Method for intelligent data acquisition in a measurement system

• US 5,991,696 A
• Filed: 07/11/1997
• Issued: 11/23/1999
• Est. Priority Date: 07/11/1997
• Status: Expired due to Term

• Current Assignee: American Air Liquide Incorporated (L'Air Liquide SA)
• Original Assignee: American Air Liquide Incorporated (L'Air Liquide SA)
• Inventors: McAndrew, James J. F.
• Primary Examiner(s): Trammell, James P.
• Assistant Examiner(s): SMITH-STEWART, DEMETRA R
• Application Number:
  US08/893,539
• Time in Patent Office: 865 Days
• Field of Search: 702/24, 73/23.2, 73/31.06, 73/40.05 R, 95/8, 438/14, 250/339.11, 250/339.13, 250/339.1, 250/341.4, 250/343, 340/632, 356/326, 356/433, 356/437, 356/439, 436/146, 436/151, 436/171, 436/174, 436/153, 436/167
• US Class Current: 702/24
• CPC Class Codes: G01N 2015/0046 in gas, e.g. smoke
• CPC Class Codes: G01N 2021/354 Hygrometry of gases
• CPC Class Codes: G01N 2021/399 Diode laser
• CPC Class Codes: G01N 21/3554 for determining moisture content
• CPC Class Codes: G01N 21/39 using tunable lasers

Abstract

Provided is a novel method for intelligent data acquisition in a measurement system. The method comprises the following steps: (a) providing a measurement system; (b) performing a measurement with the measurement system, thereby obtaining a measurement result; (c) writing the measurement result to a data file on a first storage device; (d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file; (e) generating one or more summary values from the measurement results; (f) saving the one or more summary values to a summary file on the first storage device or on a second storage device; (g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared; and (h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present. Particular applicability is found in in-situ moisture concentration measurement in a semiconductor processing apparatus.

Claims

1. A method for intelligent data acquisition in a measurement system, comprising:

(a) providing a measurement system;

(b) performing a measurement with the measurement system, thereby obtaining a measurement result;

(c) writing the measurement result to a data file on a first storage device;

(d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file;

(e) generating one or more summary values from the measurement results;

(f) saving the one or more summary values to a summary file on the first storage device or on a second storage device;

(g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared;

(h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present.

2. The method for intelligent data acquisition according to claim 1, further comprising the step of:

(i) repeating steps (b) through (h) one or more times n for n additional data files.

3. The method for intelligent data acquisition according to claim 1, wherein the summary file is closed and a new summary file is opened after a predefined interval of time.

4. The method for intelligent data acquisition according to claim 1, wherein the measurement system is an absorption spectroscopy measurement system.

5. The method for intelligent data acquisition according to claim 4, wherein the measurement result is concentration of a molecular gas phase species.

6. The method for intelligent data acquisition according to claim 5, wherein the molecular gas phase species is water vapor.

7. The method for intelligent data acquisition according to claim 1, wherein the sample region is located in a process chamber of or an exhaust line of a semiconductor processing tool.

8. The method for intelligent data acquisition according to claim 1, wherein the measurement system is an absorption spectroscopy measurement system.

9. The method for intelligent data acquisition according to claim 8, wherein the measurement result is concentration of a molecular gas phase species.

10. The method for intelligent data acquisition according to claim 1, wherein the data file is saved in step (h) when the trigger indicates that the semiconductor processing tool is in process.

11. A method for intelligent data acquisition in a measurement system, comprising:

(a) providing a measurement system for performing an in-situ measurement of a gas phase molecular species in a gas passing through a sample region;

(b) measuring an absorption for the molecular species and calculating a concentration thereof with the measurement system;

(c) writing the concentration to a data file on a first storage device;

(d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of concentration results in the data file;

(e) generating one or more summary values from the concentration results;

(f) saving the one or more summary values to a summary file on the first storage device or on a second storage device;

(g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared;

(h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present.

12. The method for intelligent data acquisition according to claim 11, further comprising the step of:

(i) repeating steps (b) through (h) one or more times n for n additional data files.

13. The method for intelligent data acquisition according to claim 11, wherein the summary file is closed and a new summary file is opened after a predefined interval of time.

14. The method for intelligent data acquisition according to claim 11, wherein the molecular gas phase species is water vapor.

15. The method for intelligent data acquisition according to claim 11, wherein the sample region is located in a process chamber of or an exhaust line of a semiconductor processing tool.

16. The method for intelligent data acquisition according to claim 11, wherein the data file is saved in step (h) when the trigger indicates that the semiconductor processing tool is in process.