Optoelectronic transducer formed of a semiconductor component and a lens system

• US 5,981,945 A
• Filed: 03/08/1996
• Issued: 11/09/1999
• Est. Priority Date: 03/08/1995
• Status: Expired due to Term

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Siemens AG
• Inventors: Bogner, Georg, Spaeth, Werner, Gramann, Wolfgang, Dietrich, Ralf
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US08/614,836
• Time in Patent Office: 1,341 Days
• Field of Search: 250/239, 250/216, 250/214.1, 250/214 R, 257/81, 257/433, 257/82-84, 257/431, 257/432, 257/436, 257/99, 257/100
• US Class Current: 250/239
• CPC Class Codes: G02B 6/4204 the coupling comprising intermediate optical elements, e.g. lenses, holograms encapsulated active devices H01S5/02208, H01L33/52
• CPC Class Codes: H01L 2224/32225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 31/0203 Containers; Encapsulations , e.g. encapsulation of photodiodesfor photovoltaic devices H01L31/048; for organic photosensitive devices H10K30/80
• CPC Class Codes: H01L 31/02325 the optical elements not being integrated nor being directly associated with the device
• CPC Class Codes: H01L 33/58 Optical field-shaping elements

Abstract

An optoelectronic transducer includes a base plate, a radiation-emitting or transmitting semiconductor component disposed on the base plate, an optical lens system aimed at the semiconductor component and a spacer joined to the base plate for the lens system. The base plate, the spacer and the lens system are formed of materials with at least similar coefficients of thermal expansion. A method for producing an optoelectronic transducer includes forming indentations in a base plate for receiving semiconductor components, while leaving a land remaining on at least one side of each of the indentations. A first plate of the size of the base plate is placed on the lands and joined to the lands by material locking. The first plate is removed between the lands producing spacers joined to the base plate. A number of the semiconductor components are inserted into the indentations in accordance with a predetermined grid pattern and are joined to the base plate to form substrates. The substrates are covered with a second plate including a number of lens systems correspopnding to number of semiconductor components, while placing the lens systems of the second plate in the same grid pattern. The second plate is adjusted relative to the substrates for aiming each of the lens systems at a respective one of the semiconductor components. The second plate is secured to the substrates.

Claims

1. An optoelectronic transducer, comprising:

a base plate having a surface with lands formed thereon;

a radiation-emitting or transmitting semiconductor component disposed between said lands on said base plate and having a top surface;

an optical lens system aimed at said semiconductor component, an entire area of said top surface of said radiation-emitting or transmitting semiconductor component having a direct and unobstructed path to said optical lens system; and

a spacer supported on said lands of said base plate for supporting said lens system;

said base plate, said spacer and said lens system being formed of materials with at least similar coefficients of thermal expansion.

2. The transducer according to claim 1, wherein said base plate and said lens system are formed of silicon and said spacer is formed of glass.

3. The transducer according to claim 1, wherein said base plate is formed of glass and said lens system and said spacer are formed of silicon.

4. The transducer according to claim 1, wherein said base plate has a metal layer on which said semiconductor component is secured.

5. The transducer according to claim 2, wherein said spacer formed of glass is joined to said base plate and said lens system formed of silicon, by anodic bonding.

6. The transducer according to claim 3, wherein said base plate formed of glass is joined to said lens system and said spacer formed of silicon, by anodic bonding.

7. The transducer according to claim 2, wherein said spacer formed of glass is joined to said base plate and said lens system formed of silicon by soldering.

8. The transducer according to claim 3, wherein said base plate formed of glass is joined to said lens system and said spacer formed of silicon by soldering.

9. The transducer according to claim 2, wherein said spacer formed of glass is joined to said base plate and said lens system formed of silicon by adhesive bonding.

10. The transducer according to claim 3, wherein said base plate formed of glass is joined to said lens system and said spacer formed of silicon by adhesive bonding.

11. The transducer according to claim 1, wherein said semiconductor component is seated in an indentation formed in said base plate.

12. The transducer according to claim 1, including a glass plate, said base plate being formed of silicon and having a side remote from said semiconductor component being joined to said glass plate.

13. The transducer according to claim 1, wherein said surface of said base plate has an indentation formed between said lands, and said semiconductor component is disposed in said indentation.

14. The transducer according to claim 1, wherein said base plate, said spacer and said lens system are entirely formed of materials with at least similar coefficients of thermal expansion.

15. An optoelectronic transducer system, comprising:

an optoelectronic transducer, including;

a base plate having a surface with lands formed thereon;

a radiation-emitting or transmitting semiconductor component disposed between said lands on said base plate;

an optical lens system aimed at said semiconductor component; and

a spacer disposed on said lands and extending from said base plate and supporting said lens system, said spacer formed of glass with a given coefficient of thermal expansion and said base plate having a coefficient of thermal expansion substantially similar to said given coefficient of thermal expansion of said spacer.

16. The transducer system according to claim 15, including a housing having a base and a cap with a window, said optoelectronic transducer is secured to said base relative to said window of said cap, and a coupling disposed on said housing for receiving and securing a light wave conductor to said housing.

17. The transducer according to claim 16, wherein said transducer is adjustable relative to said window.