Pressure detecting apparatus for measuring pressure based on detected capacitance

• US 5,992,240 A
• Filed: 11/20/1996
• Issued: 11/30/1999
• Est. Priority Date: 11/21/1995
• Status: Expired due to Term

• Current Assignee: Fuji Electric Company Limited (Fuji Electric Systems Company Limited)
• Original Assignee: Fuji Electric Company Limited (Fuji Electric Systems Company Limited)
• Inventors: Tsuruoka, Michihiko, Takahashi, Masato, Kudo, Takahiro, Tsukamoto, Shuji, Kato, Nobuhisa, Nakamura, Kimihiro
• Primary Examiner(s): Oen, William L.
• Application Number:
  US08/754,495
• Time in Patent Office: 1,105 Days
• Field of Search: 73/718, 73/724, 361/283.1, 361/283.3, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes position depending on a differential pressure between a first pressure and a second pressure, a first electrode which is provided opposite a first plane of the diaphragm and forms, together with the diaphragm, a first capacitor, a second electrode which is provided opposite a second plane of the diaphragm and forms, together with the diaphragm, a second capacitor, a third capacitor altering a capacitance according to the first pressure, a detecting unit for detecting the capacitance of the first through third capacitors, and an operation unit for obtaining a pressure applied to the diaphragm based on the capacitance of the first and second capacitors, and amending the obtained pressure based on the capacitance of the third capacitor.

Claims

1. A capacitance-based pressure detecting apparatus for detecting pressure applied to a diaphragm based on a capacitance which varies with a change in portion of the diaphragm, comprising:

a diaphragm changing position depending on a differential pressure between a first pressure and a second pressure;

a first electrode provided opposite a first plane of said diaphragm, forming together with said diaphragm, a first capacitor;

a second electrode provided opposite a second plane of said diaphragm, forming, together with said diaphragm, a second capacitor;

a third capacitor altering a capacitance according to the first pressure;

detecting means for detecting the capacitance of said first through third capacitors; and

operating means for obtaining pressure applied to said diaphragm based on the capacitance of said first and second capacitors, and amending the obtained pressure based on the capacitance of said third capacitor.

2. The pressure detecting apparatus according to claim 1, further comprising:

switching means for switching connections between said first through third capacitors and said detecting means, and selectively transmitting one of outputs from said first through third capacitors to said detecting means.

3. The pressure detecting apparatus according to claim 1, wherein

said third capacitor comprises a third electrode formed on an insulation substrate and a conductive substrate;

and

a vacuum is substantially maintained between said third electrode and a conductive substrate.

4. The pressure detecting apparatus according to claim 1, further comprising:

a fourth capacitor altering a capacitance according to ambient temperature of said diaphragm, wherein

said operating means performs a temperature amendment for the obtained pressure based on the capacitance of said fourth capacitor.

5. The pressure detecting apparatus according to claim 4, further comprising:

switching means for switching connections between said first through fourth capacitors and said detecting means, and selectively transmitting one of outputs from said first through fourth capacitors to said detecting means.

6. The pressure detecting apparatus according to claim 4, wherein

said fourth capacitor comprises a conductive substrate and said third electrode having an insulation substrate therebetween.

7. The pressure detecting apparatus according to claim 4, wherein

said fourth capacitor comprises a pair of electrodes having a dielectric substrate therebetween.

8. The pressure detecting apparatus according to claim 4, wherein

said fourth capacitor comprises a pair of comb-shaped electrodes incorporated into each other on a plane of a substrate.

9. The pressure detecting apparatus according to claim 1, further comprising:

a fourth capacitor sandwiching a pressure conducting medium for transmitting said first pressure to said diaphragm, wherein

said operating means performs an amendment depending on a change in a dielectric constant of the pressure conducting medium for the obtained pressure, based on the capacitance of said fourth capacitor.

10. The pressure detecting apparatus according to claim 9, further comprising:

switching means for switching connections between said first through fourth capacitors and said detecting means, and selectively transmitting one of outputs from said first through fourth capacitors to said detecting means.

11. The pressure detecting apparatus according to claim 9, wherein

said fourth capacitor comprises a third electrode formed on an insulation substrate and a conductive substrate, wherein

the pressure conducting medium is filled between said third electrode and said conductive substrate.

12. The pressure detecting apparatus according to claim 9, wherein

said fourth capacitor comprises a pair of comb-shaped electrodes incorporated into each other on a plane of an insulation substrate, and the pressure conducting medium is filled therebetween.

13. The pressure detecting apparatus according to claim 1, wherein

said third capacitor comprises a third electrode formed on an insulation substrate and a conductive substrate, wherein

a vacuum is substantially maintained between said third electrode and a conductive substrate;

and

a portion of said conductive substrate corresponding to said third capacitor is formed as having a predetermined thickness by performing a plasma-etching process on both sides of said conductive substrate.

14. The pressure detecting apparatus according to claim 1, further comprising:

a second diaphragm changing position depending on a differential pressure between the first pressure and the second pressure;

a third electrode provided opposite a first plane of said second diaphragm, forming, together with said second diaphragm, a fourth capacitor; and

a fourth electrode provided opposite a second plane of said second diaphragm, forming, together with said second diaphragm, a fifth capacitor.

15. The pressure detecting apparatus according to claim 14, further comprising:

switching means for switching connections between said first through fifth capacitors and said detecting means, and selectively transmitting one of outputs from said first through fifth capacitors to said detecting means.

16. The pressure detecting apparatus according to claim 15, further comprising:

a sixth capacitor altering a capacitance according to ambient temperature of said diaphragm, wherein

said operating means performs temperature amendment for the obtained pressure based on the capacitance of said sixth capacitor.

17. The pressure detecting apparatus according to claim 16, wherein

said switching means switches connections between said first through sixth capacitors and said detecting means, and selectively transmits one of outputs from said first through sixth capacitors to said detecting means.

18. The pressure detecting apparatus according to claim 16, wherein

said sixth capacitor comprises a conductive substrate and said fifth electrode having an insulation substrate therebetween.

19. The pressure detecting apparatus according to claim 14, wherein

said diaphragm is made thinner than said second diaphragm.

20. The pressure detecting apparatus according to claim 14, wherein

said operating means comprises averaging means for averaging a pressure value computed based on the capacitances of said first and second capacitors and a pressure value computed based on the capacitances of said third and fourth capacitors, and then outputting a averaging result.

21. The pressure detecting apparatus according to claim 14, wherein

said operating means comprises sensor selecting means for selecting one of a pressure value computed based on the capacitances of said first and second capacitances and a pressure value computed based on the capacitances of said third and fourth capacitances, and then outputting a selected value.

22. The pressure detecting apparatus according to claim 14, wherein

said operating means comprises composite signal generating means for combining in a predetermined method a pressure value computed based on the capacitances of said first and second capacitors with a pressure value computed based on the capacitances of said third and fourth capacitors, and then outputting a combination result.

23. The pressure detecting apparatus according to claim 14, wherein said operating means comprises:

averaging means for averaging a pressure value computed based on the capacitances of said first and second capacitors and a pressure value computed based on the capacitances of said third and fourth capacitors, and then outputting a averaging result;

sensor selecting means for selecting one of a pressure value computed based on the capacitances of said first and second capacitors and a pressure value computed based on the capacitances of said third and fourth capacitors, and then outputting a selected value;

composite signal generating means for combining in a predetermined method a pressure value computed based on the capacitances of said first and second capacitors with a pressure value computed based on the capacitances of said third and fourth capacitors, and then outputting a combination result; and

an output operation amending unit for obtaining an output signal by selectively operating one of said averaging means, composite signal generating unit, and sensor selecting means.

24. The pressure detecting apparatus according to claim 16, further comprising:

a seventh capacitor sandwiching a pressure conducting medium for transmitting said first pressure to said diaphragm and said second diaphragm, wherein

said operating means performs an amendment depending on a change in dielectric constant of the pressure conducting medium for the pressure obtained based on the capacitance of said seventh capacitor.

25. The pressure detecting apparatus according to claim 24, wherein

said switching means switches connections between said first through seventh capacitors and said detecting means, and selectively transmits one of the outputs from said first through seventh capacitors and said detecting means.

26. The pressure detecting apparatus according to claim 24, wherein said detecting means comprises:

capacitance converting means for converting the capacitance of said first through seventh capacitors into a pulse signal;

a counter circuit for detecting a number of pulses of the pulse signal and a generation time of the pulse signal; and

an operating circuit for determining the capacitance of said first through seventh capacitors.

27. The pressure detecting apparatus according to claim 26, wherein said capacitance converting means comprises

a Schmidt trigger gate for generating one pulse before a discharging voltage of said first through seventh capacitors reaches a second threshold after exceeding a first threshold.

28. The pressure detecting apparatus according to claim 26, wherein said capacitance converting means comprises

a NAND gate for generating one pulse before a discharging voltage of said first through seventh capacitors reaches a second threshold after reaching a first threshold when a gate voltage indicates a high level.

29. The pressure detecting apparatus according to claim 26, wherein said capacitance converting means comprises

a circuit, comprising two resistors and two inverters, for generating one pulse before a discharging voltage of said first through seventh capacitors reaches a second threshold after exceeding a first threshold.

30. The pressure detecting apparatus according to claim 26, wherein said capacitance converting means comprises

a circuit, comprising two switches connected to a constant current source and a gate, for generating one pulse before a discharging voltage of said first through seventh capacitors reaches a second threshold after exceeding a first threshold.

31. The pressure detecting apparatus according to claim 26, wherein

said capacitance converting means comprises a circuit comprising a first resistor, and a second resistor, and three inverters connected in parallel to said first resistor.

32. The pressure detecting apparatus according to claim 26, wherein

said capacitance converting means comprises a circuit comprising a first resistor, and a second resistor, a NAND gate, and two inverters connected in parallel to said first resistance.

33. The pressure detecting apparatus according to claim 26, wherein

said capacitance converting means comprises a serial circuit comprising two switches connected to a constant current source, a resistor, and three inverters.