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Pressure sensor

  • US 5,965,821 A
  • Filed: 07/03/1997
  • Issued: 10/12/1999
  • Est. Priority Date: 07/03/1997
  • Status: Expired due to Term
First Claim
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1. A pressure sensor for sensing the pressure of a fluid, the pressure sensor comprising:

  • a housing for receiving the fluid whose pressure is being sensed;

    an electrode assembly mounted in the housing, the electrode assembly including a conductor;

    a conductive diaphragm spaced from the conductor in the electrode assembly to define a capacitor having a gap between the conductor and the diaphragm, the diaphragm being mounted in the housing to be movable relative to the electrode assembly such that the size of the gap changes in response to changes in the pressure of the received fluid; and

    a spacer having a thickness and being disposed between, and in contact with, the electrode assembly and the diaphragm such that the thickness of the spacer determines the size of the gap;

    wherein the electrode assembly has at least one conductor near the diaphragm and an outer housing, the electrode assembly being formed as an integral single unit such that the outer housing and the conductor each have respective lower surfaces that are coplanar to each other, the spacer being between the diaphragm and the outer housing so that the gap between the electrode and the diaphragm is defined by the thickness of the spacer.

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