A.C. power supply having combined regulator and pulsing circuits

• US 5,990,668 A
• Filed: 09/18/1998
• Issued: 11/23/1999
• Est. Priority Date: 11/07/1997
• Status: Expired due to Term

• Current Assignee: Sierra Applied Sciences Incorporated
• Original Assignee: Sierra Applied Sciences Incorporated
• Inventors: Coleman, Charles
• Primary Examiner(s): STERRETT, JEFFREY L
• Application Number:
  US09/157,044
• Time in Patent Office: 431 Days
• Field of Search: 323/220, 323/223, 323/225, 323/265, 323/268, 323/271, 323/272, 323/282, 323/285, 323/349, 323/350, 323/351, 363/65, 363/71
• US Class Current: 323/271
• CPC Class Codes: G05F 1/59 including plural semiconductor devices as final control devices for a single load
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34
• CPC Class Codes: H01J 37/3444 Associated circuits
• CPC Class Codes: H02M 3/158 including plural semiconductor devices as final control devices for a single load

Abstract

A circuit for producing an alternating output current may comprise a first current regulator and a second current regulator. The first current regulator produces a first phase of the alternating output current and regulates the current of the first phase. The second current regulator produces a second phase of the alternating output current and regulates the current of the second phase. A first polarity reversing circuit operatively associated with the first current regulator periodically reverses the polarity of the first phase. A second polarity reversing circuit operatively associated with the second current regulator periodically reverses the polarity of the second phase. A control system operatively associated with the first and second current regulators and the first and second polarity reversing circuits controls the operation of the first and second current regulators and the first and second polarity reversing circuits.

Claims

1. A circuit for producing an alternating output current having a first phase and a second phase, comprising:

a first current regulator for producing the first phase and for regulating the current of the first phase;

a second current regulator for producing the second phase and for regulating the current of the second phase; and

a control system operatively associated with said first and second current regulators for controlling the operation of said first and second current regulators.

2. A circuit for producing an alternating output current having a first phase and a second phase, comprising:

a first current regulator for producing the first phase and for regulating the current of the first phase;

a first polarity reversing circuit operatively associated with said first current regulator for periodically reversing the polarity of the first phase;

a second current regulator for producing the second phase and for regulating the current of the second phase;

a second polarity reversing circuit operatively associated with said second current regulator for periodically reversing the polarity of the second phase; and

a control system operatively associated with said first and second current regulators and said first and second polarity reversing circuits for controlling the operation of said first and second current regulators and said first and second polarity reversing circuits.

3. The circuit of claim 2, wherein said first current regulator comprises:

a first diode having a cathode and an anode, the cathode of said first diode being electrically connected to a positive terminal of a supply of direct current, the cathode of said first diode also being electrically connected to a first output terminal of said circuit;

a first switching device electrically connected between the anode of said first diode and a negative terminal of the supply of direct current, said first switching device being switchable between a conducting state and a non-conducting state; and

a first inductor electrically connected between the anode of said first diode and a second output terminal of said circuit.

4. The circuit of claim 3, wherein said first polarity reversing circuit comprises:

a first capacitor having a first plate and a second plate, the first plate of said capacitor being electrically connected to the first output terminal; and

a second switching device electrically connected between the second plate of said first capacitor and the second output terminal, said second switching device being switchable between a conducting state and a non-conducting state.

5. The circuit of claim 4, further comprising a third switching device electrically connected between the first output terminal and the second output terminal, said third switching device being switchable between a conducting state and a non-conducting state.

6. The circuit of claim 5, wherein said second current regulator comprises:

a second diode having a cathode and an anode, the cathode of said second diode being electrically connected to the positive terminal of the supply of direct current, the cathode of said second diode also being electrically connected to a third output terminal of said circuit;

a fourth switching device electrically connected between the anode of said second diode and the negative terminal of the supply of direct current, said fourth switching device being switchable between a conducting state and a non-conducting state; and

a second inductor electrically connected between the anode of said second diode and a fourth output terminal of said circuit.

7. The circuit of claim 6, wherein said second polarity reversing circuit comprises:

a second capacitor having a first plate and a second plate, the first plate of said second capacitor being electrically connected to the third output terminal; and

a fifth switching device electrically connected between the second plate of said second capacitor and the fourth output terminal, said fifth switching device being switchable between a conducting state and a non-conducting state.

8. The circuit of claim 7, further comprising a sixth switching device electrically connected between the third and fourth output terminals, said sixth switching device being switchable between a conducing state and a non-conducting state.

9. The circuit of claim 8, further comprising a first current sensor connected in series between the anode of said first diode and said first inductor for sensing a current flowing in said first inductor and for producing a first current feedback signal related thereto, wherein said control system is operatively associated with said first current sensor and responsive to the first current feedback signal, said control system operating said first switching device between the conducting and non-conducting states to regulate the current flowing in said first inductor.

10. The circuit of claim 9, further comprising a second current sensor connected in series between the anode of said second diode and said second inductor for sensing a current flowing in said second inductor and for producing a second current feedback signal related thereto, wherein said control system is operatively associated with said second current sensor and responsive to the second current feedback signal, said control system operating said fourth switching device between the conducting and non-conducting states to regulate the current flowing in said second inductor.

11. The circuit of claim 10, further comprising a first bias supply circuit connected across the first and second plates of said first capacitor for maintaining a voltage potential across the first and second plates within a predetermined range of voltage potentials.

12. The circuit of claim 11, further comprising a second bias supply circuit connected across the first and second plates of said second capacitor for maintaining a voltage potential across the first and second plates within a predetermined range of voltage potentials.

13. A circuit for placing an alternating current on a first electrode and a second electrode positioned within a process chamber, comprising:

a first diode having a cathode and an anode, the cathode of said first diode being electrically connected to a positive terminal of a supply of direct current, the cathode of said first diode also being electrically connected to a first output terminal of said circuit;

a first switching device electrically connected between the anode of said first diode and a negative terminal of the supply of direct current, said first switching device being switchable between a conducting state and a non-conducting state;

a first inductor electrically connected between the anode of said first diode and a second output terminal of said circuit;

a first capacitor having a first plate and a second plate, the first plate of said capacitor being electrically connected to the first output terminal;

a second switching device electrically connected between the second plate of said first capacitor and the second output terminal, said second switching device being switchable between a conducting state and a non-conducting state;

a third switching device electrically connected between the first output terminal and the second output terminal, said third switching device being switchable between a conducting state and a non-conducting state;

a second diode having a cathode and an anode, the cathode of said second diode being electrically connected to the positive terminal of the supply of direct current, the cathode of said second diode also being electrically connected to a third output terminal of said circuit;

a fourth switching device electrically connected between the anode of said second diode and the negative terminal of the supply of direct current, said fourth switching device being switchable between a conducting state and a non-conducting state;

a second inductor electrically connected between the anode of said second diode and a fourth output terminal of said circuit;

a second capacitor having a first plate and a second plate, the first plate of said second capacitor being electrically connected to the third output terminal;

a fifth switching device electrically connected between the second plate of said second capacitor and the fourth output terminal, said fifth switching device being switchable between a conducting state and a non-conducting state;

a sixth switching device electrically connected between the third and fourth output terminals, said sixth switching device being switchable between a conducing state and a non-conducting state; and

a control system operatively associated with said first, second, third, fourth, fifth, and sixth switching devices for switching said first, second, third, fourth, fifth, and sixth switching devices between the conducting and non-conducting states.

14. The circuit of claim 13, wherein the first and third output terminals are electrically grounded and wherein the second output terminal is electrically connected to the first electrode and wherein the fourth output terminal is electrically connected to the second electrode.

15. The circuit of claim 13, further comprising a third diode connected in series with said third switching device and a fourth diode connected in series with said sixth switching device.

16. The circuit of claim 15, further comprising a first current sensor connected in series between the anode of said first diode and said first inductor for sensing a current flowing in said first inductor and for producing a first current feedback signal related thereto, wherein said control system is operatively associated with said first current sensor and responsive to the first current feedback signal produced thereby, said control system operating said first switching device between the conducting and non-conducting states to regulate the current flowing in said first inductor.

17. The circuit of claim 16, further comprising a second current sensor connected in series between the anode of said second diode and said second inductor for sensing a current flowing in said second inductor and for producing a second current feedback signal related thereto, wherein said control system is operatively associated with said second current sensor and responsive to the second current feedback signal produced thereby, said control system operating said fourth switching device between the conducting and non-conducting states to regulate the current flowing in said second inductor.

18. The circuit of claim 17, further comprising a first bias supply circuit connected across the first and second plates of said first capacitor for maintaining a voltage potential across the first and second plates within a predetermined range of voltage potentials.

19. The circuit of claim 18, further comprising a second bias supply circuit connected across the first and second plates of said second capacitor for maintaining a voltage potential across the first and second plates within a predetermined range of voltage potentials.

20. The circuit of claim 19, wherein said control system includes an arc detection circuit for detecting an arc condition in the process chamber and wherein said control system places the second and fifth switching devices in the conducting states when an arc condition is detected.

21. The circuit of claim 20, further comprising:

a first switching device current sensor operatively associated with said first switching device, said first switching device current sensor producing a first switching device current feedback signal related to current flowing in said first switching device and wherein said control system is operatively associated with said first switching device current sensor and responsive to the first switching device current feedback signal produced thereby, said control system placing said first switching device in the non-conducting state if the current in said first switching device exceeds a predetermined maximum current; and

a second switching device current sensor operatively associated with said fourth switching device, said second switching device current sensor producing a second switching device current feedback signal related to current flowing in said fourth switching device and wherein said control system is operatively associated with said second switching device current sensor and responsive to the second switching device current feedback signal produced thereby, said control system placing said fourth switching device in the non-conducting state if the current in said fourth switching device exceeds a predetermined maximum current.

22. A method for producing an alternating current output having a first phase and a second phase, the first and second phases each including a plurality of polarity reversal pulses, comprising the steps of:

providing a first current regulator for producing the first phase and for regulating the current of the first phase and a second current regulator for producing the second phase and for regulating the current of the second phase;

providing a first polarity reversing circuit for periodically reversing the polarity of the first phase and a second polarity reversing circuit for periodically reversing the polarity of the second phase;

alternately switching the first and second current regulators between an enabled state and a disabled state so that when the first current regulator is in the enabled state the second current regulator is in the disabled state and vice-versa;

activating the first polarity reversing circuit and deactivating the second polarity reversing circuit when the first current regulator is in the enabled state and the second current regulator is in the disabled state; and

deactivating the first polarity reversing circuit and activating the second polarity reversing circuit when the first current regulator is in the disabled state and the second current regulator is in the enabled state.

23. A combined regulator and pulsing circuit for regulating a current flowing between a first electrode and a second electrode and for reversing a voltage polarity across the first and second electrodes, comprising:

a first diode having a cathode and an anode, the cathode of said first diode being electrically connected to a positive terminal of a supply of direct current, the cathode of said first diode also being electrically connected to a first output terminal of said combined regulator and pulsing circuit, the first output terminal being adapted to be electrically connected to the first electrode;

a first switching device electrically connected between the anode of said first diode and a negative terminal of the supply of direct current, said first switching device being switchable between a conducting state and a non-conducting state;

an inductor electrically connected between the anode of said first diode and a second output terminal of said combined regulator and pulsing circuit, the second output terminal being adapted to be electrically connected to the second electrode;

a capacitor having a first plate and a second plate, the first plate of said capacitor being electrically connected to the first output terminal;

a second switching device having a first lead connected to the second plate of said capacitor, said second switching device being switchable between a conducting state and a non-conducting sate;

a third switching device connected in series between a second lead of said second switching device and the second output terminal, said third switching device being switchable between a conducting state and a non-conducting state; and

a control system operatively associated with said first, second, and third switching devices for switching said first, second, and third switching devices between the conducting and non-conducting states.

24. The circuit of claim 23, further comprising a second diode between the first output terminal and the second lead of said second switching device.

25. A combined regulator and pulsing circuit for regulating a current flowing between a first electrode and a second electrode and for reversing a voltage polarity across the first and second electrodes, comprising:

a supply of direct current having a positive output terminal and a negative output terminal;

a first inductor having a first end lead and a second end lead, the first end lead of said first inductor being electrically connected to the positive output terminal of said supply of direct current;

a first capacitor electrically connected in series between the second lead of said first inductor and the negative terminal of said supply of direct current;

a first diode having a cathode and an anode, the cathode of said first diode being electrically connected to the second end lead of said first inductor, the cathode also being electrically connected to a first output terminal of said combined regulator and pulsing circuit, the first output terminal being adapted to be electrically connected to the first electrode;

a first switching device electrically connected in series between the anode of said first diode and the negative terminal of said supply of direct current, said first switching device being switchable between a conducting state and a non-conducting state;

a second inductor electrically connected in series between the anode of said first diode and a second output terminal of said combined regulator and pulsing circuit, the second output terminal being adapted to be electrically connected to the second electrode;

a second capacitor having a first plate and a second plate, the first plate of said second capacitor being electrically connected to the cathode of said first diode;

a second switching device having a first lead connected to the second plate of said second capacitor, said second switching device being switchable between a conducting state and a non-conducting sate;

a third switching device connected in series between a second lead of said second switching device and the second output terminal, said third switching device being switchable between a conducting state and a non-conducting state; and

a control system operatively associated with said first switching device, said second switching device, and said third switching device for operating said first, second, and third switching devices in the conducting and non-conducting states.

26. The circuit of claim 25, further comprising a second diode between the first output terminal and the second lead of said second switching device.