Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon

• US 5,983,721 A
• Filed: 09/29/1997
• Issued: 11/16/1999
• Est. Priority Date: 09/27/1996
• Status: Expired due to Term

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Sulzberger, Peter, Offenberg, Michael
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/940,140
• Time in Patent Office: 778 Days
• Field of Search: 73/514.32, 73/514.38, 73/514.18, 73/514, 73/24, 73/862.626, 361/280, 361/283.1
• US Class Current: 73/514.32
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0136 Comb structures
• CPC Class Codes: B81B 2203/0307 Anchors
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.

Claims

1. A micromechanical component, comprising:

at least two anchoring areas;

a substrate configured as a plate having a surface;

a one-piece surface structure coupled to the surface via the at least two anchoring areas, the one-piece surface structure extending over the surface for a lateral extension of the one-piece surface structure and at a first predetermined distance from the surface, wherein the one-piece surface structure includes movable electrodes and springs, the movable electrodes being suspended on the springs and being movable relative to the substrate; and

rigid electrodes positioned opposite to the movable electrodes and being immovable relative to the substrate,

wherein a first anchoring area of the at least two anchoring areas is arranged at a second predetermined distance from a second anchoring area of the at least two anchoring areas, the second predetermined distance being small relative to the lateral extension of the one-piece surface structure, and wherein the rigid electrodes are attached to the surface of the substrate using connecting areas, a first connecting area of the connecting areas being positioned at a third predetermined distance from a second connecting area of the connecting areas, the connecting areas being positioned at a fourth predetermined distance from the at least two anchoring areas, the third and fourth predetermined distances being small relative to the lateral extension of the one-piece surface structure.

2. The micromechanical component according to claim 1, wherein the springs are connected to the at least two anchoring areas via suspension bars.

3. The micromechanical component according to claim 1, wherein the one-piece surface structure is composed of a silicon material.

4. The micromechanical component according to claim 1, wherein the rigid electrodes are composed of a silicon material.

5. The micromechanical component according to claim 1, wherein the micromechanical component corresponds to a force sensor.

6. The micromechanical component according to claim 1, wherein the micromechanical component corresponds to an acceleration sensor.

7. A micromechanical component, comprising:

at least two anchoring areas;

a substrate configured as a plate having a surface;

a one-piece surface structure coupled to the surface via the at least two anchoring areas, the one-piece surface structure extending over the surface for a predetermined lateral extension of the one-piece surface structure and at a first predetermined distance from the surface, wherein the one-piece surface structure includes movable electrodes and springs, the movable electrodes being suspended on the springs and being movable relative to the substrate; and

rigid electrodes positioned opposite to the movable electrodes and being immovable relative to the substrate,

wherein a first anchoring area of the at least two anchoring areas is arranged at a second predetermined distance from a second anchoring area of the at least two anchoring areas, the second predetermined distance being smaller than the predetermined lateral extension of the one-piece surface structure, wherein the rigid electrodes are attached to the surface of the substrate using connecting areas, a first connecting area of the connecting areas being positioned at a third predetermined distance from a second connecting area of the connecting areas, the connecting areas being positioned at a fourth predetermined distance from the at least two anchoring areas, the third and fourth predetermined distances being smaller than the predetermined lateral extension of the one-piece surface structure, and wherein the rigid electrodes are connected to the connecting areas via suspension bars.