Micro-mechanical modulator having an improved membrane configuration

• US 5,966,235 A
• Filed: 09/30/1997
• Issued: 10/12/1999
• Est. Priority Date: 09/30/1997
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Walker, James Albert
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): BURKE, MARGARET A
• Application Number:
  US08/940,249
• Time in Patent Office: 742 Days
• Field of Search: 359/290, 359/291, 359/295, 359/298, 359/318
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

An optical modulator that contains a flexible dielectric membrane suspended over a substrate. The flexible membrane is made of a dielectric material such as silicon nitride. In one embodiment of the invention, the flexible membrane has an optically active region. A contact region is maintained in the vicinity of the optically active region which is electrically isolated therefrom. The contact region which includes a conductive material draws accumulated charge build-up from the optically active region. In another embodiment a first area of conductive material is formed on at least one surface of the flexible membrane proximate its center. At least one second area of conductive material is formed on at least one surface of the flexible membrane surrounding the first area. The first area of conductive material is kept electrically isolated from the surrounding second area. The first area of conductive material is coupled to an electrical ground. When an electrical potential is applied between the flexible membrane and the below-lying substrate, only the second areas of conductive material are affected. As a result, only the second areas of conductive material act to deform the membrane. The first area of conductive material in the center of the membrane remains unaffected and ensures that the membrane deforms in a uniform manner.

Claims

1. A membrane structure for use in an optical modulator, comprising:

a flexible membrane having peripheral regions and a centrally located central region;

a first area of conductive material disposed on said flexible membrane in said central region;

one or more second areas of conductive material disposed on said flexible membrane in said peripheral regions, wherein said one or more second areas of conductive material share a common electrical potential and are electrically isolated from said first area of conductive material.

2. The membrane structure according to claim 1, wherein said flexible membrane is a dielectric.

3. The membrane structure according to claim 1, wherein said first area of conductive material and said at least one second area of conductive material are transparent.

4. The membrane structure according to claim 1, wherein said first area of conductive material and said at least one second area of conductive material are deposited in a generally equivalent thickness on said flexible membrane.

5. The membrane structure according to claim 1 wherein said first area of conductive material and said at least one second area of conductive material are the same conductive material.

6. The membrane structure according to claim 5, wherein said same conductive material includes polysilicon.

7. The membrane structure according to claim 5, wherein said same conductive material includes indium tin oxide.

8. The membrane structure according to claim 1, wherein said flexible membrane includes silicon nitride.

9. The membrane structure according to claim 1, wherein said flexible membrane has a top surface and a bottom surface and said first area of conductive material is disposed on both said top surface and said bottom surface, wherein said first area of conductive material on both surfaces is electrically interconnected.

10. The membrane structure according to claim 1, wherein said flexible membrane has a top surface and a bottom surface and said at least one second area of conductive material is disposed on both said top surface and said bottom surface, wherein said at least one second area of conductive material on both surfaces is electrically interconnected.

11. A modulator for modulating an optical signal, comprising:

a substrate;

a flexible membrane having a top surface, a bottom surface, a central region and peripheral regions surrounding said central region, wherein said flexible membrane is suspended over said substrate;

a first area of conductive material disposed on at least one surface of said flexible membrane in said central region; and

one or more second areas of conductive material disposed on at least one surface of said flexible membrane in said peripheral regions, wherein said one or more second areas of conductive material share a common electrical potential and are electrically isolated from said first area of conductive material.

12. The modulator according to claim 11, further including a source of electrical potential for applying a predetermined electrical potential between said substrate and said at least one second area of conductive material.

13. The modulator according to claim 12, further including an electrical ground coupled to said first area of conductive material.

14. The modulator according to claim 11, wherein said flexible membrane is a dielectric.

15. The modulator according to claim 11, wherein said first area of conductive material and said at least one second area of conductive material are transparent.

16. The modulator according to claim 11, wherein said first area of conductive material and said at least one second area of conductive material contain the same conductive material.

17. The modulator structure according to claim 16, wherein said same conductive material includes polysilicon.

18. The modulator structure according to claim 16, wherein said same conductive material includes indium tin oxide.

19. The modulator according to claim 11, wherein said flexible membrane includes silicon nitride.

20. The modulator according to claim 11, wherein said first area of conductive material is disposed on said top surface and said bottom surface of said flexible membrane, said conductive material on said top surface and said bottom surface being electrically coupled.

21. The modulator according to claim 11, wherein said at least one second area of conductive material is disposed on said top surface and said bottom surface of said flexible membrane, said conductive material on said top surface and said bottom surface being electrically coupled.

22. The modulator according to claim 11, wherein said modulator is designed to operate at a predetermined frequency of light and wherein said first area of conductive material and said at least one second area of conductive material are deposited in a thickness that is an even multiple of 1/4 the wavelength of said predetermined frequency.

23. A method of manufacturing an optical modulator:

providing a substrate;

providing a flexible membrane having a top surface, a bottom surface, a central region and peripheral regions surrounding said central region; and

placing a first area of conductive material on said central region of said flexible membrane;

placing one or more second areas of conductive material on said peripheral region of said flexible membrane, wherein said one or more second areas of conductive material shares a common electrical potential and is electrically isolated from said first area of conductive material; and

coupling said first area of conductive material to ground.

24. The method according to claim 23 further including the step of coupling said at least one second area of conductive material to an electrical potential different than said first area of conductive material.