System for depositing a material on a substrate using light energy
First Claim
1. A system for forming an electrical insulating layer in an integrated circuit comprising:
- at least one nozzle for atomizing a liquid containing an electrical insulating material and a solvent into liquid droplets;
a reactor vessel in fluid communication with said at least one nozzle for receiving said liquid droplets, said reactor vessel being adapted to contain a substrate comprising a semiconductive material towards which said liquid droplets are directed; and
at least one incoherent lamp for providing light energy to said reactor vessel, said at least one lamp being configured to emit vacuum ultraviolet light, said at least one incoherent lamp being positioned so as to directly contact said liquid droplets with vacuum ultraviolet light prior to said droplets being deposited onto a substrate within said reactor vessel, said at least one lamp being spaced a predetermined distance from said liquid droplets being emitted from said nozzle and providing light energy in an amount sufficient to vaporize said solvent contained within said liquid droplets as said droplets are being deposited onto said substrate in order to form a solid material on said substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
The present invention is generally directed to a process and a system for transforming a liquid into a solid material using light energy. In particular, a solution containing a parent material in a liquid form is atomized in a reaction vessel and directed towards a substrate. The atomized liquid is exposed to light energy which causes the parent material to form a solid coating on a substrate. The light energy can be provided from one or more lamps and preferably includes ultraviolet light. Although the process of the present invention is well suited for use in many different and various applications, one exemplary application is in depositing a dielectric material on a substrate to be used in the manufacture of integrated circuit chips.
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Citations
28 Claims
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1. A system for forming an electrical insulating layer in an integrated circuit comprising:
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at least one nozzle for atomizing a liquid containing an electrical insulating material and a solvent into liquid droplets; a reactor vessel in fluid communication with said at least one nozzle for receiving said liquid droplets, said reactor vessel being adapted to contain a substrate comprising a semiconductive material towards which said liquid droplets are directed; and at least one incoherent lamp for providing light energy to said reactor vessel, said at least one lamp being configured to emit vacuum ultraviolet light, said at least one incoherent lamp being positioned so as to directly contact said liquid droplets with vacuum ultraviolet light prior to said droplets being deposited onto a substrate within said reactor vessel, said at least one lamp being spaced a predetermined distance from said liquid droplets being emitted from said nozzle and providing light energy in an amount sufficient to vaporize said solvent contained within said liquid droplets as said droplets are being deposited onto said substrate in order to form a solid material on said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system for forming an electrical insulating layer in an integrated circuit comprising:
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a liquid reservoir for containing a liquid comprising an electrical insulating material and a solvent; a nozzle in fluid communication with said liquid reservoir for atomizing said liquid containing said electrical insulating material into liquid droplets; a reactor vessel in fluid communication with said nozzle for receiving said liquid droplets, said reactor vessel being adapted to contain a substrate comprising a semiconductive material towards which said liquid droplets are directed; a first incoherent lamp and a second incoherent lamp for providing light energy to said reactor vessel, said first incoherent lamp being configured to emit ultraviolet light, said second incoherent lamp being configured to emit thermal energy, said first incoherent lamp being positioned so as to directly contact said liquid droplets with ultraviolet light prior to said droplets being deposited onto a substrate contained within said reactor vessel, said lamps providing light energy to said reactor vessel in an amount sufficient to vaporize said solvent contained in said liquid droplets in order to form a solid coating made from said electrical insulating material on said substrate contained in said reactor vessel; a flow control device for regulating the flow of said liquid from said liquid reservoir to said nozzle; and a controller configured to control said flow control device for controlling the flow of said liquid from said liquid reservoir to said nozzle. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A system for forming an electrical insulating layer in an integrated circuit comprising:
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at least one nozzle for atomizing a liquid comprising an electrical insulating material and a solvent into liquid droplets; a reactor vessel in fluid communication with said at least one nozzle for receiving said liquid droplets; a substrate holder contained within said reactor vessel, said substrate holder being configured to hold a substrate comprising a semiconductive material, said substrate holder being spaced a determined distance from said nozzle and being positioned such that said liquid containing said electrical insulating material emitted from said nozzle is deposited onto a substrate held on said substrate holder; and a first incoherent lamp and a second incoherent lamp, said first incoherent lamp being configured to emit optical energy, said second incoherent lamp being configured to emit thermal energy, said first incoherent lamp being positioned so as to directly contact said liquid droplets with optical energy prior to said droplets being deposited onto a substrate held on said substrate holder, said lamps providing light energy to said reactor vessel in an amount sufficient to vaporize said solvent contained in said liquid droplets in order to form a solid coating made from said electrical insulating material on said substrate contained in said reactor vessel. - View Dependent Claims (20, 21, 22)
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23. A system for forming an electrical insulating layer in an integrated circuit comprising:
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at least one nozzle for atomizing a liquid comprising an electrical insulating material and a solvent into liquid droplets; a reactor vessel in fluid communication with said at least one nozzle for receiving said liquid droplets; a substrate holder contained within said reactor vessel, said substrate holder being configured to hold a substrate comprising a semiconductive material, said substrate holder being spaced a determined distance from said nozzle and being positioned such that said electrical insulating material emitted from said nozzle is deposited onto a substrate held on said substrate holder; a heat source for heating a substrate held on said substrate holder while said electrical insulating material is deposited onto said substrate; and a first incoherent lamp being configured to emit optical energy, said first incoherent lamp being positioned so as to directly contact said liquid droplets with optical energy prior to said droplets being deposited onto said substrate held on said substrate holder, said first incoherent lamp and said heat source supplying light energy and heat energy in an amount sufficient to vaporize said solvent contained in said liquid droplets and form a solid coating on said substrate made from said electrical insulating material. - View Dependent Claims (24, 25, 26, 27, 28)
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Specification