Method of making stacked gate memory cell structure

• US 5,981,335 A
• Filed: 11/20/1997
• Issued: 11/09/1999
• Est. Priority Date: 11/20/1997
• Status: Expired due to Term

• Current Assignee: Vanguard International Semiconductor Corporation
• Original Assignee: Vanguard International Semiconductor Corporation
• Inventors: Chi, Min-Hwa
• Primary Examiner(s): Booth, Richard A.
• Application Number:
  US08/974,461
• Time in Patent Office: 719 Days
• Field of Search: 438/253-267, 365/185.28
• US Class Current: 438/253
• CPC Class Codes: G11C 11/404 with one charge-transfer gate, e.g. MOS transistor, per cell
• CPC Class Codes: G11C 16/0416 comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
• CPC Class Codes: H01L 29/42324 Gate electrodes for transistors with a floating gate
• CPC Class Codes: H01L 29/7885 Hot carrier injection from the channel
• CPC Class Codes: H10B 69/00 Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Abstract

A stacked gate memory cell having a retention time approaching that of an EEPROM cell and a program and erase time approaching that of a DRAM cell is disclosed. A stacked gate memory cell is fabricated upon a semiconductor substrate by implanting a deep diffusion well in the semiconductor substrate. Next a second diffusion well is implanted in the deep diffusion well. A MOS transistor is formed by implanting a drain diffusion and a source diffusion in the second diffusion well at a channel length apart. The source will be strapped to the second diffusion well. A tunnel oxide is placed on a top surface of the semiconductor substrate in a channel area between the source and drain. A polysilicon gate electrode is placed on the tunnel oxide above the channel area. An insulating layer is then placed on the surface of the semiconductor substrate. A stacked capacitor is formed above the MOS transistor on the surface of the insulating layer. The stacked capacitor has a polysilicon first plate insulating layer and connected by a shorting plug to the gate electrode through an opening in the insulating layer. The gate electrode and the first plate will form a floating gate for the MOS transistor. A capacitor dielectric placed upon the first plate; and a polysilicon second plate on the capacitor dielectric. The second plate will form a control gate for the MOS transistor.

Claims

1. A method to fabricate a stacked gate memory cell comprising the steps of:

a) implanting a deep diffusion well of a first conductivity type in the semiconductor substrate and connecting said deep diffusion well to a deep diffusion voltage generator;

b) implanting a second diffusion well of a second conductivity type in the deep diffusion well;

c) forming a MOS transistor by the steps of;

implanting a drain diffusion of the first conductivity type in the second diffusion well and connecting said drain diffusion to a bit line voltage generator,

implanting a source diffusion of the second conductivity type in the second diffusion well at a channel length from the drain diffusion, strapped to said second diffusion well, and coupling said source diffusion to a source control voltage generator;

depositing a tunnel oxide on a top surface of said semiconductor substrate in a channel area, whereby the channel length is a length dimension of the channel area, that is between said drain diffusion and said source diffusion, and

depositing a gate electrode of a first polysilicon material on the tunnel oxide above the channel area;

d) depositing an insulating layer on the surface of said semiconductor substrate with a plurality of openings to allow connections to said second diffusion well, said source diffusion, said drain diffusion, and said gate electrode; and

e) forming a stacked capacitor by the steps of;

depositing a first plate of a second polysilicon material upon said insulating layer and connecting said first plate by a shorting plug to said gate electrode through one of the plurality of openings in said insulating layer, whereby said gate electrode and said first plate will form a floating gate for said MOS transistor,

depositing a capacitor dielectric placed upon said first plate, and

depositing a second plate of a third polysilicon material on said capacitor dielectric and coupling said second plate to a word line voltage generator, whereby said second plate will form a control gate for said MOS transistor.

2. The method of claim 1 wherein said stacked gate memory cell has a retention time greater than the retention time of a DRAM cell.

3. The method of claim 2 wherein said retention time is greater than approximately 200 ms.

4. The method of claim 2 wherein the retention time is less than the retention time of a EEPROM cell.

5. The method of claim 2 wherein the retention time is less than 10 years.

6. The method of claim 1 wherein a programming time is between approximately 10 ns and approximately 10 ms.

7. The method of claim 1 wherein an erase time is between approximately 10 ns and approximately 10 ms.

8. The method of claim 1 wherein said deep diffusion generator is a power supply voltage source.

9. The method of claim 1 wherein said memory cell is a DRAM cell.

10. The method of claim 1 wherein said memory cell is a EEPROM cell.

11. The method of claim 1 wherein said memory cell is programmed to a logical "1" by placing said bit line voltage generator at a level that is a negative of the power supply voltage source, placing said word line voltage generator at a level that is the power supply voltage source, placing said source control voltage generator at the level that is the negative of the power supply voltage source, and placing the deep diffusion voltage generator at the level of the power supply voltage source.

12. The method of claim 1 wherein said memory cell is programmed to a logical "0" by placing said bit line voltage generator at a ground reference potential, placing said word line voltage generator at a level that is the power supply voltage source, placing said source control voltage generator at the level that is the negative of the power supply voltage source, and placing the deep diffusion voltage generator at the level of the power supply voltage source.

13. The method of claim 1 wherein said memory cell is erased by placing said word line generator at the level that is the negative of the power supply voltage source, placing said bit line generator at a the level that is the power supply voltage source, placing said source control voltage generator at the level that is the negative of the power supply voltage source, and said deep diffusion voltage generator at the level of the power supply voltage source.

14. The method of claim 9 wherein said tunnel oxide has a thickness that is from approximately 60 Å

to approximately 70 Å

.

15. The method of claim 10 wherein said tunnel oxide has a thickness that is from approximately 100 Å

.

16. The method of claim 1 wherein said memory cell has a coupling ratio of approximately 0.95.