Millimeter waveguide and a circuit apparatus using the same
First Claim
1. A millimeter waveguide comprising:
- a first single crystal substrate having a groove therein;
a conductor film to be grounded on a surface of said groove and a surface of said first single crystal substrate connecting to said surface of groove;
a second single crystal substrate covering said conductor film; and
a microstrip line on a surface of said second single crystal substrate, exposed to a cavity defined by said conductor film and said second crystal substrate;
wherein said conductor film comprises;
a first conductor layer on said first crystal substrate, covering said groove;
a conductive connecting layer on said first conductor layer;
a second conductor film on said conductive connecting layer extending from one edge of said groove; and
a third conductor film on said conductive connecting layer extending from another edge of said groove.
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Accused Products
Abstract
A millimeter waveguide is disclosed which includes: a first single crystal substrate having a groove therein; a conductor film on a surface of said groove and a surface of said first single crystal substrate connected to said surface of said groove; a second single crystal substrate covering said conductor film; and a microstrip line on a surface of said second single crystal substrate, exposed to a cavity in said groove. A protruding portion may be formed on a bottom surface of the groove. The microstrip line including foundation (nickel chromium) and conductive (gold) layers may be formed on a surface of the groove. A protruding portion may be formed on the second single crystal substrate, wherein the height of this protruding portion is less than the depth of the groove. A millimeter waveguide for a resonator is also disclosed wherein a cavity is formed in substrates with grounding conductive layers on surfaces of the cavity, a probe extending from a microstrip line on a top surface of the substrates. Similar millimeter waveguide is also disclosed wherein the probe is replaced by magnetic field coupling structure. A circuit apparatus is also disclosed which comprises the millimeter waveguide apparatus mentioned above mentioned and an active circuit fixed on the millimeter waveguide apparatus.
102 Citations
46 Claims
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1. A millimeter waveguide comprising:
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a first single crystal substrate having a groove therein; a conductor film to be grounded on a surface of said groove and a surface of said first single crystal substrate connecting to said surface of groove; a second single crystal substrate covering said conductor film; and a microstrip line on a surface of said second single crystal substrate, exposed to a cavity defined by said conductor film and said second crystal substrate; wherein said conductor film comprises; a first conductor layer on said first crystal substrate, covering said groove; a conductive connecting layer on said first conductor layer; a second conductor film on said conductive connecting layer extending from one edge of said groove; and a third conductor film on said conductive connecting layer extending from another edge of said groove. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A circuit apparatus comprising:
- a millimeter waveguide comprising;
a first single crystal substrate having a groove therein; a conductor film to be grounded on a surface of said groove and a surface of said first single crystal substrate connecting to said surface of groove; a second single crystal substrate covering said conductor film and having a via hole; a first microstrip line on a surface of said second single crystal substrate, exposed to a cavity defined by said conductor film and said second crystal substrate; a second microstrip line on an opposite surface of said second single crystal substrate, connecting to said first microstrip line via said via hole; and a third microstrip line on said opposite surface apart from said second microstrip line; an active circuit chip for performing a predetermined circuit operation; and connecting means for mechanically and electrically connecting said active circuit to said third microstrip line and to said second microstrip line, wherein there is a responsive relation between said first and third microstrip lines through said active circuit, said second microstrip line, and said via hole. - View Dependent Claims (12, 13, 14)
- a millimeter waveguide comprising;
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15. A millimeter waveguide comprising:
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a first single crystal substrate having a groove therein; a conductor film to be grounded on a surface of said groove and a surface of said first single crystal substrate connected to said surface of said groove; a second single crystal substrate covering said conductor film and having a protrusion toward said groove; and a microstrip line on a surface of said protrusion, exposed to a cavity defined by said conductor film and said second crystal substrate, a height of said protrusion being less than a depth of said groove. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A circuit apparatus comprising:
- a millimeter waveguide comprising;
a first single crystal substrate having a groove therein; a conductor film to be grounded on a surface of said groove and a surface of said first single crystal substrate connecting to said surface of said groove; a second single crystal substrate covering said second conductor film and having a protrusion toward said groove and a via hole therein; and a first microstrip line on a surface of said protrusion, exposed to a cavity defined by said conductor film and said second crystal substrate, a height of said protrusion being less than a depth of said groove; a second microstrip line on a surface of said second single crystal substrate opposite to said protrusion, connecting to said first microstrip line via said via hole; and a third microstrip line on said surface of said second single crystal substrate apart from said second microstrip line; and an active circuit chip for performing a predetermined circuit operation; and connecting means for mechanically and electrically connecting said active circuit to said third microstrip line and to said second microstrip line, wherein there is a responsive relation between said first and third microstrip lines through said active circuit, said second microstrip line, and said via hole. - View Dependent Claims (25, 26, 27)
- a millimeter waveguide comprising;
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28. A millimeter waveguide comprising:
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a first single crystal substrate; a conductor film to be grounded on said first single crystal substrate; a second single crystal substrate on said conductor film, having a groove on a side facing said first crystal substrate; and a microstrip line on a bottom surface of said groove. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36)
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37. A millimeter waveguide comprising:
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a first single crystal substrate having a hollow portion therein; a first conductor film to be grounded on a surface of said hollow portion and a surface of said first single crystal substrate connecting to said surface of said hollow portion; a second conductor film covering said hollow portion and said surface of said first single crystal substrate, having a first through hole above said hollow portion; a second single crystal substrate on said second conductor film, having a second through hole connecting to said first hole; and a microstrip line on a surface of said second single crystal substrate opposite to said first crystal substrate; and a probe extending from said microstrip line through said first and second through holes, exposed to a cavity defined by said first and second conductor films. - View Dependent Claims (38, 39)
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40. A millimeter waveguide comprising:
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a first single crystal substrate having a hollow portion therein; a first conductor film to be grounded on a surface of said hollow portion and a surface of said first single crystal substrate connecting to said surface of said hollow portion; a second conductor film covering said hollow portion and said surface of said first single crystal substrate, having a slot above said hollow portion; a second single crystal substrate on said second conductor film; and a microstrip line on a surface of said second single crystal substrate opposite to said first crystal substrate, confronting a cavity defined by said first and second conductor films through said slot, and said second single crystal substrate to electromagnetically couple to said cavity. - View Dependent Claims (41, 42)
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43. A circuit apparatus comprising:
- a millimeter waveguide comprising;
a first single crystal substrate; a conductor film to be grounded on a surface of said first single crystal substrate; a second single crystal substrate on said second conductor film, having a groove on side of said first crystal substrate and a via hole; and a first microstrip line on a bottom surface of said groove; a second microstrip line on a surface of said second single crystal substrate opposite to said groove, connecting to said first microstrip line via said via hole; and a third microstrip line on said surface of said second signal crystal substrate apart from said second microstrip line; an active circuit chip for performing a predetermined circuit operation; and connecting means for mechanically and electrically connecting said active circuit to said third microstrip line and to said second microstrip line, wherein there is a responsive relation between said first and third microstrip lines through said active circuit, said second microstrip line, and said via hole. - View Dependent Claims (44, 45, 46)
- a millimeter waveguide comprising;
Specification