transistor according to claim 1, wherein a contact portion between said collector electrode and said collector region is provided with an impurity contact region having a diffusion depth extending from the main surface substantially equal to that of said emitter region and containing impurity of the second conductivity type at a concentration substantially equal to that of impurity of the second conductivity type contained in said emitter region.

6. The bipolar transistor according to claim 1, wherein a pad conductive layer electrically connecting said emitter electrode and said emitter region together is formed in said second opening, and said emitter electrode is formed in a fourth opening reaching a portion of a surface of the pad conductive layer.

7. The semiconductor device according to claim 1, wherein the value of L/S is 10 or more.

8. A bipolar transistor comprising:

a semiconductor substrate of a first conductivity type having a main surface;

a collector region of a second conductivity type formed at the main surface of said semiconductor substrate;

a base region of the first conductivity formed at a surface of said collector region;

first and second emitter regions of the second conductivity type formed at a surface of said base region with a space from each other;

an insulating layer formed on the main surface of said semiconductor substrate, and having a first opening reaching a portion of the surface of said base region, second and third openings spaced from each other with said first opening therebetween and reaching portions of surfaces of said first and second emitter regions, respectively, and fourth and fifth openings spaced from each other with said second and third openings therebetween and reaching portions of the surface of said collector region;

a base electrode electrically connected to said base region through said first opening;

first and second emitter electrodes electrically connected to said first emitter region through said second opening, said second emitter region through said third opening, respectively; and

first and second collector electrodes formed in said fourth and fifth openings, respectively;

wherein

a concentration of impurity of the second conductivity type contained in said collector region located immediately under said base region is 5×

10¹⁸ cm^-3 or less, and

L1 and S1 representing a length in a longitudinal direction of the portion of the surface of said first emitter region in said second opening and a width of the portion of the surface of said first emitter region in said second opening in a direction perpendicular to said longitudinal direction, respectively, and L2 and S2 representing a length in a longitudinal direction of the portion of the surface of said second emitter region in said third opening and a width of the portion of the surface of said second emitter region in said third opening in a direction perpendicular to said longitudinal direction, respectively, satisfy a relationship that (L1/S1)+(L2/S2) is 9.3 or more.

9. The bipolar transistor according to claim 8, wherein

said second opening is divided into a plurality of sixth openings,

each of said sixth openings is arranged along said longitudinal direction,

a sum of lengths of said sixth openings in said longitudinal direction corresponds to said length L1, and said first emitter region is connected to said first emitter electrode through each of said sixth openings,

said third opening is divided into a plurality of seventh openings,

each of said seventh openings is arranged along said longitudinal direction, and

a sum of lengths of said seventh openings in said longitudinal direction corresponds to said length L2, and said second emitter region is connected to said second emitter electrode through each of said seventh openings.

10. The bipolar transistor according to claim 8, wherein the value of (L1/S1)+(L2/S2) is about 10 or more.

11. The bipolar transistor according to claim 8, wherein first and second pad conductive layers electrically connecting said first emitter electrode and said first emitter region together, said second emitter electrode and said second emitter region together, respectively, are formed in said second opening, third opening, respectively, and said first and second emitter electrodes are formed in a sixth opening reaching a portion of a surface of said first pad conductive layer, seventh opening reaching a portion of a surface of said second pad conductive layer, respectively.

18. The semiconductor device having the bipolar transistor according to claim 11, wherein a contact portion between said collector electrode and said collector region is provided with an impurity contact region having a diffusion depth extending from the main surface substantially equal to that of said emitter region and containing impurity of the second conductivity type at a concentration substantially equal to that of impurity of the second conductivity type contained in said emitter region, and

a contact portion between said base electrode and said base region is provided with an external base region having a diffusion depth substantially equal to that of said source/drain regions and containing impurity of the first conductivity type at a concentration substantially equal to that of impurity of the first conductivity type contained in said source/drain regions.

12. A bipolar transistor comprising:

a semiconductor substrate of a first conductivity type having a main surface;

a collector region of a second conductivity type formed at the main surface of said semiconductor substrate;

first and second base regions of the first conductivity type formed at a surface of said collector region;

first and second emitter regions of the second conductivity type formed at surfaces of said first and second base regions, respectively;

an insulating layer formed on the main surface of said semiconductor substrate, and having a first opening reaching a portion of the surface of said collector region, second and third openings spaced from each other with said first opening therebetween and reaching portions of surfaces of said first and second emitter regions, respectively, and fourth and fifth openings spaced from each other with said second and third openings therebetween and reaching portions of the surfaces of said first and second base regions, respectively;

a collector electrode formed in said first opening;

first and second emitter electrodes electrically connected to said first emitter region through said second opening, said second emitter region through said third opening, respectively; and

first and second base electrodes electrically connected to said first base region through said fourth opening, said second base region through said fifth opening, respectively;

wherein

a concentration of impurity of the second conductivity type contained in said collector region located immediately under said base region is 5×

10¹⁸ cm^-3 or less, and

L1 and S1 representing a length in a longitudinal direction of the portion of the surface of said first emitter region in said second opening and a width of the portion of the surface of said first emitter region in said second opening in a direction perpendicular to said longitudinal direction, respectively, and L2 and S2 representing a length in a longitudinal direction of the portion of the surface of said second emitter region in said third opening and a width of the portion of the surface of said second emitter region in said third opening in a direction perpendicular to said longitudinal direction, respectively, satisfy a relationship that (L1/S1)+(L2/S2) is 9.3 or more.

13. The bipolar transistor according to claim 12, wherein

said second opening is divided into a plurality of sixth openings,

each of said sixth openings is arranged along said longitudinal direction,

a sum of lengths of said sixth openings in said longitudinal direction corresponds to said length L1, and said first emitter region is connected to said first emitter electrode through each of said sixth openings,

said third opening is divided into a plurality of seventh openings,

each of said seventh openings is arranged along said longitudinal direction, and

a sum of lengths of said seventh openings in said longitudinal direction corresponds to said length L2, and said second emitter region is connected to said second emitter electrode through each of said seventh openings.

14. The bipolar transistor according to claim 12, wherein the value of (L1/S1)+(L2/S2) is about 10 or more.

15. The bipolar transistor according to claim 12, wherein first and second pad conductive layers electrically connecting said first emitter electrode and said first emitter region together, said second emitter electrode and said second emitter region together, respectively, are formed in said second opening, third opening, respectively, and said first and second emitter electrodes are formed in a sixth opening reaching a portion of a surface of said first pad conductive layer, seventh opening reaching a portion of a surface of said second pad conductive layer, respectively.

16. A semiconductor device having a bipolar transistor, and comprising:

a semiconductor substrate of a first conductivity type having a main surface;

a well region of a second conductivity type formed at the main surface of said semiconductor substrate;

an MOS transistor formed on the surface of said well region, and having source/drain regions of the first conductivity type;

a collector region spaced from said well region and formed at the main surface of said semiconductor substrate;

a base region of the first conductivity type formed at a surface of said collector region;

an emitter region of the second conductivity type formed at a surface of said base region;

an insulating layer formed on the main surface of said semiconductor substrate, and having first, second and third openings reaching portions of the surface of said collector region, a surface of the emitter region and the surface of the base region, respectively; and

a collector electrode formed in said first opening and a base electrode and a emitter electrode electrically connected to said base region through said third opening, said emitter region through said second opening, respectively, wherein

a concentration of impurity of the second conductivity type contained in said collector region located immediately under said base region is substantially equal to a concentration of impurity of the second conductivity type contained in said well region, and

L representing a length in a longitudinal direction of the portion of the surface of said emitter region in said second opening and S representing a width of the portion of the surface of said emitter region in said second opening in a direction perpendicular to said longitudinal direction satisfy a relationship that a value of L/S is about 9.3 or more, wherein the collector region does not comprise a high concentration buried diffusion layer of the second conductivity type.

17. The semiconductor device having the bipolar transistor according to claim 16, wherein said first, second and third openings are disposed such that said emitter electrode is located between said collector electrode and said base electrode.

19. The semiconductor device according to claim 16, wherein the value of L/S is 10 or more.

20. The semiconductor device according to claim 17, wherein a pad conductive layer electrically connecting said emitter electrode and said emitter region together is formed in said second opening, and said emitter electrode is formed in a fourth opening reaching a portion of a surface of said pad conductive layer.