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Magnetron

  • US 5,993,598 A
  • Filed: 07/22/1997
  • Issued: 11/30/1999
  • Est. Priority Date: 07/30/1996
  • Status: Expired due to Fees
First Claim
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1. A plasma-generating device, comprising two electrodes, at least one of said electrodes defining an electrode surface and containing two or more magnets, each magnet having two opposite magnetic poles, said magnets positioned such that like magnetic poles of said magnets are all facing in substantially the same direction, each magnetic pole of each magnet producing a magnetic field with the opposite magnetic pole on the same magnet;

  • each magnetic field having a component parallel to said electrode surface.

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