Pixelized scintillation layer and structures incorporating same

• US 5,981,959 A
• Filed: 12/05/1997
• Issued: 11/09/1999
• Est. Priority Date: 12/05/1997
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Apte, Raj B.
• Primary Examiner(s): Hannaher, Constantine
• Application Number:
  US08/985,891
• Time in Patent Office: 704 Days
• Field of Search: 250/367, 250/483.1
• US Class Current: 250/483.1
• CPC Class Codes: G01T 1/20 with scintillation detectors
• CPC Class Codes: G01T 1/2006 using a combination of a scintillator and photodetector which measures the means radiation intensity

Abstract

A pixelized scintillation layer is taught in which high aspect ratio columns of scintillation material are formed. The columns may be sized and spaced to correspond to the sizing and spacing of an underlying sensor array, or they may be sized such that there is plurality of columns for each pixel. A method for forming the pixelized scintillation layer includes the step of forming openings such as wells, vias, or channels in a body, for example by etching a thick photoresist, ion beam etching, anodic etching, etc., and the step of filling the openings with scintillation material. A completed image sensing apparatus is also taught.

Claims

1. A structure for receiving a scintillation material for an image capture apparatus, comprising:

a body substantially transparent to X-rays, having formed therein a plurality of openings, spaced apart by a distance between 7 μ

m and 200 μ

m, the openings being between 100 μ

m and 1000 μ

m deep, the openings being spaced apart from one another by walls, the walls having a thickness between 0.1 μ

m and 10 μ

m.

2. The structure of claim 1, wherein said openings are wells extending part way through said body.

3. The structure of claim 1, wherein said openings are vias extending entirely through said body.

4. The structure of claim 1, wherein said openings are channels.

5. The structure of claim 1, in which said walls have applied thereto a reflective coating.

6. The structure of claim 1, in which said body is a photoimagable polymer.

7. A structure of the type in which is disposed a scintillation material for an image capture apparatus, comprising:

a body substantially transparent to X-rays, having formed therein a plurality of openings, spaced apart by a distance between 7 μ

m and 200 μ

m, the openings being between 100 μ

m and 1000 μ

m deep, the openings being spaced apart from one another by walls, the walls having a thickness between 0.1 μ

m and 10 μ

m; and

particulate scintillation material disposed at least within said openings.

8. The structure of claim 7, wherein said particulate scintillation material comprises a combination of scintillation material powder, binder, and solvent.

9. The structure of claim 7, wherein said openings are wells extending part way through said body.

10. The structure of claim 7, wherein said openings are vias extending entirely through said body.

11. The structure of claim 7, wherein said openings are channels.

12. The structure of claim 7, in which said walls have applied thereto a reflective coating.

13. The structure of claim 7, in which said body is a photoimagable polymer.

14. The structure of claim 7, wherein the scintillation material completely fills said openings.

15. An image capture apparatus, comprising:

a body substantially transparent to X-Rays, having formed therein a plurality of openings, spaced apart by a distance between 7 μ

m and 200 μ

m, the openings being between 100 μ

m and 1000 μ

m deep, the openings being spaced apart from one another by walls, the walls having a thickness between 0.1 μ

m and 10 μ

m;

particulate scintillation material disposed at least within said openings; and

a sensor array disposed in optical communication with said particulate scintillation material.

16. The apparatus of claim 15, wherein said particulate scintillation material comprises a combination of scintillation material powder, binder, and solvent.

17. The apparatus of claim 15, wherein said openings are wells extending part way through said body.

18. The apparatus of claim 15, wherein said openings are vias extending entirely through said body.

19. The apparatus of claim 15, wherein said openings are channels.

20. The apparatus of claim 15, in which said walls have applied thereto a reflective coating.

21. The apparatus of claim 15, in which said body is a photoimagable polymer.

22. An image capture apparatus, comprising:

a body substantially transparent to X-rays, having formed therein a plurality of openings, spaced apart by a distance between 7 μ

m and 200 μ

m, the openings being between 100 μ

m and 1000 μ

m deep, the openings being spaced apart from one another by walls, the walls having a thickness between 0.1 μ

m and 10 μ

m;

particulate scintillation material disposed at least within said openings; and

a photographic film removably disposed in optical communication with said particulate scintillation material.

23. The apparatus of claim 22, wherein said particulate scintillation material comprises a combination of scintillation material powder, binder, and solvent.

24. The apparatus of claim 22, wherein said openings are wells extending part way through said body.

25. The apparatus of claim 22, wherein said openings are vias extending entirely through said body.

26. The apparatus of claim 22, wherein said openings are channels.

27. The apparatus of claim 22, in which said walls have applied thereto a reflective coating.

28. The apparatus of claim 22, in which said body is a photoimagable polymer.

29. A structure of scintillation material for converting source radiation into visible light, comprising:

a planar region of particulate scintillation material having a first surface and a second surface;

a plurality of raised regions of particulate scintillation material integrated with and protruding from said first surface, said raised regions separated from one another by interstitial regions;

the structure formed by a method employing a body, comprising the steps of;

forming in at least a first surface of said body openings for receiving scintillation material; and

depositing particulate scintillation material within and over said openings by a physical deposition technique to form said structure; and

separating the structure from said body.

30. The structure of claim 29, further comprising a carrier bonded to said second surface of said planar region of particulate scintillation material.

31. The structure of claim 29, further comprising material reflective to visible light deposited at least within said interstitial regions.

32. The structure of claim 29, wherein said raised regions have walls, and further comprising material reflective to visible light disposed at least on said walls.