Hybrid inorganic-organic composite for use as an interlayer dielectric
First Claim
1. A method for forming a three-phase composite precursor formulation suitable for forming an interlayer dielectric, comprising the step of:
- forming a mixture of (i) an organic-component precursor present in an amount in the range of about 40 to 90 weight percent of the mixture;
(ii) an inorganic-component precursor or a reaction product thereof having an organic functionality, wherein the organic functionality is selected for its ability to form a link to the organic-component precursor or a reaction product thereof, and further wherein the inorganic-component precursor or its reaction product is present in an amount in the range of between about 1 to 50 weight percent based on the combined amount of the inorganic-component precursor and the organic-component precursor in the mixture; and
(iii) a microporosity-generating agent.
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Abstract
Three-phase composite materials system having a low dielectric constant and physico-chemical properties suitable for IC fabrication conditions, and a method for making such materials, are disclosed. The three-phase composite material includes an organic phase, an inorganic phase and a void phase. The organic phase is in the form of an organic polymer matrix, the void phase is represented by microporosity present in the matrix, and the inorganic phase is implemented as inorganic particles that are coupled, via a coupling agent, to the organic matrix. The low dielectric constant of the composite is attributable to the microporous organic polymer matrix. The inorganic particles are responsible, at least in part, for providing thermal stability and other required physico-chemical properties to the composite.
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Citations
16 Claims
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1. A method for forming a three-phase composite precursor formulation suitable for forming an interlayer dielectric, comprising the step of:
forming a mixture of (i) an organic-component precursor present in an amount in the range of about 40 to 90 weight percent of the mixture;
(ii) an inorganic-component precursor or a reaction product thereof having an organic functionality, wherein the organic functionality is selected for its ability to form a link to the organic-component precursor or a reaction product thereof, and further wherein the inorganic-component precursor or its reaction product is present in an amount in the range of between about 1 to 50 weight percent based on the combined amount of the inorganic-component precursor and the organic-component precursor in the mixture; and
(iii) a microporosity-generating agent.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
Specification