Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices

• US 5,983,704 A
• Filed: 01/15/1998
• Issued: 11/16/1999
• Est. Priority Date: 05/29/1995
• Status: Expired due to Term

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Jin-sung, Park, Sang-o, Kang, Hee-se, Moon, Sang-young
• Primary Examiner(s): BROCK, MICHAEL J
• Application Number:
  US09/007,535
• Time in Patent Office: 670 Days
• Field of Search: 73/1.03, 73/1.05, 73/28.05, 73/28.06, 73/28.01, 73/865.9, 73/863.22
• US Class Current: 73/28.01
• CPC Class Codes: G01N 15/0255 with mechanical, e.g. inertial, classification, and investigation of sorted collections with centrifuges G01N15/042
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14

Abstract

An apparatus and a method of measuring contamination particles generated during manufacturing of semiconductor devices and an analysis method therefor are described. The apparatus for measuring contamination particles has a regulator for controlling the flow of source gas, a first junction, a first filter, a first air valve, a test component, a second junction, a flow pressure reducer, a third junction, a particle counter, a second pump, a computer system, a third air valve, a flow meter, a second filter, a second air valve, a fourth junction, a third filter, an impactor, and a first pump. It is possible to analyze structures and elements of the contamination particles generated from a gas delivery system (GDS) and from at least one utility component constituting the system. Further, it is possible to set up a reference for controlling the contamination particles generated from the GDS and from at least one of the utility components.

Claims

1. A method of measuring contamination particles generated during manufacturing of semiconductor devices having a gas delivery system (GDS) and at least one utility component comprising:

measuring particles generated from the GDS;

measuring particles generated from the at least one utility component, wherein said measuring contamination particles generated from the GDS and the at least one utility component includes determining levels of contaminating particles in samples by utilizing three methods, a static test method, a dynamic test method, and an impact test method, which methods may be utilized either individually or collectively to obtain results.

2. The method of measuring contamination particles generated during manufacturing of semiconductor devices according to claim 1, wherein said static test method includes uniformly flowing gas into a test component to estimate the level of contaminating particles generated under conditions of actual use of the at least one utility component.

3. The method of measuring contamination particles generated during manufacturing of semiconductor devices according to claim 1, wherein said dynamic test method includes measuring particles shed by a test component during impact by providing a momentary change of pressure to estimate of the level of contamination particles generated when the at least one component is operated.

4. The method of measuring contamination particles generated during manufacturing of semiconductor devices according to claim 1, wherein said impact test includes impacting a predetermined physical force from the exterior on a test component and measuring particles generated during said impacting.