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Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device

  • US 5,969,441 A
  • Filed: 10/10/1997
  • Issued: 10/19/1999
  • Est. Priority Date: 12/24/1996
  • Status: Expired due to Term
First Claim
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1. A positioning device provided with a base, a first displacement unit with a first object holder which is displaceable relative to the base parallel to an X-direction and parallel to a Y-direction which is perpendicular to the X-direction, and a second displacement unit with a second object holder which is displaceable relative to the base parallel to the X-direction and parallel to the Y-direction, said first and second object holders being displaceable relative to the base consecutively from a measuring position into an operational position, while the first and the second displacement unit each comprise a first part and a second part which are displaceable relative to one another and which exert a driving force on one another during operation, the first parts of the first and the second displacement unit being coupled to the first object holder and to the second object holder, respectively, seen parallel to the X-direction and parallel to the Y-direction, characterized in that the second parts of the first and the second displacement unit, seen parallel to the X-direction and parallel to the Y-direction, are coupled to a balancing unit which is common to the first and the second displacement unit and which is displaceably guided relative to the base parallel to the X-direction and parallel to the Y-direction, while the first and the second displacement unit each comprise a force actuator for generating the driving force.

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