Device for sputter deposition of thin layers on flat substrates
First Claim
1. An apparatus for sputter deposition of thin layers of electrically insulating material on substrates, said apparatus comprising:
- a first pair of tubular magnetron cathodes arranged in an evacuable chamber connected to a gas source;
a second pair of magnetron cathodes;
a medium frequency generator connected in series with a transformer, said transformer having a center tap and secondary winding outputs, each of said secondary winding outputs being connected to a respective cathode of the second pair of magnetron cathodes;
direct current being fed into lines supplying said first pair of tubular mamagnetron cathods through the center tap of the transformer and via a network operatively associated with said first pair of tubular magnetron cathodes.
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Accused Products
Abstract
In an apparatus for the sputter deposition of thin electrically insulating layers on substrates (33, 33'"'"', . . . ) there is provided in an evacuable chamber which is connected to a treatment gas source, a first pair of tubular magnetron cathodes (5, 5'"'"' or 31) and at least one additional pair of magnetron cathodes (6, 6'"'"' or 25, 26 or 30, 32), a medium frequency generator (10) connected in series with a transformer (9), where the two secondary winding outputs (11, 12) of said transformer are each connected with the cathodes of a second pair (6, 6'"'"' or 25, 26 or 30, 32) and where direct current can be fed into the supply lines for the first cathode pair (31) via a center tap (15) of the transformer (9) and a network (17 or 13, 14).
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Citations
6 Claims
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1. An apparatus for sputter deposition of thin layers of electrically insulating material on substrates, said apparatus comprising:
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a first pair of tubular magnetron cathodes arranged in an evacuable chamber connected to a gas source; a second pair of magnetron cathodes; a medium frequency generator connected in series with a transformer, said transformer having a center tap and secondary winding outputs, each of said secondary winding outputs being connected to a respective cathode of the second pair of magnetron cathodes; direct current being fed into lines supplying said first pair of tubular mamagnetron cathods through the center tap of the transformer and via a network operatively associated with said first pair of tubular magnetron cathodes.
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2. An apparatus for sputter deposition of thin layers of electrically insulating material on flat substrates, said apparatus comprising:
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a first pair of tubular magnetron cathodes arranged in an evacuable chamber and connected to a gas source; additional evacuable chambers connected respectively before and after said chamber; planar magnetron cathodes each arranged in a respective additional chamber, said chambers having walls separating said chambers, said walls being provided with openings therein; a medium frequency generator connected in series with a transformer, said transformer having a secondary winding having two outputs, each of said outputs being connected with a respective planar cathode; and said transformer having a center tap connected with two direct current supply lines connected with said first pair of magnetron cathodes.
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3. An apparatus for sputter deposition of thin layers of electrically insulating material on flat substrates, said apparatus comprising:
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a first pair of tubular magnetron cathodes arranged in a first evacuable chamber which chamber is connected to a gas source; additional evacuable chambers connected respectively before and after said first chamber; planar magnetron cathodes each arranged in a respective additional chamber, said chambers having parting walls having apertures therein, said walls separating said chambers, said chambers being arranged next to one another; a medium frequency generator connected in series with a transformer, said transformer having a secondary winding with two outputs each connected with a respective planar cathode and with direct current sources via branch lines, said lines each supplying electrical power to a respective tubular cathode; said branch lines including chokes or recovery diodes.
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4. An apparatus for sputter deposition of thin layers of electrically insulating material on flat substrates, said apparatus comprising:
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a first pair of tubular magnetron cathodes arranged in a first evacuable chamber; and additional evacuable chambers connected respectively before and after said first chamber; further tubular magnetron cathodes each arranged in a respective additional chamber; said chambers having separating walls having apertures, said chambers being arranged next to one another, and said walls separating said chambers; a medium frequency generator connected in series with a transformer, said transformer having a secondary winding with two outputs each connected with a respective one of said further tubular cathodes, and said transformer having a center tap connected with two direct current sources which supply electric power to said first pair of tubular magnetron cathodes.
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5. An apparatus for sputter deposition of thin layers of electrically insulating material on flat substrates, said apparatus comprising:
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a plurality of tubular magnetron cathodes arranged in an evacuable chamber; a medium frequency generator to which a transformer is connected in series, said transformer having a center tap and a secondary winding with two outputs, said outputs each connected with a respective tubular magnetron cathode; said center tap being connected with two direct current sources, said direct current sources each being connected with a respective tubular magnetron cathode, other than the pair of cathodes connected with the secondary winding outputs of said transformer said cathodes being arranged immediately adjacent one another.
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6. An apparatus for sputter deposition of thin layers of electrically insulating material on flat substrates, said apparatus comprising:
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pairs of tubular magnetron cathodes each arranged in pairs in a chamber, said chamber being connected to a treatment gas source; a medium frequency generator to which a transformer is connected in series, said transformer having two secondary winding outputs each connected with a respective cathode of one of said pairs of cathodes; and said transformer having a center tap connected via a network to a plurality of direct current sources connected with cathodes of the pairs of cathodes other than the pair of cathodes connected with the secondary winding outputs of the transformer.
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Specification