Method of manufacturing liquid crystal display including active panel
First Claim
1. A method for manufacturing a liquid crystal display comprising the steps of:
- forming a first gate bus line on a substrate;
forming a second gate bus line directly on the first gate bus line, wherein the first gate bus line includes a first metal layer with a first resistance, and the second gate bus line includes a second metal layer with a second resistance, the second resistance being higher than the first resistance;
forming a gate insulating layer, a semiconductor layer and an impure semiconductor layer on the substrate;
forming a source electrode and a drain electrode on the impure semiconductor layer;
forming a protection layer covering the source electrode and the drain electrode;
forming a drain contact hole for exposing the drain electrode; and
forming a pixel electrode which is connected with the drain electrode through the drain contact hole.
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Accused Products
Abstract
A method for manufacturing a liquid crystal display includes the steps of forming a gate bus line on a substrate by using a first metal, forming a gate electrode, a second gate bus line and a gate pad on the substrate, by using a second metal, forming a gate insulating layer on the substrate including the gate bus line, the gate electrode, the gate pad and the second gate bus line, by using a first insulating material, selectively forming a semiconductor layer and an impure semiconductor layer on the gate insulating layer, forming a source electrode, a drain electrode, a source bus line and a source pad on the substrate including the impure semiconductor layer, by using a third metal, removing a portion of the impure semiconductor layer exposed between the source electrode and the drain electrode by etching, using the source electrode and the drain electrode as masks, forming a protection layer on the substrate including the source electrode and the drain electrode, by using a second insulating material, forming a drain contact hole on the drain electrode, a source pad contact hole on the source pad and a gate pad contact hole on the gate pad, and forming a pixel electrode on the substrate having the protection layer, using a conductive material.
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Citations
9 Claims
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1. A method for manufacturing a liquid crystal display comprising the steps of:
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forming a first gate bus line on a substrate; forming a second gate bus line directly on the first gate bus line, wherein the first gate bus line includes a first metal layer with a first resistance, and the second gate bus line includes a second metal layer with a second resistance, the second resistance being higher than the first resistance; forming a gate insulating layer, a semiconductor layer and an impure semiconductor layer on the substrate; forming a source electrode and a drain electrode on the impure semiconductor layer; forming a protection layer covering the source electrode and the drain electrode; forming a drain contact hole for exposing the drain electrode; and forming a pixel electrode which is connected with the drain electrode through the drain contact hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification