Gold-alloy bonding wire

• US 5,989,364 A
• Filed: 12/12/1994
• Issued: 11/23/1999
• Est. Priority Date: 04/22/1993
• Status: Expired due to Term

• Current Assignee: Nippon Steel Corporation
• Original Assignee: Nippon Steel Corporation
• Inventors: Kitamura, Osamu
• Primary Examiner(s): Ip, Sikyin
• Application Number:
  US09/051,463
• Time in Patent Office: 1,807 Days
• Field of Search: 148/430, 420/507, 420/511
• US Class Current: 148/430
• CPC Class Codes: C22C 5/02 Alloys based on gold
• CPC Class Codes: H01L 2224/43 Manufacturing methods
• CPC Class Codes: H01L 2224/45015 being circular
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48 of an individual wire connector
• CPC Class Codes: H01L 24/43 Manufacturing methods
• CPC Class Codes: H01L 24/45 of an individual wire connector
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00011 Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01004 Beryllium [Be]
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/0102 Calcium [Ca]
• CPC Class Codes: H01L 2924/01021 Scandium [Sc]
• CPC Class Codes: H01L 2924/01027 Cobalt [Co]
• CPC Class Codes: H01L 2924/01028 Nickel [Ni]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/01032 Germanium [Ge]
• CPC Class Codes: H01L 2924/01039 : Yttrium [Y]
• CPC Class Codes: H01L 2924/01046 : Palladium [Pd]
• CPC Class Codes: H01L 2924/01047 : Silver [Ag]
• CPC Class Codes: H01L 2924/01049 : Indium [In]
• CPC Class Codes: H01L 2924/01057 : Lanthanum [La]
• CPC Class Codes: H01L 2924/01058 : Cerium [Ce]
• CPC Class Codes: H01L 2924/01066 : Dysprosium [Dy]
• CPC Class Codes: H01L 2924/0107 : Ytterbium [Yb]
• CPC Class Codes: H01L 2924/01075 : Rhenium [Re]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/01105 : Rare earth metals
• CPC Class Codes: H01L 2924/01203 : 3N purity grades, i.e. 99.9%
• CPC Class Codes: H01L 2924/01204 : 4N purity grades, i.e. 99.99%
• CPC Class Codes: H01L 2924/01205 : 5N purity grades, i.e. 99.999%
• CPC Class Codes: H01L 2924/013 : Alloys
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/20752 : larger or equal to 20 microns less than 30 microns

Abstract

A thin wire of gold alloy for wire bonding, consisting of: a first group consisting of 2 to 10 ppm by weight of scandium, 3 to 20 ppm by weight of beryllium, and 2 to 50 ppm by weight of indium; and the balance consisting of gold and unavoidable impurities. The thin wire has a loop height of 200 μm or more and a wire flow after resin molding of not more than 5%.

Claims

1. A thin wire of gold alloy for wire bonding, consisting of:

2 to 10 ppm by weight of scandium, 3 to 20 ppm by weight of beryllium, and 2 to 50 ppm by weight of indium; and

the balance consisting of gold and unavoidable impurities.

2. A thin wire of gold alloy for wire bonding, consisting of:

2 to 10 ppm by weight of scandium, 3 to 20 ppm by weight of beryllium, and 2 to 50 ppm by weight of indium;

at least one component selected from the group consisting of 1 to 5 ppm by weight of calcium, 1 to 5 ppm by weight of yttrium, 1-5 ppm by weight of at least one of rare earth metals, and 10 to 50 ppm by weight of germanium; and

the balance consisting of gold and unavoidable impurities.

3. A thin wire of gold alloy for wire bonding, consisting of:

a first group of components consisting of 2 to 10 ppm by weight of scandium, 3 to 20 ppm by weight of beryllium, and 2 to 50 ppm by weight of indium and at least one component selected from the group consisting of 1 to 5 ppm by weight of calcium, 1 to 5 ppm by weight of yttrium, 1-5 ppm by weight of at least one of rare earth metals, and 10 to 50 ppm by weight of germanium;

5 to 50 ppm by weight of silver;

5 to 30 ppm by weight of palladium;

5 to 40 ppm by weight of copper; and

the balance consisting of gold and unavoidable impurities.