Coordinate measuring apparatus and method for controlling the same

• US 5,966,681 A
• Filed: 12/18/1997
• Issued: 10/12/1999
• Est. Priority Date: 12/21/1996
• Status: Expired due to Term

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Bernhardt, Ralf, Ruck, Otto, Grupp, Gunter
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): VO, HIEN XUAN
• Application Number:
  US08/993,990
• Time in Patent Office: 663 Days
• Field of Search: 702/152, 702/153, 702/168, 702/167, 702/95, 702/41, 364/474.29, 364/474.37, 33/503, 33/504, 33/505
• US Class Current: 702/152
• CPC Class Codes: G01B 3/008 Arrangements for controlling the measuring force
• CPC Class Codes: G01B 5/008 using coordinate measuring machines
• CPC Class Codes: G05B 19/401 characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes G05B19/19 takes precedence

Abstract

The invention is directed to a method which is provided for controlling coordinate measuring apparatus wherein a probe head (2) is moved and has a movably attached probe unit (24) attached thereto. The probe unit (24) is charged with a measurement force Fmeas relative to the probe head (2). The measurement force Fmeas operates against the mass inertial forces Fzp which occur because of acceleration of the probe. The measurement force Fmeas is comprised of a desired measurement force Fdes and a corrective measurement force Fcorr. The desired measurement force Fdes is constant in magnitude and is directed perpendicularly to the surface of the workpiece (15) to be measured. The corrective measurement force Fcorr at least partially compensates for the mass inertial forces (Ftr, Fzp) which occur because of the acceleration of the probe unit (24).

Claims

1. A method for controlling a coordinate measuring apparatus including a control system and a probe head having a probe unit movably attached thereto, the method comprising the steps of:

control driving said probe head and said probe unit along a path for measuring a workpiece having a surface whereby mass inertial forces are developed because of an acceleration of said probe unit along said path;

forming a desired measuring force (Fdes) which is constant in magnitude and is directed perpendicularly to said surface;

generating a corrective measuring force (Fcorr) for at least partially compensating said mass inertial forces (Ftr, Fzp);

forming a measuring force (Fmeas) from said desired measuring force (Fdes) and said corrective measuring force (Fcorr); and

,

applying said measuring force (Fmeas) to said probe unit relative to said probe head.

2. The method of claim 1, wherein said corrective measuring force (Fcorr) is selected to be proportional to said mass inertial forces.

3. The method of claim 1, wherein said corrective measuring force (Fcorr) is determined from the path acceleration (a) of said probe head.

4. The method of claim 3, wherein the path acceleration (a) of said probe head is determined from one of the time-dependent derivatives of the measured machine positions (xm, ym, zm) and the time-dependent derivative of the position desired values (Li).

5. A coordinate measuring apparatus for measuring a workpiece having a surface, the coordinate measuring apparatus comprising:

a probe head having a probe unit attached thereto;

a control system for control driving said probe head and said probe unit along a path for measuring said workpiece whereby mass inertial forces occur because of an acceleration of said probe unit along said path;

a first device for forming a desired measuring force (Fdes) directed perpendicularly to said surface and having a constant magnitude;

said control system including a second device for determining a corrective measuring force (Fcorr) which at least partially compensates for said mass inertial forces (Ftr, Fzp); and

,

said control system further including a third device for combining said desired measuring force (Fdes) and said corrective measuring force (Fcorr) to form a measuring force (Fmeas) and for adjusting the application of said measuring force (Fmeas) to said probe unit relative to said probe head.

6. The coordinate measuring apparatus of claim 5, said second device being adapted to select said corrective measuring force (Fcorr) proportional to said mass inertial forces (Ftr, Fzp).

7. The coordinate measuring apparatus of claim 6, wherein said second device determines said corrective measuring force (Fcorr) from the path acceleration (a) of said probe head.

8. The coordinate measuring apparatus of claim 7, wherein said second device determines said path acceleration (a) from one of the time-dependent derivative of the measured machine positions (xm, ym zm) and the time-dependent derivative of the position desired values (Li).

9. The coordinate measuring apparatus of claim 5, wherein said probe head includes one of the following to generate the measuring force:

an adjustable measuring force generator and springs which generate a measuring force proportional to the deflection of said probe unit in the measuring directions (x, y, z).

10. The coordinate measuring apparatus of claim 5, wherein said control system includes a function component group for correcting the static and dynamic bending of the probe pin and of the mechanism for moving said probe head.