On-chip alignment fiducials for surface emitting devices
First Claim
1. An optoelectronic apparatus comprising:
- a die having a mesa, the mesa having thereon a surface emitting optical device, the mesa having thereon a metallized p-type contact, a planar pad adjacent the mesa for Z-height registration with an optical bench, a first notch having been provided by a first etch, the first notch having thereon a metallized n-type contact that is coplanar with the p-type contact, a second notch having been provided by a second etch, the second notch having a side surface to abut the optical bench along an x-axis, the first notch extending to the second notch, and the die having side surfaces to abut the optical bench along a y-axis, and the second notch extending to the side surfaces.
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Accused Products
Abstract
An optoelectronic apparatus has, a die having a mesa (103) with a surface emitting optical device and a metallized p-type contact (209), a planar pad (201) adjacent the mesa for Z-height registration with an optical bench, a first notch (206) having been provided by a first etch and having thereon a metallized n-type contact (208) that is coplanar with the p-type contact (209), a second notch having a side surface (204) having been provided by a second etch, the second notch to abut the optical bench along an x-axis, the first notch (206) extending to the second notch, and the die having side surfaces (207) to abut the optical bench along a y-axis, and the second notch extending to the side surfaces (207).
34 Citations
11 Claims
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1. An optoelectronic apparatus comprising:
- a die having a mesa, the mesa having thereon a surface emitting optical device, the mesa having thereon a metallized p-type contact, a planar pad adjacent the mesa for Z-height registration with an optical bench, a first notch having been provided by a first etch, the first notch having thereon a metallized n-type contact that is coplanar with the p-type contact, a second notch having been provided by a second etch, the second notch having a side surface to abut the optical bench along an x-axis, the first notch extending to the second notch, and the die having side surfaces to abut the optical bench along a y-axis, and the second notch extending to the side surfaces.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
Specification