Cleaning apparatus

• US 5,966,765 A
• Filed: 10/21/1997
• Issued: 10/19/1999
• Est. Priority Date: 10/21/1996
• Status: Expired due to Term

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Hamada, Satomi, Maekawa, Toshiro, Takeuchi, Toshiya
• Primary Examiner(s): Chin, Randall E.
• Assistant Examiner(s): MCNEIL, JENNIFER C
• Application Number:
  US08/955,292
• Time in Patent Office: 728 Days
• Field of Search: 15/88.2, 15/88.3, 15/77, 15/102, 15/21.1, 134/153, 134/902
• US Class Current: 15/77
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes

Abstract

A cleaning apparatus is used for cleaning a thin disk-shaped workpiece such as a semiconductor wafer, a liquid crystal display or the like. The cleaning apparatus comprises a support mechanism for supporting a workpiece and rotating the workpiece about its own axis, and a cleaning member for being in sliding contact with at least one of opposite surfaces of the workpiece. The support mechanism comprises a plurality of spindles, and a plurality of rotatable holding portions provided on upper ends of the spindles and having respective circumferential edges engageable with a circumferential edge of the workpiece. The plurality of spindles are clustered into groups around the workpiece, and two adjacent groups of the spindles are positioned to form a wide spacing between two adjacent groups of the spindles, and a path along which the workpiece is supplied to and removed from the support mechanism is positioned in the wide spacing.

Claims

1. An apparatus for cleaning a thin disk-shaped workpiece, said apparatus comprising:

a support mechanism for supporting a workpiece and rotating the workpiece about an axis thereof, said support mechanism including a plurality of spindles having at upper ends thereof respective rotatable holding portions with respective circumferential edges engageable with a circumferential edge of the workpiece, said spindles being clustered into two groups of spindles, each said group including at least three spindles including a center spindle and other spindles positioned on opposite sides of said center spindle, with a spacing between said two groups of spindles, said spacing being wider than a widest spacing between two adjacent said spindles within each said group of spindles, and a path along which the workpiece is supplied to and removed from said support mechanism being located within said spacing, said spindles of each said group being displaceable together rectilinearly and being relatively positioned such that displacement of said center spindle by a distance L insures that said other spindles are displaced by a distance of at least 0.7 L;

a nozzle for supplying a cleaning liquid to at least one of the opposite surfaces of the workpiece; and

a cleaning member to be in sliding contact with at least one of opposite surfaces of the workpiece, said cleaning member being rotatable about an axis thereof, said cleaning member comprising a roll brush extending in a direction to be diametrically across and parallel to the workpiece, and said groups of spindles are positioned to not physically interfere with said roll brush.

2. An apparatus as claimed in claim 1, wherein the workpiece is to be of substantially circular shape, said groups of spindles comprise two said groups, each said group including at least three said spindles, and each said group being displaceable as an integral group by a distance L in a radial direction from a center of the workpiece during which displacement all of said spindles of said each group are displaced in said radial direction by a distance of at least 0.7 L.

3. An apparatus as claimed in claim 2, further comprising moving mechanisms for moving respective said two groups of said spindles, one said moving mechanism exerting a smaller pressing force than the other said moving mechanism.

4. An apparatus as claimed in claim 1, wherein the workpiece is to be of substantially circular shape, said holding portions of said spindles are positioned on a circle to be along the circumferential edge of the workpiece, said roll brush extends along said path, and said groups of spindles comprise two said groups positioned substantially symmetrically with respect to the rotating axis of the workpiece.

5. An apparatus as claimed in claim 1, wherein said spindles are movable outwardly, whereby the workpiece can be supplied to a position over said holding portions of said spindles and then lowered to position an outer peripheral portion of the workpiece on shoulders of said holding portions, and wherein said spindles then are movable inwardly to engage said holding portions with the circumferential edge of the workpiece.

6. An apparatus as claimed in claim 5, wherein said spindles then are movable outwardly to enable the workpiece to be removed from said support mechanism by being lifted therefrom.

7. An apparatus for cleaning a thin disk-shaped workpiece of substantially circular shape, said apparatus comprising:

a support mechanism for supporting a workpiece and rotating the workpiece about an axis thereof, said support mechanism including a plurality of spindles having at upper ends thereof respective rotatable holding portions with respective circumferential edges engageable with a circumferential edge of the workpiece, said spindles being clustered into groups of spindles, with a spacing between two adjacent said groups of spindles, said spacing being wider than a widest spacing between two adjacent said spindles within each said group of spindles, and a path along which the workpiece is supplied to and removed from said support mechanism being located within said spacing;

moving mechanisms for moving respective said two groups of said spindles, one said moving mechanism exerting a smaller pressing force than the other said moving mechanism;

a nozzle for supplying a cleaning liquid to at least one of the opposite surfaces of the workpiece; and

a cleaning member to be in sliding contact with at least one of the opposite surfaces of the workpiece, said cleaning member being rotatable about an axis thereof.

8. An apparatus as claimed in claim 7, wherein said holding portions of said spindles are positioned on a circle to be along the circumferential edge of the workpiece, said cleaning member extends along said path, and said two groups of spindles are positioned substantially symmetrically with respect to the rotating axis of the workpiece.

9. An apparatus as claimed in claim 7, wherein said spindles are movable outwardly, whereby the workpiece can be supplied to a position over said holding portions of said spindles and then lowered to position an outer peripheral portion of the workpiece on shoulders of said holding portions, and wherein said spindles then are movable inwardly to engage said holding portions with the circumferential edge of the workpiece.

10. An apparatus as claimed in claim 9, wherein said spindles then are movable outwardly to enable the workpiece to be removed from said support mechanism by being lifted therefrom.

11. An apparatus as claimed in claim 7, wherein each said group of spindles includes at least three spindles including a center spindle and other spindles positioned on opposite sides of said center spindle, said spindles of each said group being displaceable together rectilinearly and being relatively positioned such that displacement of said center spindle by said distance L insures that said other spindles are displaced by said distance of at least 0.7 L.

12. An apparatus for cleaning a thin disk-shaped workpiece, said apparatus comprising:

a support mechanism for supporting a workpiece and rotating the workpiece about an axis thereof, said support mechanism including a plurality of spindles having at upper ends thereof respective rotatable holding portions with respective circumferential edges engageable with a circumferential edge of the workpiece, said spindles being clustered into groups of spindles with a spacing between two adjacent said groups of spindles, said spacing being wider than a widest spacing between two adjacent said spindles within each said group of spindles, and a path along which the workpiece is supplied to and removed from said support mechanism being located within said spacing, said spindles being movable outwardly, whereby the workpiece can be supplied to a position over said holding portions of said spindles and then lowered to position an outer peripheral portion of the workpiece on shoulders of said holding portions, and said spindles then being movable inwardly to engage said holding portions with the circumferential edge of the workpiece;

a nozzle for supplying a cleaning liquid to at least one of the opposite surfaces of the workpiece; and

a cleaning member to be in sliding contact with at least one of opposite surfaces of the workpiece, said cleaning member being rotatable about an axis thereof.

13. An apparatus as claimed in claim 12, wherein the workpiece is to be of substantially circular shape, said groups of spindles comprise two said groups, each said group including at least three said spindles, and each said group being displaceable as an integral group by a distance L in a radial direction from a center of the workpiece during which displacement all of said spindles of said each group are displaced in said radial direction by a distance of at least 0.7 L.

14. An apparatus as claimed in claim 12, wherein the workpiece is to be of substantially circular shape, said holding portions of said spindles are positioned on a circle to be along the circumferential edge of the workpiece, said cleaning member extends along said path, and said groups of spindles comprise two said groups positioned substantially symmetrically with respect to the rotating axis of the workpiece.

15. An apparatus as claimed in claim 12, wherein said spindles then are movable outwardly to enable the workpiece to be removed from said support mechanism by being lifted therefrom.

16. An apparatus as claimed in claim 12, comprising two said groups of spindles, each said group including at least three spindles including a center spindle and other spindles positioned on opposite sides of said center spindle, said spindles of each said group being displaceable together rectilinearly and being relatively positioned such that displacement of said center spindle by a distance L insures that said other spindles are displaced by a distance of at least 0.7 L.

17. An apparatus for cleaning a thin disk-shaped workpiece, said apparatus comprising:

a support mechanism for supporting a workpiece and rotating the workpiece about an axis thereof, said support mechanism including a plurality of spindles having at upper ends thereof respective rotatable holding portions with respective circumferential edges engageable with a circumferential edge of the workpiece, said spindles being clustered into groups of spindles with a spacing between two adjacent said groups of spindles, said spacing being wider than a widest spacing between two adjacent said spindles within each said group of spindles, and a path along which the workpiece is supplied to and removed from said support mechanism being located within said spacing, said spindles being movable outwardly, whereby the workpiece can be supplied to a position over said holding portions of said spindles and then lowered to position an outer peripheral portion of the workpiece on shoulders of said holding portions, and wherein said spindles then are movable inwardly to engage said holding portions with circumferential edge of the workpiece;

a nozzle for supplying a cleaning liquid to at least one of the opposite surfaces of the workpiece; and

a cleaning member to be in sliding contact with at least one of opposite surfaces of the workpiece, said cleaning member being rotatable about an axis thereof, said cleaning member comprising a roll brush extending in a direction to be diametrically across and parallel to the workpiece, and said groups of spindles are positioned to not physically interfere with said roll brush.