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Polycrystal silicon rod and production process therefor

  • US 5,976,481 A
  • Filed: 01/20/1998
  • Issued: 11/02/1999
  • Est. Priority Date: 05/21/1996
  • Status: Expired due to Term
First Claim
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1. A polycrystal silicon rod comprising a half value width of a peak indicative of crystal orientation ( 111) of an X-ray diffraction pattern, of 0.3°

  • or less, an internal strain rate in a radial direction, of less than 5.0×

    10-5 cm-1 and an internal iron concentration of 0.5 ppba or less.

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