Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer

• US 5,970,313 A
• Filed: 12/19/1997
• Issued: 10/19/1999
• Est. Priority Date: 12/19/1997
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Patel, Norein Narendra, Huertas, Robert A., Rowland, Daniel V.
• Primary Examiner(s): DUTTON, BRIAN KEITH
• Application Number:
  US08/994,221
• Time in Patent Office: 669 Days
• Field of Search: 324/719, 438/14, 438/17, 438/10
• US Class Current: 438/17
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633

Abstract

A method for monitoring the temperature of a product wafer during thermal processing of the product wafer in an emissivity independent thermal processing system includes processing a test wafer in the emissivity independent thermal processing system that thermally processes the product wafer. The test wafer is pretreated before being thus placed in the thermal processing system. The test wafer is thermally processed following a substantially same thermal processing recipe as that used for thermal processing of the product wafers. After the thermal processing of the test wafer, a sheet resistance of the test wafer is measured. This sheet resistance is correlated to a wafer temperature at the test wafer that was achieved during the thermal processing of the test wafer. Because the product wafer and the test wafer are thermally processed within an emissivity independent thermal processing system, the test wafer temperature is correlated to a product wafer temperature at the product wafer that was achieved during the thermal processing of the product wafer. With such monitoring of the product wafer temperature during actual thermal processing of the product wafer, thermal processing may be more tightly controlled to ensure that a thermal processing recipe is accurately followed.

Claims

1. A method for monitoring temperature during processing of a product wafer within a thermal processing system that is emissivity independent, the method including the steps of:

A. pretreating a test wafer to include a pretreatment material;

B. placing the test wafer with the product wafer into the thermal processing system to process the product wafer and the test wafer with a substantially same thermal processing recipe within the thermal processing system;

C. measuring sheet resistance of the test wafer, wherein the sheet resistance of the test wafer is correlated to a test wafer temperature achieved during step B; and

D. correlating the test wafer temperature to a product wafer temperature achieving during step B.

2. The method of claim 1, wherein the pretreatment material is annealed with the test wafer during step B, and wherein the sheet resistance of the test wafer measured in step C varies with extent of the pretreatment material annealing with the test wafer.

3. The method of claim 1, wherein the pretreatment step A includes the step of:

depositing a layer of titanium, as the pretreatment material, on the test wafer.

4. The method of claim 3, wherein the layer of titanium has a thickness of 1000 Å

.

5. The method of claim 4, wherein an initial sheet resistance measured on the test wafer after depositing the 1000 Å

thick layer of titanium is 6.3±

0.2 Ω

/square.

6. The method of claim 5, wherein a measurement of the initial sheet resistance at a plurality of locations on the test wafer results in a standard deviation that is less than 1% of a mean of the measurement of the initial sheet resistance at the plurality of locations.

7. The method of claim 3, wherein the test wafer starts as a p-type lightly doped silicon wafer having a sheet resistance of 10 Ω

/square to 40 Ω

/square.

8. The method of claim 3, wherein the test wafer is precleaned before depositing the layer of titanium.

9. The method of claim 8, wherein the test wafer is precleaned with a RCA etch and lastly with hydrofluoric acid.

10. The method of claim 3, wherein the sheet resistance measured in step C, with pretreating the test wafer to include the layer of titanium, is used for correlating to lower product wafer temperatures including 400°

Celsius to 700°

Celsius.

11. The method of claim 1, wherein the test wafer starts as a p-type lightly doped silicon wafer having a sheet resistance of 10 Ω

/square to 40 Ω

/square.

12. The method of claim 1, wherein step A includes the step of:

precleaning the test wafer before including the pretreatment material in the test wafer.

13. The method of claim 1, wherein the pretreatment step A includes the step of:

implanting one of arsenic and boron, as the pretreatment material, into the test wafer by ion implantation.

14. The method of claim 13, wherein the sheet resistance measured in step C, after pretreating the test wafer to include one of arsenic and boron, is used for correlation to higher product wafer temperatures including 650°

Celsius to 1200°

Celsius.

15. A method for monitoring temperature during processing of a product wafer within a thermal processing system that is emissivity independent, the method including the steps of:

A. pretreating a test wafer to include a pretreatment material, step A further including the steps of;

starting with a test wafer that is a p-type lightly doped silicon wafer having a sheet resistance of 10 Ω

/square to 40 Ω

/square;

precleaning the test wafer with a RCA etch and lastly with hydrofluoric acid; and

depositing a layer of titanium having a thickness of 1000 Å

, as the pretreatment material, on the test wafer, wherein an initial sheet resistance measured on the test wafer after depositing the 1000 Å

thick layer of titanium is 6.3±

0.2 Ω

/square, and wherein a measurement of the initial sheet resistance at a plurality of locations on the test wafer results in a standard deviation that is less than 1% of a mean of the measurement of the initial sheet resistance at the plurality of locations;

B. placing the test wafer with the product wafer into the thermal processing system to process the product wafer and the test wafer with a substantially same thermal processing recipe within the thermal processing system;

C. measuring sheet resistance of the test wafer, wherein the sheet resistance of the test wafer is correlated to a test wafer temperature achieved during step B for lower processing temperatures including 400°

Celsius to 700°

Celsius; and

E. correlating the test wafer temperature to a product wafer temperature achieving during step B, and

wherein the titanium is annealed with the test wafer during step B, and wherein the sheet resistance of the test wafer measured in step C varies with extent of the titanium annealing with the test wafer.