×

Hybrid inorganic-organic composite for use as an interlayer dielectric

  • US 5,965,202 A
  • Filed: 08/14/1997
  • Issued: 10/12/1999
  • Est. Priority Date: 05/02/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for forming a three-phase composite precursor formulation suitable for forming an interlayer dielectric, comprising the step of:

  • forming a mixture of (i) an organic-component precursor present in an amount in the range of about 40 to 90 weight percent of the mixture;

    (ii) an inorganic-component precursor or a reaction product thereof having an organic functionality, wherein the organic functionality is selected for its ability to form a link to the organic-component precursor or a reaction product thereof, and further wherein the inorganic-component precursor or its reaction product is present in an amount in the range of between about 1 to 50 weight percent based on the combined amount of the inorganic-component precursor and the organic-component precursor in the mixture; and

    (iii) a microporosity-generating agent.

View all claims
  • 9 Assignments
Timeline View
Assignment View
    ×
    ×