Magnetic bearing devices

• US 5,973,468 A
• Filed: 07/18/1997
• Issued: 10/26/1999
• Est. Priority Date: 07/18/1996
• Status: Expired due to Fees

• Current Assignee: BOC Edwards Japan Ltd (Atlas Copco AB)
• Original Assignee: Seiko Seiki Kabushiki Kaisha
• Inventors: Yamauchi, Akira
• Primary Examiner(s): Ip, Paul
• Application Number:
  US08/897,019
• Time in Patent Office: 830 Days
• Field of Search: 318/610-646, 310/90.5, 310/90, 361/160, 361/174
• US Class Current: 318/610
• CPC Class Codes: F16C 2360/45 Turbo-molecular pumps
• CPC Class Codes: F16C 32/0451 Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control

Abstract

To provide magnetic bearing devices capable of preventing undesirable consequences caused by conical mode or parallel mode resonance which is liable to occur during acceleration of a rotor. A band-pass filter 24 is connected in series with a PID control circuit 12 is for improving stiffness in a specific frequency band. A displacement of a rotor 2 detected by a displacement detector 30 is entered to a switcher 32. On the other hand, a rotational speed sensor 7 detects the revolving speed, and a compensator switching discriminator 26 causes a switch 32s of the switcher 32 to connect to an output terminal 32b or to an output terminal 32c when the revolving speed coincides with preset revolving speed data. The preset revolving speed data defines specific revolving speeds occurring below and above a frequency band which includes a first conical mode resonant frequency and a second conical mode resonant frequency. The position of the rotor 2 is adjusted by a magnetic bearing 38 based on an output of the PID control circuit 12.

Claims

1. A magnetic bearing device comprising:

a radial position sensor for measuring the position of a rotor in its radial direction;

displacement arithmetical means for processing a displacement measured by the radial position sensor;

first compensating means for improving stiffness in a frequency band including at least a first conical mode resonant frequency and a second conical mode resonant frequency upon receiving an output of the displacement arithmetical means;

second compensating means for correcting an output of the first compensating means;

power amplification means for power-amplifying an output of the second compensating means; and

a radial electromagnet for controlling the position of the rotor in its radial direction based on an output of the power amplification means.

4. A magnetic bearing device according to any one of claims 1, 2 or 3;

wherein the compensating means comprises a band-pass filter which improves stiffness in a specific range within a frequency band including the first conical mode resonant frequency F₁, the second conical mode resonant frequency F₂ and a third frequency F₃ =F₁ +2(F₂ -F₁).

2. A magnetic bearing device comprising:

a radial position sensor for measuring the position of a rotor in its radial direction;

displacement arithmetical means for processing a displacement measured by the radial position sensor;

a rotational speed sensor for measuring the revolving speed of the rotor;

first compensating means for improving stiffness in a frequency band including at least a first conical mode resonant frequency and a second conical mode resonant frequency upon receiving an output of the displacement arithmetical means;

compensation switching means for connecting an output of the radial position sensor to one of a conductor and the first compensating means depending upon whether the revolving speed measured by the rotational speed sensor coincides with preset revolving speed data;

second compensating means connected to the conductor and the first compensating means for correcting an output of the compensation switching means;

power amplification means for power-amplifying an output of the second compensating means; and

a radial electromagnet for controlling the position of the rotor in its radial direction based on an output of the power amplification means;

wherein the preset revolving speed data comprises a range of revolving speeds including the first conical mode resonant frequency and the second conical mode resonant frequency.

3. A magnetic bearing device according to claim 2;

wherein the first compensating means comprises at least two compensating devices for compensating at different frequency bands, and including a first compensating device for compensating at a first frequency band including the first conical mode resonance frequency and a second frequency band including the second conical mode resonant frequency; and

the compensation switching means includes means for connecting the conductor or one of the compensating devices to the next stage of the displacement arithmetical means when the revolving speed measured by the rotational speed sensor coincides with the preset revolving speed data, and the preset revolving speed data defines a plurality of revolving speeds including those occurring below and above the first conical mode resonant frequency as well as those occurring below and above the second conical mode resonant frequency.

5. A magnetic bearing device comprising:

a radial position sensor for measuring radial displacement of a rotating body;

first compensating means for improving stiffness in a frequency band including at least a first conical mode resonant frequency and a second conical mode resonant frequency based upon the measured rotor displacement;

second compensating means for correcting an output of the first compensating means;

a radial electromagnet for controlling the radial position of the radial body; and

means for driving the radial electromagnet in accordance with an output of the second compensating means.

6. A magnetic bearing device according to claim 5;

wherein the first compensating means comprises a band-pass filter, and the second compensating means comprises a PID control circuit.

7. A magnetic bearing device according to claim 5;

further comprising a rotational speed sensor for measuring the revolving speed of the rotating body; and

compensation switching means for connecting an output of the radial position sensor to one of a conductor and the first compensating means depending upon the measured revolving speed of the rotating body;

wherein the compensation switching means connects the output of the radial position sensor to the conductor so that the output of the radial position sensor is input directly to the second compensating means when the measured revolving speed is outside a predetermined range, and the compensation switching means connects the output of the radial position sensor to the second compensating means through the first compensating means when the measured revolving speed is within the predetermined range, the predetermined range including the first conical mode resonance point and the second conical mode resonance point.

8. A magnetic bearing device according to claim 7;

wherein the first compensating means comprises a band-pass filter, and the second compensating means comprises a PID control circuit.

9. A magnetic bearing device according to claim 7;

wherein an upper limit of the predetermined range is greater than a frequency F₃ =F₁ +2(F₂ -F₁), wherein F₁ is the first conical mode resonance point and F₂ is the second conical mode resonance point.

10. A magnetic bearing device according to claim 5;

wherein the first compensating means comprises a plurality of band-pass filters, each for improving stiffness of the rotating body in a different frequency band.