Membrane-actuated charge controlled mirror

• US 5,991,066 A
• Filed: 10/15/1998
• Issued: 11/23/1999
• Est. Priority Date: 10/15/1998
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Memsolutions, Inc.
• Inventors: Little, Michael J., Robinson, William P., Gifford, Eric A.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): BURKE, MARGARET A
• Application Number:
  US09/172,613
• Time in Patent Office: 404 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/292, 359/293, 359/295, 359/298, 348/770, 348/771
• US Class Current: 359/293
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.

Claims

1. A light modulator, comprising:

a vacuum cell;

a transparent substrate in said vacuum cell

an array of electrostatically-actuable pivotable micromirrors on said substrate, said array being held at an reference potential;

an array of insulating posts supported in said vacuum cell;

a thin floating-potential insulating membrane that is supported by said posts above said array of micromirrors;

a collector grid in said vacuum cell that is spaced apart from said insulating membrane opposite said array; and

a source in said vacuum cell that emits primary electrons that are accelerated toward said reference potential through said collector grid and strike the backside of said insulating membrane causing secondary electrons to be ejected and collected on the collector grid thereby leaving a predetermined charge pattern on said membrane that produces finely-resolved attractive electrostatic forces that cause said micromirrors to pivot and deflect towards the membrane,

said membrane being thick enough to stop said primary electrons from penetrating through to said micromirrors and thin enough that the fringing fields between the charge pattern and the micromirrors do not degrade the resolution of the attractive electrostatic forces.

2. The light modulator of claim 1, wherein said transparent substrate forms a faceplate of said vacuum cell.

3. The light modulator of claim 1, further comprising a transparent equipotential layer between said substrate and said array of micromirrors that shields said micromirrors from charge accumulation on said transparent substrate.

4. The light modulator of claim 3, further comprising a conductive grid on said equipotential layer that ensures electrical continuity between said micromirrors.

5. The light modulator of claim 3, wherein said equipotential layer has an array of holes beneath respective micromirrors, further comprising:

an insulative layer beneath said equipotential layer; and

a buried conductive layer between said insulative layer and said substrate that is held at a constant potential, said constant potential creating an electric field through said holes with respect to said reference potential that establishes a constant attractive force on said micromirrors that biases them downward toward said substrate.

6. The light modulator of claim 5, wherein each said micromirror has a conductive post that extends from said substrate up to approximately one-half the substrate-to-membrane spacing, said insulating posts extending from said conductive posts to said membrane.

7. The light modulator of claim 1, further comprising:

an array of attractor pads on the backside of said membrane that are aligned with said array of micromirrors, said source writing said charge pattern onto said attractor pads such that each micromirror'"'"'s charge is distributed uniformly across the corresponding attractor pad.

8. The light modulator of claim 7, further comprising:

an array of attractor pads on the frontside of said membrane facing and aligned with said array of micromirrors, said attractor pads on the membrane'"'"'s backside and frontside forming an array of series capacitors so that charge deposited on said backside attractor pads produces mirror charges on said frontside attractor pads opposite said micromirrors.

9. The light modulator of claim 7, wherein said attractor pads are coated with a secondary emission material that exhibits a secondary emission coefficient greater than one.

10. The light modulator of claim 7, wherein said attractor pads exhibit a secondary emission coefficient less than one, further comprising an control pad that exhibits a secondary emission coefficient greater than one on each said attractor pad.

11. The light modulator of claim 1, wherein each said micromirror comprises:

a conductive post that spaces said micromirror apart from said substrate;

a hinge that allows said micromirror to pivot and deflect upward toward the membrane in response to the attractive electrostatic forces; and

a reflective surface for deflecting a beam of light,

said hinge and said reflective surface being coplanar and having the same thickness, which in the absence of said membrane would be too thin to stop the primary electrons.

12. The light modulator of claim 1, wherein said charge pattern increases the localized membrane potentials toward the grid potential so that the potential differences between the membrane and the micromirrors produces the finely-resolved attractive electrostatic forces, said micromirrors being susceptible to snap-over when the potential difference exceeds a threshold potential, said collector grid being biased so that said grid potential is less than said threshold potential.

13. A light modulator, comprising:

a vacuum cell;

a charge controlled mirror (CCM) mounted in said vacuum cell, comprising,

a transparent substrate;

a transparent equipotential layer on said transparent substrate;

an array of electrostatically-actuable pivotable micromirrors on said equipotential layer that are both held at an reference potential;

an array of insulating posts on said substrate;

a floating-potential insulating membrane supported by said posts above said array of micromirrors; and

a collector grid spaced apart from said insulating membrane opposite said micromirrors; and

a source that emits primary electrons that are accelerated through said collector grid and strike portions of said insulating membrane above respective micromirrors causing secondary electrons to be ejected and collected on the collector grid thereby leaving a predetermined charge pattern on said membrane that produces finely-resolved attractive electrostatic forces that cause said micromirrors to pivot and deflect towards the membrane.

14. The light modulator of claim 13, further comprising a conductive grid on said equipotential layer that ensures electrical continuity between said micromirrors.

15. The light modulator of claim 13, wherein said equipotential layer has an array of holes beneath respective micromirrors, further comprising:

an insulative layer beneath said equipotential layer; and

a buried conductive layer between said insulative layer and said substrate that is held at a constant potential, said constant potential creating an electric field through said holes with respect to said reference potential that establishes a constant attractive force on said micromirrors that biases them downward toward said substrate.

16. The light modulator of claim 13, further comprising:

an array of attractor pads on the backside of said membrane grid that are aligned with said array of micromirrors, said source writing said charge pattern onto said attractor pads such that each micromirror'"'"'s charge is distributed uniformly across the corresponding attractor pad.

17. The light modulator of claim 16, further comprising:

an array of attractor pads on the frontside of said membrane facing and aligned with said array of micromirrors, said attractor pads on the membrane'"'"'s backside and frontside forming an array of series capacitors so that charge deposited on said backside attractor pads produces mirror charges on said frontside attractor pads opposite said micromirrors.

18. The light modulator of claim 13, wherein said charge pattern increases the localized membrane potentials toward the grid potential so that the potential differences between the membrane and the micromirrors produces the finely-resolved attractive electrostatic forces, said micromirrors being susceptible to snap-over when the potential difference exceeds a threshold potential, said collector grid being biased so that said grid potential is less than said threshold potential.

19. A light modulator comprising:

a vacuum cell;

a charge controlled mirror (CCM) mounted in said vacuum cell, comprising,

a transparent substrate;

a transparent equipotential layer on said transparent substrate;

a conductive grid on said equipotential layer;

an array of electrostatically-actuable cantilevered micromirrors, respective pluralities of said micromirrors sharing portions of said conductive grid as common post regions, said conductive grid, said equipotenital layer and said micromirrors being held at an reference potential;

an array of insulating floating-potential post-membranes on said micromirror'"'"'s common post regions that fan out above the respective micromirrors that share each said post region;

an array of attractor pads on said post-membranes that are aligned to the underlying micromirrors; and

a collector grid spaced apart from said insulating post-membranes opposite said micromirrors; and

a source that emits primary electrons that are accelerated through said collector grid and strike the attractor pads on said post-membranes causing secondary electrons to be ejected and collected on the collector grid thereby leaving a predetermined charge pattern on said attractor pads that produces finely-resolved attractive electrostatic forces that cause said micromirrors to pivot and deflect towards the post-membranes.

20. The light modulator of claim 19, wherein each said post-membrane has a plurality of electrically isolated attractor pads that are aligned with the respective plurality of underlying micromirrors.

21. The light modulator of claim 20, further comprising:

an array of attractor pads on the frontside of said membrane facing and aligned with said array of micromirrors, said attractor pads on the membrane'"'"'s backside and frontside forming an array of series capacitors so that charge deposited on said backside attractor pads produces mirror charges on said frontside attractor pads opposite said micromirrors.

22. The light modulator of claim 20, wherein said attractor pads are coated with a secondary emission material that exhibits a secondary emission coefficient greater than one.

23. The light modulator of claim 20, wherein said attractor pads exhibit a secondary emission coefficient less than one, further comprising a control pad on each said attractor pad that exhibits a secondary emission coefficient greater than one.

24. A charge controlled mirror (CCM), comprising:

a transparent substrate;

an array of electrostatically-actuable electrically connected micromirrors on said substrate;

an array of insulating posts on said substrate;

a floating-potential insulating membrane supported on said posts above said array of micromirrors, said membrane having a thickness that is less than the micromirror-to-membrane spacing; and

a collector grid in said vacuum cell that is spaced apart from said insulating membrane opposite said array.

25. The CCM of claim 24, further comprising an equipotential layer on the substrate that shields the array of micromirrors.

26. The CCM of claim 25, wherein said equipotential layer has an array of holes beneath respective micromirrors, further comprising:

an insulative layer beneath said equipotential layer; and

a buried conductive layer between said insulative layer and said substrate that is held at a constant potential, said constant potential creating an electric field through said holes with respect to said reference potential that establishes a constant attractive force on said micromirrors that biases them downward toward said substrate.

27. The CCM of claim 24, further comprising:

an array of attractor pads on one side of said membrane grid that are aligned with said array of micromirrors.

28. The CCM of claim 27, further comprising:

an array of attractor pads on the other side of said membrane aligned with said array of micromirrors, said attractor pads on the membrane'"'"'s backside and frontside forming an array of series capacitors.

29. A charge controlled mirror (CCM), comprising:

a transparent substrate;

a transparent equipotential layer on said transparent substrate;

an array of electrostatically-actuable cantilevered micromirrors on said equipotential layer;

an array of insulating posts on said substrate;

a thin floating-potential insulating membrane supported by said posts above said array of micromirrors; and

a collector grid in said vacuum cell that is spaced apart from said insulating membrane opposite said array.

30. The CCM of claim 29, further comprising a conductive grid on said equipotential layer that ensures electrical continuity between said micromirrors.

31. The CCM of claim 30, wherein said array of micromirrors and said conductive grid are an integral structure with portions of said conductive grid forming post regions for said micromirrors, said insulating posts extending from said post regions to support said membrane.

32. The CCM of claim 29, wherein said equipotential layer has an array of holes beneath respective micromirrors, further comprising:

an insulative layer beneath said equipotential layer; and

a buried conductive layer between said insulative layer and said substrate that is held at a constant potential.