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Micro-mechanical modulator having an improved membrane configuration

  • US 5,966,235 A
  • Filed: 09/30/1997
  • Issued: 10/12/1999
  • Est. Priority Date: 09/30/1997
  • Status: Expired due to Term
First Claim
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1. A membrane structure for use in an optical modulator, comprising:

  • a flexible membrane having peripheral regions and a centrally located central region;

    a first area of conductive material disposed on said flexible membrane in said central region;

    one or more second areas of conductive material disposed on said flexible membrane in said peripheral regions, wherein said one or more second areas of conductive material share a common electrical potential and are electrically isolated from said first area of conductive material.

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