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Micromachined porous membranes with bulk support

  • US 5,985,328 A
  • Filed: 01/28/1998
  • Issued: 11/16/1999
  • Est. Priority Date: 03/07/1994
  • Status: Expired due to Term
First Claim
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1. A microfabricated containment capsule, comprising:

  • a. at least one bulk substrate, said at least one bulk substrate delimiting a cavity having a boundary, a first portion of said boundary constituting an inner wall of a solid portion of said at least one bulk substrate; and

    b. at a second portion of said boundary, a membrane having at least one porous area with controlled pores and a rib member, said membrane joined to one side of said at least one bulk substrate to provide a selective molecular barrier for passing molecules dimensioned at less than about 3,500 angstroms between an interior and an exterior of said cavity.

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