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Micromechanical accelerometer having a peripherally suspended proof mass

  • US 5,969,250 A
  • Filed: 01/21/1998
  • Issued: 10/19/1999
  • Est. Priority Date: 10/17/1990
  • Status: Expired due to Fees
First Claim
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1. An accelerometer for detecting acceleration along at least one acceleration sensitive axis comprising:

  • a substrate having a first surface;

    at least two electrodes disposed on said substrate first surface;

    at least one central anchor disposed on said substrate first surface;

    at least two flexible elements extending from said at least one central anchor, above and substantially parallel to said substrate first surface;

    at least two support member anchors disposed on said substrate first surface;

    at least two support members each extending from a respective support member anchor, above and substantially parallel to said substrate first surface, and orthogonal to said at least one acceleration sensitive axis; and

    a peripherally suspended proof mass disposed about said at least one central anchor, said proof mass suspended above and substantially parallel to said substrate first surface by said at least two flexible elements and said at least two support members and having an inner surface and an outer surface,wherein each of said at least two flexible elements is generally collinear with said at least one acceleration sensitive axis and disposed proximate a respective one of said at least two electrodes formed on said substrate first surface.

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