Method of efficiently laser marking singulated semiconductor devices

• US 5,986,235 A
• Filed: 07/21/1997
• Issued: 11/16/1999
• Est. Priority Date: 01/24/1996
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micro Electronics Incorporated
• Inventors: Canella, Robert L.
• Primary Examiner(s): MILLS, GREGORY L
• Application Number:
  US08/897,774
• Time in Patent Office: 848 Days
• Field of Search: 219/121.68, 219/121.69, 219/121.82, 219/121.83, 219/121.84, 219/121.85
• US Class Current: 219/121.68
• CPC Class Codes: B23K 26/0838 by using an endless conveyor belt
• CPC Class Codes: G06K 1/126 by photographic or thermographic registration recording apparatus for measuring instruments G01D15/00
• CPC Class Codes: H01L 21/67282 Marking devices
• CPC Class Codes: H01L 2223/54473 for use after dicing
• CPC Class Codes: H01L 23/544 Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps test patterns for characterising or monitoring manufacturing processes H01L22/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A laser marking apparatus and method for marking the surface of a singulated article such as a semiconductor chip are described herein. Semiconductor chips are fed along inclined, parallel tracks to a laser marking field where they are subsequently marked by a laser beam. As the laser beam is marking chips associated with one track, chips associated with other tracks that have already been marked are replaced by unmarked chips. In this manner, the laser is continually being used to mark semiconductor chips without having to wait for unmarked chips to move to the marking location.

Claims

1. An laser marking apparatus for singulated articles, comprising:

at least two article suppliers configured to supply singulated articles to laterally adjacent locations within a marking field for marking;

a laser located proximate the marking field and configured to project a laser beam for marking the singulated articles; and

a controller associated with the laser and adapted to;

cause each of the at least two article suppliers to selectively arrest movement of the singulated articles to accumulate groups of singulated articles at each of the laterally adjacent locations within the marking field; and

direct the laser beam toward a first group of singulated articles at one of the laterally adjacent locations to sequentially mark each of the articles of the first group and to subsequently direct the laser beam toward a second group of singulated articles at another of the laterally adjacent locations to sequentially mark each of the articles of the second group.

2. The apparatus of claim 1, the articles the articles being selected from the group consisting of:

a singulated packaged die, a partial wafer, and a bare singulated die.

3. The laser marking apparatus of claim 1, the controller further adapted to provide articles to the marking field in a sequence such that the laser may be substantially continually in operation marking articles provided by the article suppliers.

4. The laser marking apparatus of claim 1, the laser further including at least one lens adapted to focus the laser beam on an article within the marking field.

5. The laser marking apparatus of claim 1, the apparatus being configured to mark at least 10,000 articles per hour.

6. The laser marking apparatus of claim 1, each of the at least two article suppliers comprising a supply magazine containing articles mounted proximate a first end of an associated track.

7. The laser marking apparatus of claim 1, the laser beam sequentially alternating between marking each of the groups of singulated articles at each of the laterally adjacent locations within the marking field.

8. The laser marking apparatus of claim 1, each of the article suppliers including a shipping magazine mounted proximate a second end of a track.

9. The laser marking apparatus of claim 1, each of the at least two article suppliers including at least one conveyor mechanism.

10. The laser marking apparatus of claim 1, each article supplied by each of the at least two article suppliers is contained in a carrier.

11. The laser marking apparatus of claim 10, each of the articles contained in a carrier being oriented in an inverted position on its respective article supplier.

12. The apparatus of claim 10, wherein the laser is oriented in an inverted position relative to the at least two article suppliers.

13. The laser marking apparatus of claim 1, the articles supplied by each of the at least two article suppliers being contained in a carrier.

14. The laser marking apparatus of claim 1, the laser adapted to move in at least one direction.

15. The laser marking apparatus of claim 1, the laser comprising a carbon dioxide laser.

16. The laser marking apparatus of claim 1, the laser comprising a Nd:

YAG laser.

17. The laser marking apparatus of claim 1, the laser comprising a Nd:

YLF laser.

18. The laser marking apparatus of claim 1, further comprising a debris removal system adjacent to the laser adapted to remove debris from the surface of the article after marking.

19. The laser marking apparatus of claim 18, the debris removal system comprising a vacuum.

20. The laser marking apparatus of claim 1, the controller further adapted to:

detect when a predetermined number of articles is present at each of the laterally adjacent locations within the marking field; and

prevent marking of any article at its respective laterally adjacent location within the marking field until the predetermined number of articles is present at that laterally adjacent location.

21. The laser marking apparatus of claim 1, the controller further adapted to cause the laser to move directly above each of the articles of the first group and each of the articles of the second group while marking each of the articles in those respective groups.

22. The laser marking apparatus of claim 1, the at least two article suppliers comprising at least two article suppliers disposed at an angle to the horizontal.

23. The laser marking apparatus of claim 22, the angle to the horizontal comprising an angle between about 40°

to about 90°

.

24. The laser marking apparatus of claim 22, the angle to the horizontal comprising an angle which is generally vertical.

25. The laser marking apparatus of claim 1, the movement comprising gravity-induced movement.

26. The laser marking apparatus of claim 25, the controller further adapted to cause each of the at least two article suppliers to selectively arrest the singulated articles comprising a controller adapted to selectively activate at least one indexing pin corresponding to each of the at least two article suppliers to selectively arrest the movement of the singulated articles.

27. The laser marking apparatus of claim 1, the controller comprising a microprocessor.

28. The laser marking apparatus of claim 27, the microprocessor configured to control the positioning and transitioning of the articles.

29. The laser marking apparatus of claim 1, further comprising a camera located at a point downstream from the laser and adapted to photograph marked articles.

30. The laser marking apparatus of claim 29, the controller further associated with the camera, and adapted to receive input from the camera and compare the input with a predetermined mark quality standard.

31. The laser marking apparatus of claim 1, the controller further adapted to position a plurality of articles within the marking station as a group for marking by the laser in a single pass.

32. An apparatus for laser marking a singulated article comprising:

at least two article suppliers disposed at an angle to the horizontal, each of the at least two article suppliers configured to supply singulated articles under gravity to laterally adjacent locations within a marking field for marking;

a laser located proximate the marking field and configured to project a laser beam for marking the singulated articles;

a controller associated with the laser and adapted to;

cause each of the at least two article suppliers to selectively arrest gravity-induced movement of the singulated articles to accumulate groups of singulated articles at each of the laterally adjacent locations within the marking field;

direct the laser beam toward a first group of singulated articles at one of the laterally adjacent locations to sequentially mark each of the articles of the second group and to subsequently direct the laser beam toward a second group of singulated articles at another of the laterally adjacent locations to sequentially mark each of the articles of the second group.

33. The apparatus of claim 32, the controller further adapted to:

cause each of the at least two article suppliers to accumulate a group of singulated articles at the laterally adjacent locations for marking in an alternating fashion with a group of singulated articles accumulated by at least one other article supplier of the at least two article suppliers; and

direct the laser beam to sequentially mark articles of one group supplied by one article supplier while another group of articles supplied by another article supplier is being accumulated for marking.

34. An apparatus for laser marking singulated articles comprising:

at least two article suppliers configured to supply singulated articles to laterally adjacent locations within a marking field for marking;

a laser located proximate the marking field and configured to project a laser beam for marking the singulated articles; and

a controller associated with the laser and adapted to;

control a flow of articles on each of the at least two article suppliers such that each article arrives at each of the laterally adjacent locations within the marking field independent of each other article;

detect when a predetermined number, greater than one, of articles is present at one of the laterally adjacent locations; and

selectively cause the laser to mark all of the articles at the one of the laterally adjacent location.