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Micromachined Z-axis vibratory rate gyroscope

  • US 5,992,233 A
  • Filed: 05/31/1996
  • Issued: 11/30/1999
  • Est. Priority Date: 05/31/1996
  • Status: Expired due to Term
First Claim
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1. A sensor comprising:

  • a substrate;

    a mass connected to said substrate by a suspension system to vibrate in a plane parallel to a surface of said substrate;

    a first plurality of electrode fingers projecting from said mass along a first axis in said plane;

    a second plurality of electrode fingers connected to said substrate and projecting substantially along said first axis;

    a third plurality of electrode fingers connected to said substrate but electrically isolated from said second plurality of electrode fingers, said third plurality of electrode fingers projecting substantially along said first axis, said second and third pluralities of electrode fingers interdigitated with said first plurality of electrode fingers such that each of said first plurality of electrode fingers is adjacent to one of said second plurality of electrode fingers and one of said third plurality of electrode fingers;

    an electrostatic drive system to apply an oscillatory force to said mass along said first axis to cause said mass to vibrate;

    a position sensor to measure a deflection of said mass in said plane; and

    a first voltage source for applying a first DC voltage between said second and third pluralities of electrode fingers to cause said mass to vibrate, absent a Coriolis force, more precisely along said first axis.

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