Mechanism for transporting semiconductor-process masks

• US 5,980,187 A
• Filed: 04/17/1997
• Issued: 11/09/1999
• Est. Priority Date: 04/16/1997
• Status: Expired due to Term

• Current Assignee: Ultrapointe Corp. (Lumentum Holdings Inc.)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Verhovsky, Yuli
• Primary Examiner(s): Bucci, David A.
• Application Number:
  US08/839,287
• Time in Patent Office: 936 Days
• Field of Search: 414/225, 414/416, 414/741, 414/941, 414/937, 414/225.01, 901/31, 901/39, 294/103.1, 294/104, 294/86.4
• US Class Current: 414/416.03
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

A system for transporting an article between a loading station and an inspection stage includes a novel support for safely retaining the article during transit. The support includes a number of article-retaining members, at least one of which is connected to an actuator. The actuator clamps the article between the article-retaining members during transit. To ensure that the article is not dropped or damaged during transit, the system includes an un-clamp sensor connected to at least one of the article-retaining members. The un-clamp sensor is connected to a robot controller so that the system may be shut down immediately should the article become unclamped during transit. The system also includes novel loading and inspection stages that ensure proper orientation and placement of articles prior to transit from one to the other, further reducing risk of damage to transported articles.

Claims

1. A system for transferring an article of the type having a bottom surface and at least one edge defining a plurality of edge points from a first location to a second location, the system comprising:

a robot having a moveable arm;

a support for retaining the article the support being mounted on the arm of the robot for rotational and translational movement thereby and including;

first and second article-retaining members having respective first and second edge-point contact areas;

an actuator connected to the first article-retaining member and configured to urge the first article-retaining member against one of the edge points and to clamp the article between the first and second article-retaining members; and

an un-clamp sensor connected to at least one of the first and second article-retaining members, the un-clamp sensor configured to indicate when the article is unclamped between the first and second article-retaining members; and

means located at one of the first and second locations for preventing a collision between the support and the article at that location.

2. The system of claim 1, wherein the support further comprises a third article-retaining member, wherein the support is configured to clamp the article between the first, second, and third article-retaining members.

3. The system of claim 1, wherein the support further comprises a second actuator connected to the second article-retaining member, the second actuator configured to move the second article-retaining member from a first position to a second position.

4. The system of claim 3, further comprising an arm connected to the second actuator and the second article-retaining member.

5. The system of claim 3, wherein the first-mentioned actuator clamps the article when the second article-retaining member is in the second position.

6. The system of claim 1, wherein the article is a mask.

7. The system of claim 6, further comprising a pellicle sensor positioned at one of the first and second locations to detect the presence of a pellicle on the mask.

8. The system of claim 1, wherein the support further comprises a support floor upon which the article rests, the support floor comprising at least one rest positioned to contact the bottom surface of the article and to provide a stable seat for the article.

9. The system of claim 8, wherein the rest comprises Teflon.

10. The system of claim 1, wherein the support further comprises at least one collision sensor configured to sense objects adjacent the support.

11. The system of claim 1, wherein the first location comprises a loading station configured to receive the article.

12. The system of claim 11, wherein the article is enclosed within a cartridge.

13. The system of claim 11, wherein the loading station comprises a datum line for positioning the article.

14. The system of claim 13, wherein the loading station further comprises a pusher element for urging an edge of the article against the datum line.

15. The system of claim 11, wherein the means for preventing a collision comprises a light curtain.

16. The system of claim 11, wherein the loading station further comprises a pellicle sensor.

17. The system of claim 11, wherein the loading station further comprises an article-orientation sensor.

18. The system of claim 1, wherein the second location comprises an inspection stage. station to the inspection stage.

19. A system for positioning a mask for inspection, the system comprising:

a loading station configured to receive the mask, the loading station including a mask-size sensor, a mask-orientation sensor, and a pellicle sensor;

a robot including;

a moveable arm;

a support for retaining the mask, the support being mounted on the arm and moveable thereby with translational and rotational motion and including;

first, second, and third mask-retaining members having respective first, second and third mask-edge contact areas;

an actuator connected to the first mask-retaining member and configured to urge the first mask-retaining member against one of the mask edges to clamp the mask between the first, second and third mask-retaining members;

a mask sensor positioned to detect the presence of a mask on the support;

a collision sensor configured to sense objects adjacent the support; and

an un-clamp sensor connected to at least one of the first, second and third mask-retaining members; and

an inspection stage, wherein the robot is configured to transfer the mask from the loading station to the inspection stage.

20. The system of claim 19, wherein the support further comprises a second actuator connected to the second mask-retaining member, the second actuator configured to move the second mask-retaining member from a first position to a second position.

21. The system of claim 20, further comprising an arm connected to the second actuator and the second mask-retaining member.

22. The system of claim 19, wherein the mask is enclosed within a cartridge.

23. The system of claim 19, wherein the loading station further comprises a pusher element for urging an edge of the mask against a datum line.

24. The system of claim 19, wherein the loading station comprises a collision sensor configured to prevent the support from colliding with the mask.

25. The system of claim 24, wherein the loading station collision sensor is a light curtain.

26. The system of claim 19, wherein the inspection stage further comprises a mask-size sensor, a datum line, and means for positioning an edge of the mask along the datum line.

27. The system of claim 26, wherein the inspection stage further comprises a first light curtain for preventing a collision between the mask support and the inspection stage.

28. The system of claim 27, wherein the inspection stage further comprises a second light curtain for preventing a collision between the mask support and a mask loaded onto the inspection stage.