Method and apparatus for detecting arcs

• US 5,993,615 A
• Filed: 06/19/1997
• Issued: 11/30/1999
• Est. Priority Date: 06/19/1997
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Seward, Jeffrey N., Abry, Charles R., Murphy, William J.
• Primary Examiner(s): Gupta, Yogendra
• Assistant Examiner(s): Ingersoll, Christine E.
• Application Number:
  US08/879,285
• Time in Patent Office: 894 Days
• Field of Search: 204/192.12, 204/298.03, 204/192.17, 204/192.13, 118/712
• US Class Current: 204/192.13
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34
• CPC Class Codes: H01J 37/3444 Associated circuits

Abstract

The present invention is a thin film deposition tool with arc detection capabilities. An arc detector is provided in the power supply line between the power supply and the sputter deposition tool. Arcs are detected by the arc detector and counted using a logic circuit. Arc data is collected and analyzed and real-time data is provided which can be used to stop further processing until a repair is made.

Claims

1. A plasma processing apparatus having a control system, comprising:

a power supply having a power supply line for connection to a powered electrode in a plasma chamber for providing an operating voltage to said powered electrode;

an arc detector connected to said power supply line for detecting arcs during processing, said arc detector utilizing a first threshold voltage less than said operating voltage and a second threshold voltage less than said first threshold voltage to determine presence and magnitude of an arc relative to said first and second threshold voltages; and

a controller connected to said arc detector to measure an arc-related parameter, said controller further comprising a control line capable of providing a signal based on said parameter.

2. The apparatus of claim 1, wherein said apparatus is adapted to stop further deposition upon receipt of said signal.

3. The apparatus of claim 1, wherein said apparatus is adapted to activate an alarm upon receipt of said signal.

4. The apparatus of claim 3, wherein said apparatus is adapted to allow further processing upon receipt of said signal while activating said alarm.

5. The apparatus of claim 3, wherein said apparatus is adapted to provide a signal based on count rate of arcs detected.

6. The apparatus of claim 3, wherein said apparatus is adapted to provide a signal based on the rate of change of count rate of arcs detected.

7. The apparatus of claim 3, wherein said apparatus is adapted to stop further processing when count of arcs detected exceeds a selected number per deposition run.

8. The apparatus of claim 7, wherein said apparatus is adapted to stop further processing when the number of arcs detected per deposition run exceeds 20.

9. The apparatus of claim 1 wherein said apparatus is adapted to collect information about arcing in the apparatus.

10. The apparatus of claim 1, wherein said apparatus is a plasma vapor deposition apparatus.

11. The apparatus of claim 1, wherein said apparatus is a sputtering apparatus and said process is deposition.

12. The apparatus of claim 1, wherein said apparatus is adapted to provide a signal from the control line which indicates magnitude of the arc.

13. The apparatus of claim 1, wherein said arc related parameter is a apparatus voltage.

14. The apparatus of claim 13, wherein said apparatus voltage is cathode voltage.

15. A method of detecting arcing during plasma deposition or etch processing comprising the steps of:

(a) providing a power supply having a power supply line for connection to a powered electrode in a plasma chamber for providing an operating voltage to said powered electrode;

(b) providing an arc detector in said power supply line for detecting arcs during processing, said arc detector utilizing a first threshold voltage less than said operating voltage and a second threshold voltage less than the first threshold voltage to determine presence and magnitude of an arc relative to said first and second threshold voltages; and

(c) providing a controller connected to said arc detector to measure an arc related parameter, said controller further comprising a control line capable of providing a signal based on said measurement.

16. The method of claim 15, wherein, in step (c), the signal based on the measurement of said arc related parameter signals detection of an arc relative to said first and second threshold voltages, and further including the steps of:

(d) detecting an actual target voltage in said power supply line below said operating voltage;

(e) comparing the actual target voltage to said first and second threshold voltages; and

(f) signaling detection of an arc relative to said first and second threshold voltages.

17. The method as recited in claim 16, further comprising the step of depositing a layer of material from a target connected to said power supply line while detecting said actual target voltage in said power supply line.

18. The method as recited in claim 17, further comprising the step of determining whether damage had occurred to said target during said depositing step by analyzing said measurement.

19. The method as recited in claim 18, further comprising investigating, detecting, and repairing a defect in said apparatus that caused arcing.

20. The method as recited in claim 16, wherein said depositing step comprises sputter deposition.

21. The method as recited in claim 16, wherein said detecting step further comprises counting arcs.

22. The method as recited in claim 16, wherein said detecting step further comprises determining magnitude of the arc.

23. The method as recited in claim 16, further comprising the step of plasma etching while detecting said actual target voltage in said power supply line.

24. The method as recited in claim 16, wherein said signal is received by a apparatus controller.

25. The method as recited in claim 23, wherein said apparatus controller is adapted to stop operation of said apparatus upon receipt of said signal.

26. The method of claim 21 wherein said signaling step provides a signal based on count rate of arcs detected.

27. The method of claim 21 wherein said signaling step provides a signal based on the rate of change of count rate of arcs detected.